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Wire sweep is a critical process defect in the era of miniaturization of IC. This is because with wire sweep wires may contact each other or even be broken and become short circuit. Unfortunately, the physical nature of wire sweep is still not very clear. This paper presents theoretical works on results and wire sweep. With this analysis, both flow induced loads on the wires and models to predict the amount of wire sweep for different viscosity and velocity of fluid are found.
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