臺灣博碩士論文加值系統

摘要
本文包含兩方面，一、微型制動器之製作，二、半圓球殼製程之改良。
在微型制動器製作方面，我們以簡單及經濟為出發點，設計出僅以一道光罩的製程。制動器由單邊175μm 長、夾角為156度的樑所組成，當通電壓8.9V，電流33.6mA時，可產生約3 μm 的水平位移及5 μm的垂直位移，並可舉起重約0.76μN 的銅塊。和傳統以靜電力驅動的制動器比較，此制動器具有不錯的驅動力及較小的驅動電壓。
在半圓球殼的製程方面，我們解決了在等向性蝕刻時，對準記號遭到過度蝕刻而破壞的問題及找到兩組等向性不錯的蝕刻配方，改善了蝕刻圓孔表面粗糙的現象。

Abstract
This thesis includes two parts : one is the fabrication of micro-actuators and the other is the improvement of the fabrication process of hemispherical polysilicon shells.
In the aspect of micro-actuators , we design the fabrication process of only one mask by the rules simple and economically. The micro-actuator is consisted of the beams of 175μm long with an angle of 156 degrees. The micro-actuator has achieved vertical movement of 5μm and horizontal movement of 3μm under an input current 33.6 mA at 8.9 Volts. Its ability to lift up a copper with 0.76 μN weight has been demonstrated.
Compared with the traditional actuators actuated by the electrostatic force , the actuator presented in this report has larger driving force and requires smaller driving voltage .
In the second part , regarding to the fabrication process of the hemispherical polysilicon shells , we solve the problem of the over etching of alignment key in the isotropic etching process and find out two prescriptions of isotropic etching with nice isotropy and improve the phenomenon of rough surface of the hemispherical hole .

目錄
第一章 導論……………………………………………….1
第二章 微型夾具的設計圖形及製程…………………….4
2-1 結構基本幾何形狀………………………………4
2-2 表面微型夾具制動器之製程…………………..12
2-3 說明……………………………………………..17
第三章 實驗量測…………………………………………..19
3-1 實驗量測………………………………………….19
3-2 制動力的量測….…………………………………31
第四章 實驗結果討論……………………………………..32
4-1 黏貼現象的討論……….…………………………32
4-2 應力集中的現象.…………………………………36
4-3 實驗量測結果比較………………………….……39
4-4 片電阻的計算…………………………………….41
第五章 應力分析…………………………………………...43
5-1 Ansys的應力分析………………………………..43
5-2 變形的模擬分析……………………………….. ..45
第六章 半圓球殼製程的改良 ……..…………………..…50
第七章 對準記號…….……………………………………54
7-1 對準記號的重要性……..……..…………………54
7-2 對準記號的製作方式………....…………………55
7-3 實驗結果…………………………………………..60
第八章 半圓球孔的蝕刻……………………………………64
8-1 影響等向性蝕刻的因素……………………………64
8-2 等向性蝕刻的理論………………………………..65
8-3 蝕刻溶液的配方………………………………… .66
8-4 保護層的選擇………………………………………67
8-5 實驗結果與討論…………………………………..68
第九章 結論………………………………………………..75
參考文獻……….……………………………………………….77

參考文獻
[1] Kurt E. Petersen, "Silicon Torsional Scanning Mirror", IBM J. Res. Develop. Vol. 24, No. 5, September 1980.
[2] V.P. Jaecklin, C. Linder, N.F. de Rooij, J.-M. Moret and Vuilleumier, "Line Addressable Torsional Micro Mirrors for Light Modulator Arrays", Sensor and Actuators A 41-42 (1994) 324-329
[3] J. Buhler, J. Funk, O. Paul, F.-P. Steiner, H. Baltes, "Thermally Actuated CMOS Micromirrors", Sensors and Actuators A 46-47 (1995) 572-575
[4] Mark G. Allen, " Polyimide -Based Processes for the Fabrication of Thick Electroplated Microstructures", Transducer '93
[5] W.C. Tang, T.C.H. Nguyen and R.T. Howe , "Laterally Driven Polysilicon Resonant Microstructures, "Sensors and Actuators, 20, 22-25 (1989)
[6] Long -Sheng Fan, Yu-Chong Tai and Richard S. Muller, "Integrated Movable Micromechanical Structures for Sensor and Actuators" IEEE Transaction on Electron Devices, Vol. ED-35, NO. 6, June 1988.
[7] KD. Wise, M.G. Robinson and W.J. Hillegas, "Solid-State Process to Produce Hemispherical Components for Internal Fusion Targets, " Journal of Vacumm Science Technology, Vol. 16, pp.1179, 1981.
[8] B. Schwartz, H. Robbins J. Electrochem. Soc, Vol. 106, pp.505 (1959)
[9] Kurt E. Petersen , Proceedings of the IEEE, Vol. 70, No. 5, May 1982.
[10] N. Schwesinger, " The Anisotropic Etching Behavior of so Called Isotropic Etchants, " Microsystem Technologies 96, Proceedings Potsdam, pp.481-486, 1996.
[11] N. Schwesinger, "Wet Chemical Isotropic Etching Procedures of Silicon a Possibility for the Production of Deep Structured Microcomponents " SPIE Vol. 3223, pp.72-79, 1997.
[12] Kirt R. Williams and Richard S. Muller, "Etch Rates for Micromachining Processing, " Journal of Microelectro Mechanical Systems, Vol. 5, No.4, pp. 256-269, 1996.
[1] 莊達仁 VLSI 製作技術 高立圖書有限公司 1997.
[14] 林曉宏著Surface Micromachined Vertically Driven Actuator 台大應力所碩士論文 1997.
[15] V.P. Jaeckline, C. Linder, J. Burgger, J.-M. Moret, R. Vuilleumer and N.F. deRooij, "Mechanical and Optical Properties of Surface Micromachined Torsional Mirrors in Silicon, Polysilicon and Aluminum", Transducers'93.
[16] 林正軒著 Microfabrication of Hemispherical Polysilicon Shells 台大應力所碩士論文1998.
[17] Marc Madou, Fundamentals of Microfabrication CRC 1997.