對鈮酸鋰電光調變器而言，操作電壓是評量元件的重要指標之一，而影響操作電壓的大小，主要是材料的電光係數，及外加電場與光場的重疊積分值。本論文主要是研究以其他金屬代替鈦金屬或質子交換法光波導之可行性，藉由其他具有良好性質的光波導來改善元件的操作電壓，此光波導應避免傳統上高溫擴散所形成的外擴散層，以免影響光波導的特性及鈮酸鋰晶體的電光特性。另外，利用質子交換溼式蝕刻技術可以在鈮酸鋰晶體上，製作出脊型結構之光波導，藉由脊型結構的輔助，可有效的增加光場與外加電場的重疊積分值，更進一步地降低了元件的操作電壓。

封面
目錄
致謝
摘要
第一章 緒論
1-1 積體光學簡介
1-2 鈮酸鋰光波導之介紹
1-3 脊型結構的光波導
1-4 研究動機
1-5 內容概述
第二章 鈮酸鋰光波導之製程
2-1 鈮酸鋰晶體的物理性質
2-2 光波導元件之製程
第三章 鎳、鋅、鎂誘鋰外擴散式光波導
3-1 金屬離子對鈮酸鋰晶體折射率的影響
3-2 擴散式光波導折射率分佈之模型
3-3 導光條件之研究
第四章 脊型鈮酸鋰光波導
4-1 脊型光波導的特性
4-2 脊型結構的製程
4-3 溼式蝕刻脊型光波導之製程
4-4 質子交換法
第五章 重疊積分值對元件調變電壓的影響
5-1 電極結構
5-2 重疊積分值的影響
第六章 馬赫任德調變器的製作與量測
6-1 馬赫任德調變器的簡介
6-2 金屬擴散式馬赫任德調變器的製作與量測
6-3 質子交換法馬赫任德調變器的製作與量測
6-4 脊型結構馬赫任德調變器的製作與量測
第七章 結論與未來展望
參考文獻
附表
附圖
中英文名詞對照表
其他

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