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The provisioning of expensive equipment and corresponding spares is the fundamental activity of suppliers in high-tech industry such as semiconductor manufacturing. The equipment is often critical to the manufacturing processes in wafer fabrication, and their unavailability may lead to excessive downtime cost. As a result, the procurement of reliable equipment and the provisioning quality of repairing service are important to semiconductor industry. Therefore, the service level of spares may affect the sales of equipment and it is one of the most important performance indices for equipment supplier in this environment. Due to the high procurement cost, the inventory cost constitutes a large part of investment for equipment supplier. The increase of inventory turn will be an important mission as well. Therefore, how to increase inventory turn under a satisfied service level is a critical issue in this industry.This research proposes a decision support procedurles adjustment, safety stock determination for each parts, and reasonable lead time for each part to beat second-source competitors and to attract more demand are also discussed.
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