本論文利用三層多晶矽表面微機械方法製作出一組微振鏡系統，系統中包含了一個200×200μm2的微鏡面、用來組裝微鏡面的垂直式及驅動微鏡面產生高速掃瞄的水平式電熱式微致動器陣列、固定於基板作為微鏡面轉軸的微樞紐以及用來固定微鏡面組裝後所產生角度的T型洞及I型樑止動微結構。為了量測微振鏡致動系統之各項性能，我們利用CCD線性感測器設計了光學量測系統，實驗結果顯示，本微振鏡在5伏特方波週期驅動電壓下，可產生約13度的擺幅角度，掃瞄重現性表現良好，而最高掃瞄頻率經量測初步驗證高於50Hz。本文將敘述我們所利用的製程、整個微振鏡系統各項關鍵元件及系統整合的設計、量測系統架構設計、實驗結果及討論，最後並探討微振鏡系統設計之優缺及未來發展。

The dissertation describes an optical scanning micromirror designed and fabricated by using three-layer polysilicon surface micromachining technology. The device consists of a 200×200μm2 micromirror, a lateral driven thermal-actuator array for high speed scanning, four vertical driven thermal-actuator arrays for system-assembly, and a locking mechanism that has an I-shaped tether beam and a T-shaped hole that is extended from the bottom of the micromirror. In order to rotate the micromirror along a fixed axis, a set of hinges was designed according to specific requirements. Besides, we use CCD linear sensor to construct the optical measurement system for performance testing of the scanning micromirror system. Experiments indicated that the designed optical scanning micromirror can reach the scanning angle of 26°(optical) when driven by a 0~5V square signal. The scanning repeatability is also very well. We had proved that the maximum scan speed of scanning micromirror system can reach over 50Hz.

中文摘要
英文摘要
誌謝
目錄
表目錄
圖目錄
符號說明
第一章 緒論
1.1發展背景與研究近況
1.2研究動機與目的
1.3 論文架構
第二章 製程及設計規範
2.1 三層多晶矽製程介紹
2.2 設計規範
2.2.1 規範術語
2.2.2 各層規範
2.3 總結
第三章 微振鏡關鍵元件之介紹
3.1 電熱式微致動器
3.1.1 水平式電熱式微致動器
3.1.2 垂直式電熱式微致動器
3.2 微鏡面
3.3 微樞紐
3.4 止動微結構
3.5 總結
第四章 微振鏡系統的設計及分析
4.1 整體架構
4.2 細部設計
4.2.1 微鏡面
4.2.2 微致動器陣列
4.2.3 微樞紐
4.2.4 止動微結構
4.2.5 整體系統設計
4.3 總結
第五章 量測系統之建立及實驗結果驗證
5.1 量測系統設計
5.1.1 系統架構
5.1.2 光學系統
5.1.3 探針測試平台
5.1.4 CCD週邊驅動與量測電路
5.1.5 控制系統電腦規劃
5.1.6 完成之量測系統
5.2 實驗結果
5.2.1 微鏡面初始角度的驗證
5.2.2 掃瞄性能的驗證
5.2.3 實驗討論
5.3 總結
第六章 結論
參考文獻
附錄一
附錄二

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