Cover
Chinese Abstract
English Abstract
Acknowledgement
Contents
Table Captions
Figure Captions
Chapter 1 Introduction
1.1 Background
1.2 Objectives and Organization of the Thesis
Chapter 2 Three-Electrode Silicon Capacitive Pressure Sensor
2.1 Sensor Design
2.2 Sensor Fabrication Process
2.3 Fabrication Considerations and Analysis
2.4 Pressure Performance of Sensor
Chapter 3 Fiber-Optic Reflective Displacement Micrometer
3.1 Theory
3.2 Experimental Setup
3.3 Experimental Results
Chapter 4 Conclusions and Future Work
4.1 Conclusions
4.2 Future Work
References
Tables
Figures
Resume