臺灣博碩士論文加值系統

中文摘要 本研究所探討的旋轉塗佈玻璃主要應用在局部平坦化製程上
，用來填補CVD製作介電膜所產生的孔洞。本研要是拿三種SOG溶液來比較
，一為Allied Signal SOG-314，一為中山科學院之SG1∼SG4，另一個為
實驗室所自製的SOG材料。自製的SOG材料乃是利用TEOS做為前驅物經水解
縮合反應產生silicate。經由黏度量測觀察其流變性質，利用橢圓儀測量
其厚度，利用FTIR探討成份變化情形。最後得到結果是中科院的SOG材料
雖然採用兩階段聚合法，但其組成之有機成份含量少，所以其薄膜品質較
差；而自製的SOG材料因採one step反應及 未添加有機成份，故其薄膜
品質比中科院之材料更差。由此得知，要用one step反應及未添加有機成
份來製備高品質的SOG薄膜是十分困難的。 因此未來將朝two step反
應及含有機成份組成配方。催化劑及反應溫度研究適合於商業化之SOG材
料。

Abstract SOG technique is widely used in local planarization
process insemiconductor manufacturing. In this study, three
different kinds of SOGsolutions was characterized for evaluating
their application potentials:Allied Signal SOG-314, SG1~SG4 from
Chung-Shan Institute and newlysynthesized SOG from our
laboratory. The SOG soultions were characterized by viscosity
meaurement and then spun coated to becomethin films. Next,
FTIR, refractive index and film thickness of the SOGfilms were
measured. Our results showed that the adjustment of
syntheticscheme (one step or two steps), reaction mixture
formulations and reactiontemperature had significant effects on
the properties of the studied SOGmaterials.