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The focus on system configuration design is to decide types, quantitiesand purchase time of facilities. System configuration has to accommodatethe request of throughput and cycle time as well as capacity ramp-up schedule in the dimension of time.The purpose of this research is to develop a decision support system for system configuration to accord with the restrictions of capacity ramp-up schedule, cycle time and machine numbers. The decision support system involves three subsystem: data input, performance measure and system configuration design. In data input subsystem, users should input system data, toolset data, toolset parameter, configuration plan, product data, process data, and processing time. These data will be the foundation for subsequent evaluation and selection. In performance measure subsystem, this research utilized queueing models to develop a performance measure methodology by combining the characteristics of semiconductor fabrication. In system configuration design subsystem, this research evolved an integer linear programming model taking advantage of LINDO software in accordance with the restrictions of throughput, cycle time and machine numbers.
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