臺灣博碩士論文加值系統

本文針對焦電薄膜感測器作一研究，應用目的為結束無線滑鼠的休眠狀態，從感測器的焦電原理、感測器構造設計，並利用微機電製程製作感測器所需之焦電薄膜，規劃感測器完整製程並進行性能測試，成功的感測紅外線尤其是人體的紅外線並產生訊號，符合預期目標應用。
本文利用有機金屬堆積法製作焦電薄膜PZT，並嘗試不同的配方與製程參數，得到退火溫度700 ℃、Zr/Ti=53/47、Pb過量10%之PZT薄膜為高良率且厚度可超過1 mm 薄膜，在0~100 ℃下，焦電係數為1.52×10-8 (C/cm2 K)，不僅適合作為焦電感測器材料，也適合應用在機械式感測器、致動器等。
而感測器的製程上，我觀察並歸納了PZT薄膜破壞的原因，並提出可行的方法改善PZT的製程，同時設計並具體應用在感測器的製作流程上，不僅具有重現性，在操作頻率0.1~2.0 Hz、感測距離10~20 mm下可以感測到人體的紅外線輻射，符合預期的目標。

For waking up a wireless mouse in sleeping mode, I did a research on pyroelectric film sensor. This paper studies pyroelectricity, sensor design, and MEMS fabrication process. After manufacturing the pyroelectric film sensor, I successfully did experience on IR source (Heat Oven) even on human and got perfect response.
The pyroelectric film is composed of PZT and fabricated in MOD. After trying different prescription and processing parameters, I fond out the PZT film which Zr/Ti=53/47, Pb exceeding 10% and annealed at 700 ℃ having good performance. The film thickness could be more than 1 mm. Under 0~100 ℃, the film pyroelectric coefficient is 1.52×10-8 (C/cm2 K). The PZT film is suitable not only for pyroelectric sensor material, but also for mechanical sensor and actuator.
I observed and recorded the reason of film destruction and brought up a practicable method to improve the fabrication process. The human infrared ray could be sensed by t he PZT pyroelectric sensor in the range of 10 ~ 20 mm, operating frequency 0.1 ~ 2.0 Hz. It could be reaped manufactured and fit our goal.

誌謝
中文摘要 i
英文摘要 ii
目錄 iii
圖目錄 vi
表目錄 xi
一、 導論 1
1. 研究動機 1
2. 研究目標 2
二、 感測器前期研究 3
1. 感測技術方向 3
(1). 人體溫及熱輻射分佈 3
(2). 紅外線頻譜與人體紅外線特定波長 4
(3). 紅外線感測原理及簡介 5
2. 基本測試實驗 10
(1).市售一般之光感測器性能量測 10
(2).市售焦電紅外線感測器 12
3. FT-IR Spectroscopy(Spectrum 2000)測量紅外線頻譜 15
(1).儀器介紹 15
(2).量測結果 18
三、 感測器設計 22
1. 焦電感測器原理 22
(1).焦電效應 22
(2). 焦電感測器響應特性 23
2. 焦電感測器材料 25
(1).焦電材料 25
(2).紅外線吸收層材料 27
(3).下電極材料 30
3. 感測器結構與設計 30
(1).感測器結構 30
(2).感測器設計 31
(3).感測器定稿與光罩圖案 34
四、 焦電薄膜製作與改良 36
1. 焦電薄膜製程 36
(1). 焦電薄膜製作技術 36
(2). 薄膜製程概述 38
(3).薄膜製程參數 41
(4).薄膜性質量測 43
2. 參數更動與結果 48
(1). 鍍著層數與退火曲線 48
(2). 鉛過量比與Zr/Ti之莫耳數比例 53
(3). 配方優劣比較與最佳配方 55
(4).薄膜破裂成因分析及改良 59
(5).薄膜性能測試 68
五、 感測器製作與測試 73
1. 感測器製作流程 73
(1).光罩設計與製程規劃 73
(2).預溶液配置與晶圓清洗 77
(3).鉑鈦金屬與焦電薄膜蝕刻 78
(4).去除光阻步驟 80
(5).塗佈銀膠 83
(6).極化過程 84
2. 感測器測試 88
(1).紅外線源頻譜測量 88
(2).紅外線源產生紅外線之功率 89
(3).感測器所受溫度變化 91
(4).焦電感測器產生訊號 92
(5).感測器於不同距離下所產生響應訊號 96
六、 結論與展望 98
七、 參考文獻 100
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