參考文獻
【1】 D.J. Whitehouse, "Comparison Between Stylus and Optical Methods for Measuring Surfaces", Annals of the CIRP Vol. 37 Feb. ,1988
【2】 Fang-Jung Shiou, "Entwicklung von Strategien und Messverfahren zur Erfassung dimensioneller Bauteilgroessen fuer die Laserbearbeitung", Dissertation, RWTH Aachen, 1998.
【3】 Probst, David K., "Analysis of signal degradation in an integrated active crossbar switch", Proceedings of SPIE, Jan 30-Feb 1 96 v 2695, pp. 278-285, 1996.
【4】 S. S. Lee, "Integrated optical high-voltage sensor based on a polymeric digital optical switch.", Conference on Lasers and Electro-Optics Europe - Technical Digest Hamburg, Ger, Sep 8-13, pp. 15., 1996.
【5】 Anshi Chen, "Photo-switch array and its applications in position detecting and imaging.", Proceedings of the 1993 IEEE Region 10 Conference on Computer, Communication, Control and Power Engineering. Part 3 Beijing, China, Oct 19-21, pp. 521-523., 1993。
【6】 J. W. Cary, "Using an electro-optical switch to measure soil water suction.", Soil Science Society of America Journal v 55, n 6, pp. 1798-1800., 1991.。
【7】 Satoru Takahashi, Takashi Miyoshi, and Yasuhiro Takaya, "Study on Nano-inprocess Measurement of Silicon Wafer Surface Defects by Laser Scattered Defect Pattern", ISMTII''96, pp.243~250, 1996。
【8】 M. B. Kiran, B. Ramamoorthy, and V. Radhakrishnan, "Process identification and evaluation of surface roughness using vision system", ISMTII''96, pp.295~302, 1996。
【9】 H. J. Yuan, B.Liu, X. F. Qiang, Zhang J., "A non-contact surface roughness measuring system for grinding surface", ISMTII''96, pp.222~225, 1996。
【10】 J.Benschop, G.V.Rosmalen, "Confocal compact scanning optical microscope based on compact disc technology", Applied Optics, Apr. 1, Vol. 30, No. 10,pp. 1179-1184, 1991.
【11】 T.R. Armstrong, M.P. Fitzgerald, "An autocollimator based on the laser head of a compact disc player", Meas. Sci. Technol. Mar. pp. 1072-1076, 1992.
【12】 F. Quercioli, A. Mannoni, B. Tiribilli, "Correlation optical veloimetry with a compact disk pickup", Applied Optics, Sep. 1, Vol. 36, No 25, 1997.
【13】 J. H. Zhang, and L. L. Cai, "An Autofocusing Measurement System with a Piezoelectric Translator", IEEE/ASME Transactions on mechatronics, Vol.2, No.3, pp.213~216, 1997.
【14】 K. L. Deng, J. P.Wang, "Nanometer-resolution distance measurement with a noninterferometric method", Applied Optics v 33, n 1, pp.113-116., 1994.
【15】 U. Persson, "Measurement of surface roughness using infrared scattering", Measurement Vol.18 No.2, pp.109~116, 1996.
【16】 K. J. Oh, Z. H. Zhang, and D. W. Kim, "Measurement of rough surface profile using multiport homodyne interferometer", Proceedings of APSI''97, pp.164~166 , 1997.
【17】 Y. J. Yu, P. S. Li, Y. M. Yu, and Z. Zhang, "The Effect of Lateral Resolution on Surface Roughness Measurement in the Heterodyne Interferometer", Proceedings of APSI''97, pp.282~285, 1997.
【18】 G. Makosch, and B. Drollinger, "Surface profile measurement with a scanning differential ac interferometer", Applied Optics Vol. 23 No. 24, pp.4544-4553, 1984.
【19】 W. Hillmann, U. Brand, and M. Krystek, "Capabilities and limitations of interference microscopy for tow- and three-dimensional surface-measuring technologu", Measurement Vol.19 No.2, pp.95~102, 1996.
【20】 Kanji Mashimo, Tetsuya Nakamura, and Yoshihisa Tanimura, "Development of optical noncontact sensor formeasurement of three-dimensional profiles using depolarized components of scattered light", Opt. Eng.36(1), pp.227~234, 1997.
【21】 J. J. Li, Y. Zhao, and D. H. Li, "A New Type of Common Path Heterodyne Profilometer with Annular Lens", ISMTII''96, pp.419~421, 1996.
【22】 L. Cheng, G. G. Siu, " Measurement of surface roughness with core-ring ratio method using incoherent light", Meas. Sci. Technol. 1, pp.1149-1155, 1990.
【23】 T. Wielinga, and J. Melissant, "New optical device for surface roughness measurements", Journal of Magnetism and Magnetic Materials 120, pp.116~118 , 1993.
【24】 C. During, T. Komeda, M. Matsuto, and H. Funakubo, "An inexpensive light source and detector module for fibre-optic measurements", Meas.Sci.Technol.8, pp.209~212, 1997.
【25】 J. Richard Vyce, "An Optical, Noncontacting Surface Sensor (Optical Probe)", Applied Optics Vol.8 No.11, pp.2301~2310 , 1969。
【26】 H. Yu, T. B. Xie, and X. J. Liu, "Measuring In Surface Roughness", Proceedings of APSI''97, pp.64~66, 1997.
【27】 Teruo Fujita, and Kenjiro Kime, "Optical and mechanical design of magneto-optical disk heads", SPIE Vol.1663 Optical Data Storage, pp.114~122, 1992.
【28】 Yukio Kurata, and Toshio Ishikawa, "CD Pickup Using a Holographic Optical Element", Int. J. Japan Soc. Prec. Eng.Vol.25 No.2, pp.89~92, 1991.
【29】 R. Katayama, T. Nagano, S. Sugama, and Y. Ono, "Compact Optical Head Integrated with Chip Element for CD-ROM Drives", SPIE Vol.1663 Optical Data Storage, pp.37~45 , 1992.
【30】 Thomas A. Strasser, and Mool C. Gupta, "Integrated optic grating-coupler-based optical head", Applied Optics Vol.32 No.36, pp.7454~7461 , 1993.
【31】 Naoyasu Miyagawa, Shinchi Kadowaki, Yoshikazu Hori, and Makoto Kato, "Computational analysis of a holographic optical head configuration", Applied Optics Vol.31 No.35, pp.7457~7463 , 1992.
【32】 "Specifications Model:KSM-213BCM", SONY Co., 1995.
【33】 C.C. Yang, "Fundamentals of Eletro-Optics", Department of Electrical Engineering, National Taiwan University. 1997.
【34】 Agrawal,Govind P., "Semiconductor Lasers", Van Nostrand Reinhol, 1993.
【35】 "Optoelectronics Data Book",Advanced Photonix,Inc., 1996.
【36】 "Sony Semiconductor Product List 1997 4", Sony Co., Photo Device CXA1753M, pp.55, 1997.
【37】 Hi-Dong. Chai, "Electromechanical Motion Devices", Prentice Hall PTR.
【38】 Bruce E. Bernacki, M. Mansuripur, "Causes of focus-error feedthrough in optical-disk systems: astigmatic and cbscuration methods", Applied Optics Vol.33 No.5, pp.735-742, 1994.
【39】 Masud Mansuripur, "Analysis of astigmatic focusing and push-pull tracking error signals in magnetooptical disk systems", Applied Optics vol.26 No.18, pp.3981-3986, 1987.
【40】 Donald K. Cohen, Wing Ho Gee, M. Ludeke, and Julian Lewkowicz, "Automatic focus control: the astigmatic lens approach", Applied Optics Vol.23 No.4. pp.565-570, 1984.
【41】 Bruce E. Bernacki, Keith Bates, M. Mansuripur, Delbert Hansen, and Daniel Cisneros, "Characterization of a noval focusing/tracking technique with increased feedthrough immunity for optical-disk applications: the double-astigmatic method", Applied Optics Vol.32 No.29, pp.5789-5796, 1993.
【42】 Yasuhiro Tanaka, and Motonobu Yoshikawa, "Novel measuring technique of the optical performance of objective lenses for optical disk systems", Applied Optics Vol.31 No.25, pp.5305~5311 , 1992.
【43】 Glaser, W. Khalifa, and N. Konforti, "Parallel range-image acquisition by astigmatic defocus", Appiled Optics Vol.31 No.31, pp.6594~6597 , 1992.
【44】 David G. Kocher, "Automated Foucault test for focus sensing", Applied Optics Vol. 22 No. 12, pp.1887-1892, 1983.
【45】 K. Duong, E. Garcia, "Open Loop Compensation in a Stack-Mass Position System", Journal of Intelligent Material Systems and Structures, Vol.6, pp.292-296, Mar., 1995.
【46】 P. Ge, M. Jouaneht, "Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators", Precision Engineering Vol.20 No.2, pp.99-111, 1997.
【47】 "Improving the Linearity of Piezoelectric Ceramic Actuator", Electronics Letters Vol.18, No.11, pp.442-443, 1982.
【48】 林勤喻, "超精密雷射聚焦探頭之研製", 國立台灣大學機械工程研究所碩士論文, 1998.【49】 鄭時龍, "A High Resolution of Position Encoder Using an Optical Pickup of CD Player", 國立交通大學機械工程研究所博士論文, 1996.
【50】 鄧公理, "共焦回饋雷射測距技術", 國立台灣大學電機工程研究所碩士論文, 1993.【51】 汪治平, 李超煌, "差動式共焦顯微術", 科儀新知, 第十七卷四期, pp.86-93, 1996.【52】 吳錦源, 李世光, 鄧兆庭, 林三堅, "新型雷射都卜勒振動/干涉儀", 機械月刊第二十四卷第五期, pp.364-370, 1998.【53】 莊曜隆, "Servo System and Data Error Rate Analysis for CD-ROM Drivers", 國立台灣大學電機工程學研究所碩士論文, 1997.
【54】 蔡守仁, "最佳路徑估測回授控制法於磁碟機讀寫頭伺服控制系統之應用", 國立台灣大學機械工程研究所碩士論文, 1994.【55】 陳建宏, "自動聚焦型光學精密探頭的應用", 國立彰化師範大學工業教育研究所碩士論文, 1995.【56】 劉鎮, 姜學智, 李東海, "PID控制參數整定方法", 電子技術應用, 第五期, 1997.
【57】 呂和, "光碟機讀寫頭光學系統介紹",光電資訊, 第二期, pp.2-11,1989.【58】 劉德成, "半導體雷射簡介", 電子月刊, 第一卷第三期, pp.40-55,1995.【59】 蘇德欽譯, "光電科技淺說(五)", 光電技術.
【60】 林宸生, "光電精密量測", 全欣科技圖書, 1993.
【61】 朱朝居, "光電讀寫頭之光學系統模擬與測試(上下)", 光電資訊, 第8,9期, 1990,1991.【62】 黃景星, "光儲存系統簡介",光電資訊, 第一期, pp.3-13,1989.【63】 William H. Hayt, Jr. 著, 謝芳生 譯, "工程電磁學", 東華出版社, 1997.