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Tin oxide film has been well development as antistatic
coating on the monitor because of well conductivity and high
transparency in visible lightrange. Sol-gel method was used in
this study and the precursor was made fromSnCl4．XH2O, SbCl3
which is the source of dopant, and different fractional ofurea
by refluxed for two hours to form SnO2 colloidal solution.
Colloidal solution was washed by distilled water and dried to
become gel powders. Thin films were prepared by dipping the
glass substrate into the colloidal solution.The characteristics
of the fine powders decreased as increasing the amount of urea.
These crystal size of the fine powders decreased as increasing
the amountof urea. these gel powders have the tetragonal crystal
structure before heat treatment. From TEM investigation, the
particle size of the powders increased as increasing the heating
temperature. The resultant films showed a uniform microstructure
and have higher than 80﹪ transmission of visible light.
Resistivity of the films was decreased by increasing the dipping
layers. The sheet resistance of the ten-layers films was in the
range of 10E6∼10E7 Ω/□.
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