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研究生:陳名傑
研究生(外文):Chen Ming-jye
論文名稱:高溫超導約瑟芬元件之製作與特性分析
論文名稱(外文):Fabrication and Characterization of High-Tc Josephson devices on step-edge MgO substrate
指導教授:楊鴻昌楊鴻昌引用關係
指導教授(外文):Yang H C
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:物理學研究所
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2000
畢業學年度:88
語文別:英文
論文頁數:56
中文關鍵詞:高溫超導超導約瑟芬超導量子干涉元件濾波器陣列階梯氧化鎂
外文關鍵詞:High-TcsuperconductingJosephsonSQUIDfilterarraystep-edgeMgO
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本實驗旨在研究高溫超導約瑟芬元件的製作與特性分析。元件的製程,首先採用微影與乾式離子束蝕刻製作低角度的氧化鎂階梯基座,以及離軸磁控濺鍍成長釔鋇銅氧薄膜,再以原子力顯微鏡檢驗階梯的斜面與薄膜的平整度。實驗的結果顯示,階梯的斜面十分均勻,薄膜表面的平整度亦達8埃,直流式超導量子干涉元件在4 K時元件電壓受磁場調制的振幅達130 μV,N = 50、100、150的一維串聯接面陣列均可在微波照射下量到giant Shapiro steps。此外,根據電流-電壓的量測,所有的樣品均顯示,低角度氧化鎂階梯接面僅含一個晶界結

This work studied the fabrication and characterization of high-Tc Josephson devices on low angle step-edge MgO substrate. In the sample preparation, microlithography and ion beam etching (IBE) were used to fabricate the step-edge substrate, off-axis magnetron rf-sputtering to grow YBCO thin film, and atomic force microscope (AFM) to analyze the surface of step-edge and YBCO thin film. The results showed that the uniform step-edge is obtained and the surface roughness is about 8 Angstrom. The voltage response of dc-SQUID is 130 μV under the applied magnetic field at 4 K. Giant Shapiro steps of one dimensional series-junction array with N = 50, 100, and 150 were observed. Besides, according to the measurement of I-V curves, all samples revealed that only one-grain boundary is formed in the low angle step-edge YBCO junction on MgO substrate.

CONTENTS
Abstract (in Chinese) i
Abstract (in English) ii
Contents iii
List of figures iv
Chapter 1 Introduction 1
Chapter 2 General Background 3
2-1 Development and application of YBCO Josephson devices 3
2-2 Development of YBCO step-edge Josephson junction 6
2-3 Josephson junction 8
2-4 The dc-SQUID 11
Chapter 3 Motivation 14
Chapter 4 Experiments 16
4-1 Sample preparation 16
4-2 Measurement 20
Chapter 5 Results 31
5-1 The dc-SQUID 31
5-2 Series-connected step-edge Josephson junction array 33
Chapter 6 Conclusion 52
Reference 54

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