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研究生:鍾淑茹
研究生(外文):CHUNG, SHU-RU
論文名稱:鑽石薄膜被覆人工石墨熱衝擊之研究
論文名稱(外文):Study on Thermal Shock Analysis of Thin Diamond Film Coated Artificial Graphite
指導教授:李源弘
指導教授(外文):LEE YUAN-HAUN
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:材料科學與工程學研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:1998
畢業學年度:86
語文別:中文
論文頁數:103
中文關鍵詞:熱衝擊鑽石薄膜類鑽碳膜熱燈絲化學器相沈積
外文關鍵詞:HFCVDthermal shockthin diamond filmDLCRaman spectraX-ray diffraction
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人工石墨在工業上有廣泛的應用,諸如半導體工業、航太工業及鋼鐵熔煉工業,
鋰電池及燃料電池等。石墨材料之行為比一般陶瓷複雜許多,若僅以 two parameter
的方式並不能表示石墨材料之本性,因此透過three parameter以best guess的方式,
求得石墨材料在真空狀態下的最低熱應力。經由熱衝擊機(thermal shock testing
device)的測試分析顯現:相同功率下韋伯模數隨著試片尺寸先增後減(2mm=7.2,
4mm=8.4,6mm=6.1);相同試片厚度下,韋伯模數隨著輸出功率增加而下降(3-4=8.2,
2-4=7.4,1-4=7.2)。輸出功率對韋伯模數之影響大於尺寸效應,因此用three
parameter的方式解析人工石墨之熱衝擊行為。
為了改善拉晶時產生微裂縫而導致游離碳的釋出污染了矽晶圓,雖然目前已鍍上
碳化矽來改善此問題,然而仍無法避免微裂縫之生成。因此,藉熱傳導最佳之鑽石膜
做表面改質,以杜絕游離碳之釋出,並以韋伯模數來表示其熱衝擊之性質。鍍上鑽石
膜或類鑽碳膜2mm時,雖不能使韋伯模數有太大的改變,但卻能提高整個試片所能承受
的熱應力,而在4mm時鑽石的可靠度優於同尺寸的原材,而類鑽碳膜則與原材相當,顯
示鑽石薄膜確實能提高人工石墨之熱衝擊。
透過溫度與時間的控制,可以發現球形類鑽碳在提高基板溫度與沈積時間後,有
逐漸轉變成鑽石(tile-like)的趨勢,且這種鑽石是屬於以(100)為優選方位的
Lonsdaleite,其是由類鑽碳所轉變而來的,因此兼具了類鑽碳與基材優
良之附著性,也具有鑽石優良之熱傳導性,在雙重影響之下使其熱衝擊性
質提高。鍍膜品質可由SEM、Raman及XRD之分析得知。

Application of isotropic graphite is important in wide range, especially
in semiconductor industry, aerospace rockets, high temperature gas cooled
reactors and first wall components of plasma-facing nuclear fusion devices.
This paper reports the experimental results of our studies on the thermal
shock resistance, which were evaluated via use of the Weibull distribution.
The thermal shock testing of the disk specimen undergone an induction coil
heating system was conducted. This isotropic graphite IG-11 (Toyo Tanso) is
used as the substrate in disk shape. Some disk specimen has been coated by
hot-filament CVD with a thin diamond film and diamond-like carbon film.
Weibull modulus somehow can show that the maximum stress in generally on the
surface. In our case, under the same condition of thermal shock testing,
the isotropic graphite with thin diamond has a value 4.6, in comparison with
that of a diamond-like carbon film has a value of 4.8 when the thickness is
2mm. When the thickness is 4mm, Weibull modulus of diamond film is 7.5 and
DLC film is 5.5.The thermal stress of diamond film is higher than the
graphite, which has the thickness of 4mm. It is better than DLC.
However, Weibull modulus of IG-11 disk specimens (4mm) shows its values of
drop between 8.4 and 8.9 according the different electrical powers. At the
same thickness, Weibull decrease with the electrical power increase. At the
same electrical power, the Weibull modulus increases first, then decreases
with specimen thickness.
The deposited thin film were analysis by Raman, XRD and SEM. The surface
morphology has affect to Weibull distribution very much. So, We can control
the deposition time and temperature, the morphology of film can change with
that. The ball-like morphology of diamond-like carbon will form the
tile-like morphology of diamond. So that, the concentration stress is
different with the surface morphology, and the Weibull modulus are
different, too.

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