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研究生:江采華
研究生(外文):Jiang, Cai-Hua
論文名稱:TiN,Ti(C,N)多層陶瓷被覆薄膜之機械性質與磨潤行為研究
論文名稱(外文):The study of tribological performances and properties of TiN(C,N) films
指導教授:林仁輝
指導教授(外文):Lin, Ren-Hui
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:1998
畢業學年度:86
語文別:中文
論文頁數:186
中文關鍵詞:"多層陶瓷薄膜殘留應力鍍層附著破壞附著能量鍍層硬度附著力磨耗性質
外文關鍵詞:"Residual stressAdhesive failureAdhesive energyCoating MicrohardnessCoating residual stressCoating adhesionTribological performanceTiNTi(CN) films
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Cathodic arc ion plating method was used to deposit Ti,
TiN, Ti(C,N) on medium-carbon steel (JIS S45C) substrate to form
multi-layer thin films. The two different coating sequence (S45
C/ Ti/ Ti(C,N)/ TiN versus S45C/ Ti/ TiN/ Ti(C,N)) and
deposition thickness are twomain issues to be probed. The
mechanical properties like residual stress, adhesion energy,
micro-hardness and micro-cracks are measured under different
coating sequences and thickness to correlate the tribological
performance. For hardness measure, two micro-hardness
models Jonsson and Hogmark model and indentation-depth model are
employed to interpret the experimental results. The residual
stressin the film was measured by X-ray diffraction. The
adhesion of coating, an important characteristicto measure the
quality of coating, was evaluated by scratch test. Micro-cracks,
initiated by material defects, were detected by Scanning
Acoustic Microscopy (SAM) to provide the insight for
othermechanical and tribological properties. From
experiments, the residual stress and micro-hardness show
different trends with thicknessunder different deposition
sequence. The different microstructure and interface strength
are two possible reasons for this trend. The deposition sequence
is also critical in the definition of critical load in scratch
test. While one deposition sequence shows consistent definitions
among differentobservations (OM, SEM, friction force); the other
deposition sequence exhibits some variance. The micro-cracks,
observed by SAM, show no cracks beneath the films before wear
test. The tribological performance of thin films is
characterized by wear test. With different sliding speed and
load, the thin films show distinct wear mechanisms i.e. three-
body wear, adhesive wear and abrasive. The friction coefficient,
wear volume, electric-contact-resistance (ECR), vibration are
measured quantities to distinguish these wear mechanism. As the
results indicate, the different coating sequence shows different
tribological characteristics in low speed and low load
condition. It is less evident in high speed and high load
condition. The correlation between mechanical properties and
tribological performance is also dependent on the operation
condition in wear test.

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