Cover Chinese Abstract English Abstract Acknowledgement Contents Table Captions Figure Captions Chapter 1 Introduction 1.1 Background 1.2 Objectives and Organization of the Thesis Chapter 2 Three-Electrode Silicon Capacitive Pressure Sensor 2.1 Sensor Design 2.2 Sensor Fabrication Process 2.3 Fabrication Considerations and Analysis 2.4 Pressure Performance of Sensor Chapter 3 Fiber-Optic Reflective Displacement Micrometer 3.1 Theory 3.2 Experimental Setup 3.3 Experimental Results Chapter 4 Conclusions and Future Work 4.1 Conclusions 4.2 Future Work References Tables Figures Resume
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