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研究生:林建泰
研究生(外文):., .
論文名稱:底層材料對Sr系鐵氧磁體薄膜磁性之影響
論文名稱(外文):.
指導教授:張文成張文成引用關係
指導教授(外文):.
學位類別:碩士
校院名稱:國立中正大學
系所名稱:物理學系
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:1997
畢業學年度:85
語文別:中文
論文頁數:2
中文關鍵詞:底層材料鐵氧磁體薄膜磁性
外文關鍵詞:.
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摘要 本
研究主要在建立高矯頑磁力Sr-Ferrite薄膜(厚度:500-
1000nm)的製程技術,以作為微波或微電子元件之應用。以SiO2、ZnO 及
Al2O3三種材料為底材製作SrO‧nFe2O3(n=5.5,5.75,5.95)薄 膜。
藉由控制底材厚度、磁膜厚度、結晶化處理溫度及n值,來研究 其對磁
性的影響,經證實可得下列結論: (1)當底
材為SiO2時,磁膜之磁晶易磁化軸之分佈會隨著n值 愈接近6而更
趨向於水平分佈。當底材為ZnO及Al2O3時, 磁膜之磁晶易磁
化軸之分佈會隨著n值的減少,而從 n=5.95時的垂直分
佈轉變到n=5.5時的水平分佈。 (2)SrO‧nFe2O3六
方晶系薄膜之磁晶易磁化軸若為水平分佈, 則其晶粒間之作用力由
交換耦合作用力為主導,導致磁膜 整體之矯頑磁力接近5300
Oe。若磁晶易磁化軸為垂直分 佈則其晶粒間之作用由靜磁作
用力為主導,磁膜之矯頑磁 力可達6000 Oe以上。

(3) 磁晶易磁化軸水平分佈之Sr-Ferrite薄膜之最佳磁性質如 下
:iHc=5935 Oe,S*=0.796,Sq=0.646及SFD=0.261。 磁晶
易磁化軸垂直分佈之Sr-Ferrite薄膜之最佳磁性質如 下:
iHc=6290 Oe,S*=0.557,Sq=0.745及SFD=0.486。

Abstract

The main purpose of this research is to develop the processes
for achieving high coercive force RF-sputtered Sr-ferrite
magnetic films which are suitable for microwave or
microelectronic devices application. Three oxide materials
were chosen as underlayers: they are SiO2, ZnO and Al2O3. Sr-
ferrite films prepared from the target materials of SrO‧nFe2O3
(n=5.5, 5.75, 5.95) were sputtered. By controlling the
thickness of the underlayers and the magnetic film, molar ratio,
between Fe2O3 and SrO of the target, n, and annealing
conditions, the following results were obtained.
(1) The easy-axis of SrO‧6Fe2O3 crystals of the films prefers
to lie down in the direction almost parallel to film plane
for n=6 while SiO2 underlayer is used . But the easy-axis
of the crystals prefers to be perpendicular to film plane,
and it inclined from the direction perpendicular to film
plane to almost parallel to film plane as decreasing molar
ratio from 5.95 to 5.5 while the underlayer is changed into
ZnO or Al2O3.

(2) For the films with the easy axis parallel to film plane,
the interactive force among SrO‧6Fe2O3 crystal is
dominated by exchange coupling, which results in the
coercive force of the film approaching 5300 Oe. However,
for the film with the easy-axis perpendicular to film plane,
the interactive force among SrO‧6Fe2O3 crystals is mainly
dominated by magnetic static force, which results in the
coercive force of the films exceeding 6000 Oe.
(3) The optimal magnetic properties and parameters of Sr-
ferrite films with an easy-axis parallel to film plane are:
iHc=5935 Oe, S*=0.796, Sq=0.646, and SFD=0.261; those with
an easy-axis perpendicular to film plane are: iHc=6290 Oe,
S*=0.557, Sq=0.745, and SFD=0.486.



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