隨著精密自動化工程的發展，次微米定位系統日趨重要。本論文旨在利用中科院提供之兩種不同製程（堆疊型、積層型）壓電致動器為實驗材料，針對壓電致動器在不同負載下之伸長量、固定電壓情況下之位移與負載關係、瞬間提供DC 100V時之響應情形以及將壓電元件埋入氣靜壓軸承內之位移補償量，作其位移與受力狀態下之靜態與動暫態之相關性能的測試，並與論文中所推導之壓電元件基本物理性質公式中無負載時之位移解析解與動暫態轉移函數之數學模擬作一比較。
因應本研究之需求，建構高速精密回授功率放大器，經由實驗得知，此功率放大器輸出電壓具有高穩定性與精確性的性能，以滿足驅動壓電元件的實際需要。
在理論之推導部份，以壓電致動器靜態、準靜態與動態操作之機電關係式來推導壓電元件靜態位移與動暫態之數學關係式與模擬，並且與實驗結果作比較以驗證數學推導的正確性。
在實驗驗證方面，以功率放大器應用於壓電致動器微米位移與受力狀態下之靜態與動暫態之相關性能的實驗測試。再者，將二種不同製程之壓電致動器埋入氣靜壓軸承實際驅動以量測其位移補償量。堆疊型之壓電致動器與積層型壓電致動器同樣具有體積小，響應快速，無熱膨脹補償，位移解析度高，高的機電轉換效率，軸向的推力大等優點。但由實驗結果得知，積層型壓電致動器之承載能力優於堆疊型壓電致動器。將以此測試驗證所得技術成果之微致動器(積層型壓電致動器)應用於自動化機械設備在主動式精準運動位置控制之應用研究基礎。
關鍵字: 壓電致動器、微米位移、精密運動。

The piezoelectric material of aerostatic bearing via active positioning motion compensation is studied. Micro-positioning systems using piezoelectric actuators have a very wide range of applications including ultra-precision machine tools. The synergetic integration of mechanical engineering, electrical engineering and electronics in conjunction with high precision smart material and control technology is also examined . The externally presurized gas bearing was used in the fields of precision engineering, specially for the characteristics of high precision, low friction and high speed.
The purpose of this study is to use the piezoelectric materials, which was able to have the fast response characteristics and fine positioning motion ability, which can be applied with the PCB drilling machine. The PCB table is actively compensated by the piezoelectric air bearing component in the future.
In order to reach this purpose, a direct current Battery Charger Device is conductedfirst. Digital feature based power amplifier having a feedback control current compensation is achieved by the research development. An experimental study of active power compensation technique for high-precision positioning control involving the use of a
Stacked type and multilayer type piezoelectric actuators are presented. In this thesis, one presents a novel implementation of applying a direct current battery charger device for the power consumption of developed piezoelectric actuator (PZT) utilized for precision motion control. Emphasis is placed here on controlling the PZT via the development of high-speed power amplifier by Battery Charger Device together with D/A interfacing and operational amplifier circuitry. The result shows that the power amplification has the stable ability of output constant linear voltage for driving the piezoelectric material under the condition of free load or load. The feedback current loop of the driver shows the abilities of ultra-precision and high-speed power supply. Characteristic micro-displacement of developed stacked type and multilayer piezoelectric actuators are experimentally tested.
Keyward: Piezoelectric Actuator、Micrometer Displacement
、Precision Motion

封面內頁……………………………………………………………
簽名頁………………………………………………………………
中文摘要…………………………………………………………v
英文摘要………………………………………………………VII
目錄………………………………………………………………IX
圖目錄……………………………………………………………XIII
表目錄……………………………………………………………XIX
符號說明……………………………………………………XX
第一章 緒論……………………………………………………1
1.1前言………………………………………………………1
1.2文獻回顧…………………………………………………3
1.3研究動機與目的………………………………………7
1.4章節提要…………………………………………………8
第二章 實驗材料及設備…………………………………10
2.1壓電材料之製程介紹………………………………10
2.2高速功率放大器的研發與建構…………………14
2.2.1數位式精密迴授控制放大器基本原理.16
2.3實驗設備的建構……………………………………20
2.4實驗方法與實驗步驟………………………………23
2.4.1多功能數位式量錶壓位移換算之關係.25
2.4.2訊號擷取器之設定……………………………27
2.5埋入氣靜壓軸承之相關測試……………………29
第三章壓電材料之基本物理原理與理論推導……33
3.1壓電性之介紹…………………………………………34
3.2壓電的行為之介紹…………………………………35
3.2.1多層型壓電之簡介……………………………39
3.3老化及穩定性之介紹………………………………39
3.4居里點之介紹………………………………………40
3.5退極化之介紹…………………………………………41
3.5.1電式的退極化之簡介………………………41
3.5.2機械式的退極化之簡介……………………41
3.5.3溫度式的退極化之簡介……………………42
3.6壓電之溫度、電壓、與壓力限制…………………42
3.6.1溫度限制之簡介………………………………43
3.6.2電壓限制之簡介………………………………43
3.6.3機械壓力限制之簡介………………………43
3.7電基本符號與註解…………………………………44
3.7.1壓電元件靜態以及準靜態操作的機電關
係式…………………………………………………48
3.7.2壓電元件的動態操作機電關係式………50
3.8 壓電元件靜態位移與動暫態之數學推導與模
擬…………………………………………………………55
3.8.1壓電元件靜態位移之數學推導…………..55
3.8.2壓電元件動暫態之轉移函數與模擬……58
第四章 壓電元件動暫態特性的模擬與實驗量測…60
4.1 數位式精密迴授控制功率放大器應用於壓電
元件微米位移之實驗量測……………………….60
4.2 不同製程壓電元件靜態與動暫態實驗量測比
較…………………………………………………………62
4.2.1 無負載（Free Load）與有負載（5、15、
25公斤）之比較………………………………62
4.2.2 固定電壓（100v、80v、60v）情況下，
負載位移關係圖之比較……………………69
4.2.3 在有負載(5、15、25公斤)時，壓電元
件輸入電壓與壓電出力關係之比較…71
4.2.4 壓電元件響應速度之比較………………75
4.2.5 壓電元件受荷重作用下之響應…………80
4.3 埋入氣靜壓軸承之壓電，輸入電壓與位移補
償量關係圖之比較…………………………………88
第五章 結論與建議…………………………………………94
參考文獻…………………………………………………………97

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