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研究生:林勇男
研究生(外文):Lin, Yeung-Nan
論文名稱:精密定位控制
論文名稱(外文):Preision Stepper Control
指導教授:黃啟光黃啟光引用關係
指導教授(外文):Hwang, Chi-Kuang
學位類別:碩士
校院名稱:中華大學
系所名稱:電機工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:1997
畢業學年度:85
語文別:英文
論文頁數:52
中文關鍵詞:次微米定位控制
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在不斷提昇產品品質的現今工業,精密度一直以來都是產品好壞的重要指標。在激烈競爭下,已經達到了次微米的境界。就半導體而言,蝕刻的寬度已要求到0.25μm,所以托著晶圓的平台必須能準確定位,無論如何,要求精密的定位的同時,快速也是不可或缺的基本條件。
本論文是利用實驗室的精密平台,針對點對點的運動設計控制器。首先建立摩擦力模式及相關次系統的動態模式以達到精密定位,再利用DSP高運算速度的優點,來執行控制法則。在我們實驗中,速度回授控制器、包含增益值時程規劃的位置回授控制器、及其他抵消摩擦力的控制器都是利用DSP的程式建立。實驗結果顯示這些控制器可將穩態誤差減小至60nm以下。
最後,利用我們建立的整個系統動態模式來模擬,與實驗資料比較結果是相當吻合,表示量測的系統是接近實際系統,所以了利用此建立的系統來模擬設計其它控制器,以做為實際應用之參考。

The accuracy is important to determine the quality of products in the modern industry. In recent semiconductor industry, the width of circuit is less than 0.25μm, so a stepper position control needs to achieve one-tenth of 0.25μm. However the settling time of the stepper is also very critical when we pursue a high precision.
In the thesis, the controller is designed to perform point-to-point motion for the precision position stepper in our laboratory. A friction model is necessary to be measured for the precision position. The DSP (Digital Signal Processing) chip with high-speed feature is used to implement our control law. The velocity feedback controller, the position feedback controller with gain scheduling, and the other controllers that is designed to eliminate the friction are all designed with DSP's software. The result of experiment shows that these controllers are able to reduce the stead-state error less than 60nm.
Finally, these results between the simulation and our experiment are approximately the same, thus the measured system is good enough to simulate with new controller. Results of simulation are suitable references to design a real controller.
I am deeply indebted to my adviser. Dr. Chi-Kuang Hwang, for his helpful advice, and valuable support during the course of the research. I also wish acknowledge the help given by Maw-Shyang Jaw in preparation of this paper, and thank those who have helped directly or indirectly, finally, I am particularly grateful to my parents for their continuous encouragement.

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