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In this thesis, we mainly discuss the relationships between the single electron tunneling currents and tunneling voltages of YBCO high temperature superconducting thin films with various oxygen contents by a scanning tunneling microscope(STM). YBCO films were fabricated on several substrates by pulse laser deposition(PLD) method. Their oxygen contents were controlled with a homemade system. The tunneling currents I and tunneling voltages V were measured with the STM. The tunneling currents were then differentiated with respect to the voltages and the resulting dI/dV-V curves were used to calculate the superconducting energy gaps.
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