本研究發展出一套低成本、高精度的雷射自動聚焦探頭系統。以市售的光碟音響（CD-PLAYER）內之光學讀取頭（Pickup head）為基礎，將感測器偵測到的失焦訊號進行控制與補償，迴授驅動音圈馬達完成自動聚焦。由於音圈馬達的驅動電流（事實上就是由伺服失焦訊號轉換而來）與物鏡的位移量，在數百微米的範圍內呈現一對一的線性關係，因此在物鏡鎖住工件表面的自動聚焦情況下，經由音圈馬達驅動電流的強度，即可讀取工件表面量測點的位置。此探頭系統具有200μm的量測範圍，準確度達0.2μm，並有0.0854μm的解析度與至少50 nm的靈敏度。

In this research, we developed a low-cost, high-precision laser auto-focus optical probe system. Taking from the pickup head of a CD player, we can fully control and compensate its focus error signal(FES) detected by the photodetector. Then, to actuate the voice coil motor(VCM) by means of the feedback signal of the FES, the auto-focus process can be completed.
Because there is a linear relationship of several hundred micrometers between the driving current of VCM(actually converted from the Servo-FES) and displacement of the object lens, we can make the measurement of surface profile by detecting the driving current of VCM as the object lens always follows the surface of object. Our system accuracy could achieve to 0.2μm in the measuring range about 200μm with the resolution of 0.0854μm and the sensitivity of better than 50nm.

第一章 緒論1
1-1 研究緣起與目的1
1-2 相關論文回顧2
1-3 研究方法與內容概要5
第二章 精密雷射自動聚焦探頭7
2-1 讀取頭系統簡介8
2-1-1 讀取頭關鍵元件介紹8
2-1-2 讀取頭應用原理12
2-2 音圈馬達14
2-2-1 音圈馬達簡介14
2-2-2 電流驅動式音圈馬達16
2-3 雷射讀取頭光學原理19
2-3-1 光學聚焦方式探討19
2-3-2 S曲線的實際量測21
2-4 自動聚焦原理與伺服失焦訊號量測方法23
2-4-1 自動聚焦原理（伺服失焦訊號取得原理）23
2-4-2 伺服失焦訊號實際量測與架設26
第三章 量測系統整合與控制28
3-1 前言28
3-2 探頭機械性質分析28
3-2-1 彈簧系統分析28
3-2-2 彈簧系統頻率響應分析30
3-3 致動器設計與分析34
3-3-1 驅動器設計34
3-3-2 致動行為開路分析38
3-4 自動聚焦補償控制40
3-4-1 補償前系統40
3-4-2 系統PD控制設計42
3-4-3 系統相位領先補償設計47
3-4-4 系統整體補償設計53
3-5 系統整合62
第四章 訊號特性與系統遲滯65
4-1 前言65
4-2 伺服失焦訊號之性質65
4-2-1 雷射功率之影響65
4-2-2 反射率的影響67
4-2-3 重覆性分析71
4-3 遲滯現象75
4-3-1 遲滯簡介75
4-3-2 系統遲滯分析78
4-3-3 系統遲滯硬體補償79
4-3-4系統遲滯模型補償86
第五章 系統性能與實驗結果分析94
5-1 表面輪廓量測系統架設94
5-2 靈敏度測試95
5-3 表面量測97
5-3-1 光碟片表面輪廓97
5-3-2 塊規98
5-3-3 膜厚量測101
第六章 討論與結論104
6-1 討論104
6-2 結論106
參考文獻107
附錄113
A APC電路圖113
B 四象限感應器位置與電壓之關係推導114
C 光點分析116
D119
D-1刀緣法 (Knife-Edge Method)119
D-2光點法（Spot Size Method）120
E S曲線的理論推導與模擬122

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