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研究生:王世育
研究生(外文):wang, Sius Jun
論文名稱:Titanylphthalocyanine薄膜之形態及其對氣體感測影響之研究
論文名稱(外文):Studies on the Morphology of Titanyl phthalocyanine Film and its Effect on the Gas Sensing Properties
指導教授:朱義旭, 劉進興
指導教授(外文):Yi-Hsu Ju, C.J. Liu
學位類別:碩士
校院名稱:國立台灣工業技術學院
系所名稱:化學工程技術研究所
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:1997
畢業學年度:85
語文別:中文
論文頁數:95
中文關鍵詞:鈦氧鈦花青應答時間回復時間靈敏度
外文關鍵詞:Titanyl phthalocyanineresponse timerecovery timesensitivity
相關次數:
  • 被引用被引用:2
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以鈦氧花青(Titanyl phthalocyanine,TiOPc)製作薄膜時,經由蒸鍍
速率 (1(/s~50(/s)與基板溫度(室溫~230℃)之改變,可得(、(
、(、m及非晶五種不同相。 在基板溫度為室溫和蒸鍍速率=1(/s下製
成之薄膜為(相;高基板溫度(200℃~230℃) 與低蒸鍍速率(1(/s
、10(/s)下得(相;m相則出現在中蒸鍍速率=30(/s,中基板溫度
)70℃~150℃)與大蒸鍍速率(50(/s),高基板溫度(150℃~230℃)時;而出
現(相之條件較 不規則;非晶相(amorqhous)則在基板溫度為室溫且大蒸
鍍速率(30(/s~50(/s)下得之。 由AFM(Atomic Force Microscope)與
SEM (Scanning Electron Microscopy)探討之結果得知,同一蒸鍍速率下
,基板溫度愈高,薄膜之結晶顆粒愈大。在各種不同相中,以(相 結晶顆
粒最大。
在不同條件下所製成之TiOPc膜對NO2氣體感測,發現吸附速率由快而慢之
順序為(相 > 非晶相 > (相 > (相 > m相,而脫附以非晶相最快,(相最
慢。(相薄膜之靈敏度與穩定 電流均比其它結構之薄膜為大。使用經蒸鍍
速率與基板溫度改良之TiOPC膜,以在蒸鍍速 率=50(/s、基板溫度=100℃
製得未經熱處理之β相膜,對NO2氣體進行感測,其應答與回 復時間最短
,效果最好。以此條件下之TiOPc膜感測100ppm NO2氣體,其應答時間介
於非 晶相與β相之PbPc中間,為吸附與脫附均快之感測材料。
The crystal from and mophology of Titanyl phthalocyanine
(TiOPc) thin film were manipulated by choosing deposition
rate and substrate temperature. Five different phases , (、(
、(、m and amorphous phases, were found from this
experiment. The (-phase TiOPc film was prepared under room
temperature and slow deposition rate (1(/s). The (-phase
was prepared at substrate temperature of 200~230℃and
deposition rate at 1(/s or 10(/s. The m-phase was prepared at
substrate temperature of 70~150℃and doposition rate of 30(/s.
The amorphous phase was prepared under room temperature and
high deposition rate (30(/s~50(/s). The (-phase was
found in 2 distinct regions covering a wide range of
substrate temperature and deposition rate.
At the same deposition rate , the grains size of thin films
increased with the substrate temperature as concluded from
the observations of AFM and SEM. (-phase shows the largest
grain size. The
response characteristics of TiOPc films to NO2 sensing is
studied. The order of response speed is (-phase > amorphous
phase > (-phase > (-phase > m-phase, while the most rapid
recovery speed is the amorphous phase and the slowest is the
(-phase. The (-phase film ,without heat treatment, prepared at
deposition rate of 50(/s and substrate temperature of 100℃would
get the shortest response under NO2 sensing. We have
demonstrated that TiOPc shows the potential of being a fast
sensing material to NO2 comparable to PbPc.
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