臺灣博碩士論文加值系統

本論文旨在研究利用鋅鎳擴散式和質子交換式鈮酸鋰光波導來製作高訊熄比之光極化分離器。元件之基本架構為一非對稱Y形分叉，其入射波導可導任意極化方向的光，兩分支波導則分別為僅導垂直極化(TM)和僅導水平極化(TE)的光波導。我們以鋅、鎳兩種金屬做為擴散源，製作出可導任意極化方向的入射波導。藉由改變不同的製程參數如鋅與鎳的厚度，擴散的溫度與時間得到僅導TE極化方向的光波導；並且利用質子交換法製作僅導TM極化的分支波導。在Y形分叉結構中，兩分支採用單極化波導，可增加元件之訊熄比。由實驗可得TE與TM極化光的訊熄比分別為25分貝（dB）與22分貝（dB）。

The thesis is to study the fabrication of polarization splitter with high extinction ratio by using zinc and nickel co-diffused and annealed proton exchange lithium niobate. The polarization splitter is an asymmetric Y-branch structure. The input waveguide can
guide randomly polarized waves, and the output branches only guide TM and TE polarized waves, respectively. We use zinc and
nickel as diffusion sources to fabricate input waveguide with randomly polarized waves. By changing the fabrication parameters
such as the thicknesses of zinc and nickel, diffusion temperature and time, we can fabricate single-TE polarized optical waveguides
and by using proton exchange method to obtain the single-TM polarized optical waveguides. In the Y-branch structure, the extinction
ratios can be increased by using single-polarized waveguides. Experiments have shown that the extinction ratios are 25 dB and 22 dB
for TE and TM polarizations, respectively.

第一章 積體光學簡介 1
1-1 光波導的歷史回顧 2
1-2 光波導製程 5
1-3 內容簡介 7
第二章 鋅鎳擴散式鈮酸鋰光波導 9 9
2-1 鋅擴散式鈮酸鋰光波導 10
2-2 鎳擴散式鈮酸鋰光波導 11
2-3 鋅鎳同步擴散式鈮酸鋰光波導 13
第三章 極化分離器 16
3-1 簡介 16
3-2 高訊熄比極化分離器之設計 19
3-3 實驗結果與討論 20
第四章 結論 22
附表 23
附圖 31
參考文獻 55
中英文名詞對照表 58

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