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This Thesis describes the vertical mode control of the magnetic
suspended table ,including vertical position ,pitch and roll
attitude to satisfy the system specification in attitude
variation ,position accuracy and disturbance rejection .A
magnetic suspended table has been realized according t?*He
guide line of system engineering process ,from system
specification、preliminary design、detail design、fabrication、
assembling till testing for studying the theoretical and
hardware implementation of such a syst .The system includes six
major parts :permanent magnet、 electronic magnet、current
amplifier、eddy current displacement sensor、mechanical parts
and digital control processor .The permanent magnetic force
supports the major parts of table weight and variable reluctance
of electrical magnet control the position of a 6 kg table.
The multiple-input multiple-output vertical mode system is
decoupled into three independent subsystems thus simple lead
control laws can be applied .Each loop of the magnetic suspended
table may be stablized at the same time and satisfy the system
specification ,gain margin is 20db、phase margin is more than 60
degree、bandwidth of attitude control is 80 Hz，position
accuracy is 1.5μm，the table displacement is less than 20μm
under a 0.08g-sec impulse disturbance.
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