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The techniques of the photoreflectance (PR) and electroreflectance (ER) were used to study the built-in electric fields and the surface Fermi levels of InP surface- intrinsic-n+(SIN+) structures. The substrates of SIN+ structures are either Fe-doped semi-insulated InP or Sn-doped N+ InP with same doping concentrations as its buffer layer. The built-in electric field and the Fermi level were calculated from the Franz-Keldysh oscillations (FKOs) of the photoreflectance spectra. Our studies found that for the samples with the same doping concentration in buffer layer and substrate, the built-in electric field increases as their top layer thickness decreases. The surface Fermi level, on the other hand, remains approximately constant. For samples with a semi-insulated substrate, the photoreflectance spectra indicate the simultaneous existence of two built-in electric fields, one in the top layer and the other at the interface region between the buffer layer and substrate. ER spectra were measured with the application of a modulation electric field across the top layer. The built- in electric field across the top layer obtained from the ER spectra increases as the top layer thickness decreases while the surface Fermi level, again, remains approximately constant. Next, we have studied the band gaps and the surface Fermi level positions of a series of In1-xAlxAs SIN+ structures at room temperature by PR. Experiments demonstrated that over the aluminum mole concentrations x from 0.42 to 0.57, the surface Fermi level is not pinned at midgap, as commonly believed, but instead varies, respectively, form 0.50 to 0.81 eV below the conduction band edge. The samples were grown by molecular beam epitaxy with a undoped layer thickness of 1000 A. The undoped layer was subsequently etched to 800, 600, 400, and 200 A. Different chemical solutions were used in the etching process and the built-in electric field is found independent of the etching process. While the surface Fermi level, in general, varies with the undoped layer thickness, there exists, for each Al concentration, a certain range of thickness within which the surface Fermi level is weakly pinned. From the dependence of electric field and surface Fermi level on the undoped layer thickness, we conclude that the surface states distribute over two separate regions within the energy band gap and the densities of surface states are as low as 1.02*10^11 cm^(-2) for the distribution near the conduction band and 2.91*10^11 cm^(-2) for the distribution near valence band. Finally, we measured the surface Schottky barrier of In(0.53)Al(0.47)As SIN+ structure as a function of temperature. Based on diffusion theory, thermionic- emission theory, and the relation between the image force effect and current/ voltage, a theoretical relation of the surface Schottky barrier and temperature, pinning positions of the surface Fermi level, surface state densities etc. was obtained. From the least squares fits of the experiments data to the theoretical relation, we obtained the pinning positions, 0.47 eV and 1.00 eV from the conduction band edge which correspond to the densities of surface state, 2.61*10^11 and 2.96*10^11 cm^(-2), respectively. The results are in good agreement with those obtained from the study by changing the thickness of the undoped layer. This study has further approved the model of double distributions of the surface states. Furthermore, the surface state dependent parameters, the geometric factors (r1=4.50*10 ^(-4) and r2=4.70*10^(-4)) and the ideal factors (h1=3.60 and h2=2.90) were also obtained from the fitting results.
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