以填充床式非熱電漿技術處理污染物受限於複雜的影響因素如輸入的電壓種類（直流、交流、脈衝）與大小、電極的材質與形式、介電質種類、污染物濃度、攜帶氣體種類、水氣與氧氣含量、氣體流量（停留時間）、溫度等，使此一技術尚未達成熟的階段。
本研究欲建立此一技術最佳化的各操作條件關係，以預測達到預定去除率所需施加的電壓、可控制處理的濃度及流量範圍、消耗的功率及成本效益。評估之操作參數主要以電壓、介電質、污染物濃度與停留時間等四個參數來進行系統化分析。實驗結果顯示反應器消耗功率主要與施加電壓呈正比，其他參數僅小幅度影響消耗功率的變化。最佳操作參數及成本效益之分析評估方法乃是限定一定去除率(90％)，不同參數組合下所能獲得最高成本效益點，即為最佳操作參數。在填充5mm玻璃珠及95％相對溼度下，達到90％去除效率的最佳操作參數值為電壓10.8kV、甲苯進流氣體流量與濃度分別為680cc/min及1000ppm，在此操作點下，反應器之成本效益值為15g/kWh。此一技術就實驗結果證明，以並聯多管反應器方式可以提升處理流量，可去除的進流甲苯氣體濃度範圍相當廣，而且去除效率皆可達到90％以上，足見此一技術深具發展潛力。

The non-thermal plasma technique has not become a mature technique up to the present, based on the complex factors such as input voltage to the reactor, style of electrode and dielectric barrier, inlet concentration of pollutant, carrier gas, contents of oxygen and moisture, retention time and temperature etc. This study intends to establish optimal conditions of operation parameters such as applied voltage, inlet concentration of pollutant, and gas flow rate. The operation parameters were evaluated systematically. The power consumption and the cost-effectiveness for achieving the target decomposition rate are also calculated. The method to evaluate optimal operation parameters and cost-effectiveness is that both the decomposition efficiency and minimum power consumption should be satisfied.
The results showed that a packed bed plasma reactor has a higher toluene decomposition efficiency and a lower marginal power consumption cost than the non-packed bed plasma reactor. The toluene decomposition efficiency increases as both the inlet gas flow rate and the toluene gas concentration are decreased. For a plasma reactor of 2 cm in diameter, an over 90% toluene destruction can be reached at a gas flow rate of less than 680 cm3/min, no matter the inlet toluene concentration is high or low. But if the gas flow rate is raised to 1000 cm3/min, then the toluene inlet concentration has to be less than around 500 ppm to achieve high toluene destruction. Under the optimal operation condition, the cost-effectiveness is 15g/kWh. It is also proved that high gas flow rate treatment could be accomplished via multi-tubes reactor.

目錄
頁次
中文摘要Ⅰ
英文摘要Ⅱ
誌謝Ⅲ
目錄 Ⅳ
表目錄Ⅵ
圖目錄Ⅶ
第一章1
1-1研究背景1
1-2研究目的2
第二章 文獻回顧4
2-1非熱電漿5
2-2非熱電漿產生方式5
2-2.1電子光束法6
2-2.2電子式放電6
2-3放電反應器種類(電子式放電)8
2-3.1直流放電反應器8
2-3.2脈衝反應器9
2-3.3介電質放電反應器11
2-3.4填充床反應器14
2-3.5表面放電反應器16
第三章 實驗方法及設備18
3-1主體實驗設備18
3-2電力分析設備19
3-3儀器分析設備及分析方法22
3-3.1分析前準備與分析儀器的操作條件22
3-3.2標準氣體（甲苯）檢量線之建立23
3-4實驗方法與實驗流程24
3-4.1實驗操作參數之選擇24
3-4.2實驗流程26
3-5基本電力特性量測試驗26
3-5.1自藕變壓器之校準27
3-5.2高壓變壓器的校準27
3-5.3兩種高壓探棒測量二次側電壓的相關性27
3-5.4一次側與二次側之電壓與電流關係37
第四章 結果與討論40
4-1能量利用分析40
4-1.1各種操作條件下的系統與反應器消耗功率40
4-1.2各操作條件下的變壓器消耗功率41
4-2主要影響因子對去除率的影響43
4-2.1電壓及功率對去除率的影響43
4-2.2填充介電質對去除率及成本效益的影響44
4-2.3流量對去除率的影響45
4-2.4濃度對去除率的影響46
4-3最佳操作參數推估47
4-4評估最佳操作參數處理高流量甲苯氣體49
第五章 結論與建議81
5-1結論81
5-2建議84
參考文獻86

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