以目前精密定位的技術來說，雙驅動器的架構似乎式現階段最熱門的方式。雙驅動器的架構通常是以具有柔韌性的驅動元件來達到精密定位的目的，並以導螺桿機構來含蓋整體運動的行程。這類雙驅動器的架構在最近幾年主導了機密定位設備的市場，然而這些雙驅動器的架構確仍有許多問題存在，例如負責微調的壓電元件會有震盪的發生、粗微調因量測解析度不同所造成的非線性現象，此外導螺桿機構的潤滑問題等也都必須經過特殊的處理。為了避免這些現象或摩擦與背隙的問題，非接觸式的導軌元件似乎是唯一的選擇。常見的非接觸式的導軌元件有氣潤式、靜電式與磁浮式等三大類。在本論文中將設計一斥力型磁浮懸吊導引系統來達到上述的目標。但由於磁浮系統先天具有不穩定的動態，因此閉迴路控制器的應用便成了不可或缺的要素。
在本論文中希望藉由非線性控制器的設計來達到穩定斥力型磁浮懸吊導引系統並同時提高系統剛性的目標。本論文分別以Jacobian線性化技術、輸入輸出迴授線性化的技術與近似輸入輸出迴授線性化搭配歸步法的技術來作為非線性控制器的基本架構，並配合強健性極佳的適應滑動模式控制理論，來完成非線性控制器。藉由這三種控制架構在理論上、模擬上與實驗上的比較，驗證了本論文所設計以近似輸入輸出迴授線性化與歸步法為基礎的適應滑動模式控制器，不論是在暫態響應上或閉迴路頻率響應上都有最佳的表現。藉由近似輸入輸出迴授線性化，一方面可以保有非線性系統在系統模式的精確度，另一方面，又可在近似輸入輸出迴授線性化後所產生的多項式模式中找尋出有益於系統穩定性的動態，並搭配所謂的避免消除，則可以改善系統的響應。除了從理論與模擬的角度來驗證的本論文所設計的控制理論法，本論文亦實際應用在斥力型磁浮懸吊導引系統上，從暫態響應與閉迴路頻率響應的實驗結果皆可以驗證本論文所設計的控制器具有最快的穩定速度與閉迴路頻寬、剛性，更提升了斥力型磁浮懸吊導引系統在導軌元件剛性競爭上的籌碼。

The most popular approach to achieve ultra-high precision positioning is to use compound actuators. The compound actuators generally include flexure type actuators to achieve very fine positioning resolution, and ball-screws to cover the large travels. These compound actuator configurations have dominated the equipment market in recent years; however, these configurations are still associated with some problems. First of all, the flexure mechanisms driven by piezo-electric actuators are usually highly oscillatory. Secondly, the different actuator resolutions make the system behavior highly non-linear. It is also well known that the lubrication for the ball-screws requires special treatment. The alternate approaches to avoid friction and backlash is to adopt a non-contact bearing mechanisms. These include air-lubricated levitation, electrostatic levitation, and magnetic levitation (maglev). In this thesis, a Repulsive Maglev Suspension Guiding System (RMSGS) is designed for this purpose. But according to the unstable nature of maglev system, a closed-loop controller is necessary.
In this thesis, we want to stabilize the RMSGS and improve the system stiffness by designing a nonlinear controller. Based on three nonlinear control frameworks, Jacobian Linearization, Input-Output Feedback Linearization and Approximate Input-Output Feedback Linearization, we combine the Adaptive Sliding Mode Control individually to improve the robustness of closed-loop system. Real experimental tests, simulations, and theoretical analyses all prove that the Adaptive Sliding Mode Control based on Approximate Input-Output Feedback Linearization and Backstepping has the best result, not only in transient response but also closed-loop frequency response.
First, we transform the nonlinear model of system to polynomial model by means of Approximate Input-Output Feedback Linearization, and then we can find some dynamics from the polynomial model, which are helpful to system stability. By applying Avoid Cancellation to these helpful dynamics, the improvement of system bandwidth, stiffness and settling time could be obtained.

封面
目錄
誌謝
中文摘要
英文摘要
目錄
圖表目錄
第一章 緒論
1-1 斥力型磁浮懸吊導引系統的設計動機
1-1-1 從精密定位系統的觀點
1-1-2 從導軌元件的觀點
1-1-3 從非接觸式導軌的觀點
1-2 控制理論建立的動機
1-3 文獻回顧
1-4 論文貢獻
1-5 本文內容
第二章 磁浮技術概論
2-1 基礎磁學
2-1-1 畢歐沙伐定律
2-1-2 真空中的磁場
2-1-3 勞倫茲力
2-2 磁浮技術之不穩定特性
2-3 磁浮技術綜覽
2-3-1 吸力型電磁鐵式磁浮系統
2-3-2 併用永久磁鐵之吸力型電磁鐵式磁浮系統
2-3-3 永久磁鐵斥力型磁浮系統
2-3-4 斥力型電感應式磁浮系統
2-3-5 斥力型電磁式磁浮技術
2-3-6 其他磁浮技術
2-4 永久磁鐵簡介
2-4-1 磁化曲線
2-4-2 磁性材料
2-4-3 磁學名稱，符號，單位整理
2-4-4 永久磁鐵的特性分析
2-4-5 常見之永久磁鐵
第三章 系統設計與分析
3-1 引言
3-2 磁浮導軌設計基礎
3-2-1 矩形線圈
3-2-2 穩形電磁鐵
3-2-3 併用永久磁鐵
3-3 四導軌設計
3-4 磁浮平台設計
3-5 整體設計與力學分析
3-5-1 力學分析程式
3-5-2 主動致浮裝置設計
3-5-3 穩定裝置設計
3-5-4 設計參數總整理
3-6 併用永久磁鐵之斥力型磁浮懸吊導引系統之設計圖
第四章 實驗裝置與控制器設計對策
4-1 引言
4-2 量測系統規劃
4-2-1 電感式位移感測器
4-2-2 量測系統的規劃
4-2-3 量測系統的工作原理
4-3 驅動系統規劃
4-4 實驗設備
4-5 控制器設計對策
第五章 系統模式建立
5-1 引言
5-2 整體系統模型建立
5-2-1 作用力與力矩分析
5-2-2 磁浮平台動態方程式建立
5-3 系統模型穩定性分析
5-4 不穩定模式之系統模型建立
5-5 系統不確定性分析
第六章 不穩定子系統之控制器設計與實驗結果分析
6-1 引言
6-2 以JACOBIAN線性化為基礎之適應滑動模式控制器設計
6-2-1 控制器設計
6-2-2 實驗結果與分析
6-3 以輸入輸出迴授線性化為基礎之適應滑動模式控制器設計
6-3-1 控制器設計
6-3-2 實驗結果與分析
6-4 JACOBIAN線性化與輸入輸出迴授線性化之分析
6-5 以近似輸入輸出迴授線性化與歸步法為基礎之適應滑動模式控制器設計
6-5-1 系統多項式模式之建立
6-5-2 控制器設計
6-5-3 實驗結果與分析
6-6 結論
第七章 整體系統之控制器設計與實驗結果分析
7-1 引言
7-2 近似線性化
7-3 控制器設計
7-4 實驗結果與分析
第八章 結論與建議
8-1 對於斥力型磁浮懸吊導引系統結論與建議
8-2 對於控制理論的結論與建議
8-3 未來展望
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