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This research describes a MEMS sliding device that can be used
for position control of optical devices. This MEMS device
consists of actuator, sensor and linear sliding block that are
fabricated by using the Multi-User MEMS Processes(MUMPs).
Firstly, by using MEMSprocess simulation software, Intellicad,
we could analyze the givenfabrication process so that the
designed MEMS device canbe successfully manufacture. Secondly,
by adapting ANSYS finite element analysissoftware, we are able
to analyze the dynamic characteristic of the designed actuator
driven by electrical voltage and heat. A build-in sensor based
on variable capacitance is also developed to measure the
displacement of the traveling slider. Finally, a PC-based
feedback control design, which consistsof I/O interface,
actuating and sensing circuits, is developed and tried to
achieve the goal: position control of a MEMS sliding device.
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