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研究生:虞嘉磊
研究生(外文):Yu Chia-Lei
論文名稱:SMIFPOD惰性氣體充填流場最佳化分析
論文名稱(外文):SMIF POD inert gas charging and flow field optimization
指導教授:陳希立陳希立引用關係
指導教授(外文):Sih-Li Chen
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:機械工程學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:1999
畢業學年度:87
語文別:中文
論文頁數:126
中文關鍵詞:SMIF POD惰性氣體充填流場最佳化
外文關鍵詞:SMIF PODCFXgas chargingoptimization of flow field
相關次數:
  • 被引用被引用:1
  • 點閱點閱:543
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0
隨著半導體製造技術的精進,對於環境的潔淨度要求也日益增高,除了傳統潔淨室或微環境內部要求越趨嚴格,對於晶圓運送裝置,亦即SMIF POD內,也必須盡量避免污染的產生。
本研究的主要目的是進行8吋晶圓卡匣(SMIF POD)內,在充填惰性氣體(如氮氣)時之流場分析模擬,其中包括充填過程中速度場、壓力場以及空氣、氮氣濃度之變化情形,各種充填方式之研究比較,進而研究出最佳的充填方式。首先由流體運動之質量、動量方程式,配合氣體擴散方程式及流場邊界條件,利用電腦軟體CFX進行三維的惰性氣體充填流場之分析與模擬,除了流場中之速度場及壓力場外,對於惰性氣體在充填過程之擴散情形亦需同時加以考慮。同時針對各種不同之充填方式及各個重要的設計參數加以模擬分析,從而找出最有效率之充填方式。研究結果將應用於設計SMIF POD惰性氣體充填設備之參考。
With the progression of semiconductor manufacturing technology, the cleanliness demand for the wafer transfer device is rapidly increasing. The nitrogen charger provides the controlled environment of pod device as wafers transfer from one station to another.
The purpose of this study is to simulate the flow field in an 8" SMIF POD as the nitrogen charger drives the normal air out. The package software 「CFX」 is used as the CFD code. The calculation results include the pressure filed, velocity field and nitrogen concentration distribution inside the POD. Based on the continuity equation, momentum equation and gas diffusion equation, the influence of flow field affected by the characteristic parameters will be discussed and optimized. The results provide useful information for the design of the effective nitrogen-charging device.
1緒論1
1-1前言與研究目的1
1-2相關文獻回顧4
2研究方法9
2-1前言9
2-2軟體簡介10
2-3流場基本假設12
2-4理論模式13
2-4-1流場統御方程式13
2-4-2多流體模型(Multi-fluid Model)19
3數值方法21
3-1貼體座標(Body-Fitted Coordinates)21
3-1-1貼體座標系統(Body-Fitted Coordinate System)21
3-1-2非交錯網格(Non-Staggered Grid)22
3-1-3多區塊網格結構(Multi-Block Grid Structure)22
3-2離散化方法(Discretization Methods)23
3-2-1時間微分項24
3-2-2擴散項25
3-2-3對流項25
3-2-4源項(Source Term)28
3-2-5求解矩陣方程式28
3-3 SIMPLE演算法29
3-3-1動量方程式30
3-3-2壓力及速度修正31
3-3-3 壓力修正方程式32
3-3-4 SIMPLE演算法流程34
3-3-5鬆弛係數(Relaxation Factor)34
3-4 RHIE-CHOW 內插法35
4數值模擬分析37
4-1模型幾何尺寸37
4-2收斂標準39
4-3格點獨立性測試39
4-3-1 XY平面40
4-3-2 Z方向41
4-3-3時間軸43
4-4進氣角度對流場充填的影響44
4-5進氣流量對流場充填的影響48
4-6排氣位置對流場充填的影響51
4-7通道餘隙對流場充填的影響53
5結論與建議57
5-1結論57
5-1-1進氣角度方面57
5-1-2進氣流量方面58
5-1-3排氣位置方面59
5-1-4通道餘隙方面59
5-2建議60
6參考文獻61
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