本論文中,將以如何建立近場光學顯微鏡系統及其應用為主要的研究重點,對於近場光學顯微鏡系統部份,將注重於探針的製造,探針與樣品相對距離之控制,系統校正,及系統操作o
關於探針的製造,我們提出二種新的製作探針方法,這二種方法皆用標準的通訊光纖為材料,做成的探針有二個斜角的形狀(two tapered shape),因此探針具有高光穿透率(約為10-4),而其空間解析能力約為250奈米o
關於探針與樣品相對距離之控制,本實驗室提出一種新穎的非光電式技術 我們將探針膠封在音叉的一支腳上,以切斷的弦波訊號(gated sinusoidal signal)驅動此音叉,配合分時多工技巧(time multiplexing technique),使得探針-樣品相對距離能夠控制o
我們自製的近場光學顯微鏡系統,具有50微米的橫向掃描範圍,及10微米縱向位移量,三軸皆用光干涉儀校正之,系統的操作程式建立於DOS作業系統上,以拉下視窗方式做為人機介面o
關於應用的部分,我們用上述系統研究: (1) 2微米多苯乙烯球(polystyrene sphere)的光學特性,(2)光從單模光纖輸出時,由進近場到遠場傳播的行為,以及(3)垂直面射型半導體雷射的橫模分佈o

Two chemical etching techniques have been developed for fabricating scanning near-field optical microscopy (SNOM) probes. These probes have two tapered regions that can be reproducibly constructed with a wide range of cone angles. Our methods can be applied to commercial silica glass fibers. The demonstrated in-plane resolution was estimated to be about 250 nm which is mainly limited by the diameter of the metal-coated tip. The transmission efficiency is better than 10-4.
We propose and demonstrate a novel non-optical technique for regulation of tip-sample distance in a near-field scanning optical microscope (NSOM). The fiber tip for the NSOM is attached to one prong of a quartz tuning fork. The fork is dithered with a gated sinusoidal signal. The vibration of the freely oscillating fiber tip, which manifests as the induced piezoelectric voltage on the fork electrodes, is monitored during the half-period of the gated sinusoid for which the fork is not driven. The time-multiplexing scheme thus allows the tuning fork to serve as a dither and a sensor with high Q-factor simultaneously. The gating technique could also potentially allow the SNOM be used for the investigation of surface relaxation dynamics with high spatial resolution and sub-millisecond time resolution.
We design and calibrate the tube scanner of our home-made NSOM with the lateral deflection about 50mm (in x, y direction), and the longitudinal displacement (in z direction ) is about 10mm. The control program of our NSOM system was developed successfully. This program is based on DOS system.
In order to characterize the image-taking capability of our NSOM, we acquire near-field optical images of a compact mono-layer of polystyrene spheres with a diameter of 2 mm as example. We have also investigated the characteristics of some optical components by using NSOM, such as single-mode optical fiber, and vertical-cavity surface-emitting laser diode (VCSEL).

Cover
Abstracts
Acknowledgement
Contents
Chapter 1: Introduction
References
Chapter 2: Tip Fabrication
Section 2-1 Theoretic Prediction
Section 2-2 Metal Coating
Siction 2-3 Tip Fabrication
Section 2-4 Fabrication methods of two tapered tip in our laboratory
Section 2-5 Alternative Probes
References
Chapter 3: Feedback Control
Section 3-1 Equation of Motion
Section 3-2 Previous Work
Section 3-3 A new non-optical feedbacck method
References
Chapter 4 : NSOM System
Section 4-1 Piezoelectric scanner
Section 4-2 Calibration
Section 4-3 Transient response
Section 4-4 Computer interface
References
Chapter 5: Applications
Section 5-1 Latex Sphere
Section 5-2 vertical-cavity surface-emitting lasers(VCSEL)
Section 5-3 : Beam Quality Factor M
References
Chapter 6: Summary and Outlook
References

References
1. Warren J. Smith ,"Modern Optical Engineering",1984
2. M. A. Paesler, and P.J. Moyer, "Near-Field Optics",1996
3. M Born ,E. Wolf , "Principle of Optics",1975
4. J.W. Goodman, "Introduction to Fourier Optics"
5. R. E. Lee, "Scanning Electron Microscopy and X-ray Microanalysis"
6. Tien T. Tsong ,"Atomic-Probe Field Ion Microscopy "
7. T. Wilson ," Confocal Microscopy"
8. G. Binning, H. Rohrere,C. Gerber, and E. Weibel, Phys. Rev. Lett. 49, 57-61(1982)
9. G.Binning, C. F. Quate, and C. Gerber, Phys. Rev. Lett,56.930(1986)
10. E.H. Synge, Philosphical Magazine,6, 356(1928)
E.H. Synge, Philosophical Magazine, 13, 297(1932)
11.E.A.Ash and G. Nicholls, Nature, 237, 510(1972)
12.D.W.Pohl, W. Denk, and M. Lanz, Apply. Phys. Lett. 44. 651(1984)
13.A.Lewis, M. Isaacson, and A. Muray, Ultramicroscopy, 13, 27(1984)
14.E.Betzig, M. Isaacson, and A. Lewis, Appl. Phys. Lett. 51, 2088(1987)
15.E.Betzig, J.K. Trautman, and et al, Science. 251, 1468(1991)
16.H.HeinZelmann, D.W. Pohl, Appl. Phys. A, 59, 89(1994)