|
Abstract Flip chip has become interest to electronic package because of its gang bonding and high I/O capability. This present study investigated the flip chip solder bump produced by reflow process and its properties. It has been investigated in a series of study on the solder bump structure of solder / nickel / copper / aluminum, the interaction among these metal combination during reflow. In addition, investigations also made on the shear strength of solder bump when reflowed at temperatures of 210℃, 250℃ and for five, ten times cyclic reflow. The aluminum and copper were sputtered on silicon wafer. The electroless nickel was applied as a barrier layer and wetting layer. The tin-lead solder was deposited on the electroless nickel with electroplating. The reflow interaction behavior was investigated with SEM on the cross section of the bump. The experimental results revealed that the aluminum layer did not penetrate through the 2μm electroless nickel barrier layer at reflow temperatures of 210℃and 250℃for a period of 15 sec. In addition, the copper layer diffuses and penetrates through the 2μm, 3.9μm electroless nickel barrier layer and interacts with the tin-lead solder, but not diffuses and penetrates through the 6.5μm, 10μm. Meanwhile, nickel also reacts with solder. An intermetallic compound layer was formed at the interface between solder and electroless nickel barrier layer. The results of the average solder bump shear strength at reflow temperature 250℃ is better than 210℃;for five and ten times cyclic reflow, the average shear strengths are around 35.4~40.6g.
|