臺灣博碩士論文加值系統

由於本實驗室先前利用熔融旋淬法找到高B低稀土元素之 (Nd0.95La0.05)11Febal.Cr2B10等方性交換耦合複合薄帶具有極高矯頑磁力及高磁能積(Br=9.5kG、iHc=13.2kOe、(BH)max=18MGOe)。本實驗主要以此成份為基礎，變化不同Ti、Cr、B成份而鑄錠出Nd11.4La0.6Febal.M2Bx (M=Ti,Cr ; x=10.5, 13)三種靶材再配合各種濺鍍條件，藉此觀察製成高矯頑磁力與高磁能積釹鐵硼磁膜之可能性。經實驗結果證實可得以下結論:
(1)添加Ti之磁膜主要以R2Fe14B、Fe3B與R2Fe23B3三相為主，而添加Cr之磁膜則以R2Fe14B與Fe3B兩相為主。B含量的增加並不利於R2Fe14B硬磁相之生成，而在B含量為10.5 at ﹪的情況下，Ti的添加可使磁膜之最佳熱處理條件範圍加大，且晶粒細化作用比添加Cr元素還強。
(2)磁膜的最佳結晶化溫度為600oC左右，而且磁性質隨著濺鍍壓力、熱處理溫度與熱處理時間的增加而變差。
(3)磁膜厚度越厚，磁性質表現越優異，而Nd11.4La0.6Febal.Ti2B10.5磁膜在膜厚為2100nm時，其磁性質有最佳的表現(Br=7kG、iHc=11.5kOe、(BH)max=11MGOe)。

In the previous studies, high Boron low rare-earth (Nd0.95La0.05)11Febal.Cr2B10 alloy ribbons were found to exhibit excellent magnetic properties of Br=9.5 kG, iHc=13.2 kOe and (BH)max=18 MGOe. In this study, Nd11.4La0.6Febal.M2Bx (M=Ti, Cr ; x=10.5, 13) films were prepared by DC-sputtering in order to explore the possibility of achieving high coercivity and high magnetic energy product R2Fe14B thin films. The following results are obtained:
(1)For x=10.5 and M=Ti, thin films consisted of R2Fe14B, Fe3B and R2Fe23B3 phases, however for x=10.5 and M=Cr, thin films consisted merely of R2Fe14B and Fe3B phases. On the other head, for the films with M=Ti, higher amounts of boron addition (x=13) led to a less R2Fe14B phase, but a higher volume fraction of Fe3B and R2Fe14B phases. For x=10.5, the addition of Ti may extend the range of annealing to reach the optimum magnetic properties.
(2)The best annealing temperature of the studies thin films were 600oC, and the magnetic properties decreased when the sputtering pressure, annealing temperature and annealing time were increased.
(3)The magnetic properties of the films can be improved by increasing the thickness of the films. Single layer films of Nd11.4La0.6Febal.Ti2B10.5 with thickness of about 2100nm were found to exhibit excellent magnetic properties of Br=7 kG, iHc=11.5 kOe, (BH)max=11 MGOe, which are most comparable to those in (Nd0.95La0.05)11Febal.Cr2B10 alloy ribbons.

一、 序章………………………………………………………………..1
1-1前言……………………………………………………………..1
1-2記錄媒體………………………………………………………..3
1-2-1製造形式……………………………………………………3
1-2-2磁化狀態……………………………………………………4
1-2-3用途分類……………………………………………………5
1-3研究動機………………………………………………………..7
二、 基本理論………………………………………………………..…9
2-1磁性的來源………………………………………………………9
2-2磁性的分類……………………………………………………..10
2-3磁的交互作用與磁異向性……………………………………..13
2-4Nd2Fe14B晶體之結構與基本特性……………………………...14
2-5交換耦合效應…………………………………………………..16
2-6去磁場效應……………………………………………………..27
三、 實驗方法………………………………………………….……...30
3-1流程簡介………………………………………………………30
3-2靶材製作………………………………………………………31
3-3薄膜之製作……………………………………………………32
3-3-1實驗設備………………………………………………….32
3-3-2實驗條件………………………………………………….33
3-3-3詳細實驗步驟…………………………………………….34
3-4性質量測………………………………………………………35
3-4-1厚度量測…………………………………………………35
3-4-2熱磁分析…………………………………………………35
3-4-3 XRD結構鑑定及磁膜晶粒大小分析…………………..35
3-4-4 EDX成份分析…………………………………………..36
3-4-5磁性量測…………………………………………………36
3-4-6交換藕合效應之量測……………………………………36
四、 實驗結果…………………………………………………………38
4-1前言…………………………………………………………..38
4-2 Nd11.4La0.6Febal.Ti2B13實驗結果……………………………...41
4-3 Nd11.4La0.6Febal.Ti2B10.5實驗結果…………………………….58
4-4 Nd11.4La0.6Febal.Cr2B10.5實驗結果……………………………79
4-5-1交換耦合效應測量…………………………………….93
4-5-2晶粒大小的測量判定………………………………….93
4-6綜合比較與討論……………………………………………95
4-6-1不同成份磁膜之比較…………………………………95
4-6-2較厚磁膜磁性之探討…………………………………96
五、 結論……………………………………………………………..101
六、 參考資料……………………………………………………..…103

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