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 本文從基本的流體力學原理出發，探討兩平行板間在板子作相對垂直運動時二平板間 間隙氣體之非線性壓膜行為，共考慮兩平板間作三種型式的相對運動，分別為平板位移是 步階函數(step function)、平板速度是步階函數及平板位移是簡諧函數，我們以 數值方 法對非線性的壓力統御方程式求解，先與前人的線性解析解驗證無誤後，我們再進行詳細 之力學分析。對於第一種型式運動，我們研究了非線性狀況下的壓力鬆弛現象；對於可用 以模擬加速度計瞬間減速的第二種型式運動，我們發現氣膜扮演彈簧的功能；對於第三種 型式運動，當振幅與氣膜平均厚度之比值(e)在很小時，氣膜在低頻時扮 演線性阻尼器， 高頻時扮演線性彈簧的功能，當e大於等於0.1時，出現由非線性效應引發之穩態項，當e 大於等於0.3時，出現平板相對位移與速度之偶合項，氣膜則扮演非線性阻尼器與彈簧的 功能，希望本文對半導體微加速計的研究與發展有所助益。
 The nonlinear behavior of the squeeze film problem between two parallel plates is studied in the present thesis. Three types of relative motion etween the plates have been analyzed : the relative displacement is a step function , the relative velocity is a step function , and the relative dis- placement is a harmonic function in time. The problem is studied through the numerical calculation of the governing equation for pressure according to the lubrication theory. The numerical solution is first checked against the previous linear theory. The mechanical behavior of the squeeze film is then analyzed based on the detailed calculations of both the linear and nonlinear problems. For the first type of plate motion, the nonlinear pro- cess of the pressure relaxation is studied. For the second type of plate motion, the mechanical response of the gas film between the plates acts as a spring. For the third type oh plate motion, the linear theory can be app- lied when the ratio between the amplitude of oscillation and the average film thickness, e , is much less than unity. The gas film behaves as a linear damper at low frequencies , but acts as a linear spring at high fre- quencies. When e =0.1, or > 0.1, the steady force associated with the non- linear effect becomes important. When e =0.3, or > 0.3, a force due to the coupling effect of displacement and velocity appears, and the gas film behavior as a nonlinear damper at low frequencies but acts as a nonlinear spring at high frequencies. It is hoped that the present study can find applications in the research of micro-electro-mechanical system.
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 1 非線性彈簧及阻尼於振動分析之應用 2 含非線性黏性阻尼器結構之位移設計法與實驗研究 3 非線性調諧質量阻尼器對結構受震後之減振效用評估

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