臺灣博碩士論文加值系統

由於在半導體製程中，微機電技術為十分具有潛力的新技術；同時鈦酸鉛鐵電薄膜具有良好的熱電特性。因此本論文結合兩者之優點製作高性能之紅外線感測器。
本文首先介紹應用於本實驗的微機電技術。冉描述整個元件之製作過程，也就是先以微機電技術中的濕蝕刻法在矽基板上成功地蝕刻出懸臂，以及應用射頻磁控濺鍍機，在懸臂上濺鍍成長出結晶性良好的鈦酸鉛鐵電薄膜，最後再鍍上鋁和吸熱金屬-鉍來完成整個元件。
本實驗採用的懸臂式結構，與一般傳統的紅外線感測器在性能以及製程上都有很大的不同。雖然多增加了濕蝕刻這個步驟，但是在元件性能上，以波長970nm、光強度1000μW 的紅外線照射前後的電流增益可達64；以1.2KHZ 的上述光源交流訊號輸入時，動態響應可達1500V/W，皆優於一般紅外線感測器。

The Micro-electro-mechanical System (MEMS) is a new technology process to prepare a compact structure. And the PbTiO3 thin film has a good pyroelectric properties. Hence in this thesis, we utilize the MEMS technology to fabricate a high sensitivity PbTiO3 IR detector.
First, the MEMS technology is introduced. Then, the preparation processes of the device are described in detailed, Comparing with a conventional infrared sensor, the cantilever type is quite different in both fabrication process and sensing performance. Although a wet etching process will be added, however, a high current gain (the ratio of current after and before the incident infrared light) of 64 under the irradiation of an incident light with a wavelength of 970 nm and an intensity of 1000 μW. The responsivity is 1500V/W under the above light AC signal of 1.2KHZ frequency. Those values are better than that of the conventional one.