臺灣博碩士論文加值系統

隨者國內的產業技術不斷的提昇，國內製造業對工具機以及機械人手臂的精度也日益增加，由於工具機與機械人手臂因需承受較大的負荷，所以每隔一段固定的時間就必須校驗一次，但一般的校驗儀器價格昂貴且不易保存與使用，而最常用於校正CNC工具機的就屬HP5528A，但其價格高，且每次校驗的時間約需三到四天，就以現今的時代對製造業而言，時間就是金錢。
本文的主要目的在於研發一個具有三維座標量測能力的三維雷射追蹤球桿，並其可應用於各種機器上其需檢測精度，以提高其精度。此三維雷射追蹤球桿的機構部分是由兩個相互垂直的旋轉軸以及一個直線運動軸所構成。直線部分是透過雷射都普勒尺進行位移的量測。兩組旋轉的部分則是利用便導體雷射角度編碼器來感測其角位移的變化量。在其運動範圍內，此系統的精度可達10微米、重複性可達7微米以下。藉由此量測系統，可量測出工具機與機器人手臂的定位精度以及重複性。且經由HTM Method推導三維雷射追蹤球桿之誤差方程式進而提昇系統的量測精度。

As the process of the manufacturing technology, the precision of the machine tool and the robot is demanded increasingly. As the larger load on the machine tool and the robot, it is necessary to calibrate them every a period of time. But ordinary calibration instruments are usually expensive and uneasy to use and keep well. For example, HP5528A is the most commonly used to calibrate the CNC machine tool. It is very expensive and three or four days are used for calibration every time. It is not economic for the modern manufacturing industry because time is money.
The main purpose of this paper is to develop a 3-D laser ball bar with the ability of 3-D position measurement, which can calibrate many kinds of machines to prove the precision. The mechanism of the 3-D laser ball bar consists of a linear axis and two angular axes, which are orthogonal mutually. The displacement on the linear axis is measured with a Laser Doppler Scale. The two angular displacements are measured with two Laser Rotary Encoders. In its measuring range, the precision is 10μm and the repeatability is 7μm. With this system, the positioning precision and the repeatability of the machine tool and the robot are measured. And the precision of the system is improved with the error equation of the laser ball bar, which is induced with the HTM method.

摘要　　　　　　　　　　　　　　　　　　　Ⅰ
英文摘要 Ⅱ
目 錄 Ⅲ
圖表目錄 Ⅵ
第一章 緒論 1
1-1 研究動機 1
1-2 論文回顧 5
1- 3論文結構概述 17
第二章 量測系統設備與系統誤差量測 18
2-1 量測系統設備 18
2-2 系統的誤差來源與量測 19
2-3 都普勒效應的位移量測 21
2-4 雷射量測的誤差來源 24
2-5 雷射都普勒尺的誤差分析 26
2-5-1 系統誤差 26
2-5-2 量測環境所引起的誤差 27
2-5-3 安裝不佳所引起的誤差 27
2-6 反射鏡型式與位移分析 28
2-7 雷射角度編碼器及訊號處理 28
2-7-1 光柵繞射式角度編碼器 29
2-7-2 角度編碼器之訊號處理 30
第三章 球桿量測範圍分析 32
3-1 前言 32
3-2 球桿量測範圍計算 32
第四章 三維雷射追蹤球桿設計之原理 37
4-1 前言 37
4-2 齊次轉換矩陣原理 37
4-2-1 座標轉換通式 38
4-2-2 座標平移 39
4-2-3 座標旋轉 40
4-2-4 座標旋轉與平移 41
4-3 球桿空間運動位置 42
4-4 三維雷射追蹤球桿之設計 45
4-4-1伸縮球桿之設計 45
4-4-2 旋轉基座之設計 52
4-4-3 整體設計圖 53
第五章 系統校正與其位置誤差分析 54
5-1前言 54
5-2 三維雷射追蹤球桿之系統校正 54
5-2-1 LDS校正與結果 55
5-2-2 垂直與水平角度編碼器之校正與結果 57
5-2-3 初始值校驗器之重複性測試 59
5-3 三維雷射追蹤球桿系統運動機構之描述 60
5-4 系統運動方程式之推導 63
5-4-1 球桿之空間運動位置推導 63
5-5 檢校量測系統的方法 67
第六章 量測方法與量測結果 73
6-1 前言 73
6-2 三維雷射追蹤球桿之量測程序與方法 73
6-2-1 量測系統的架設方法 73
6-2-2 量測系統的量測程序 74
6-3 以HP5528A雷射干涉儀檢驗本系統重複性
與精確度 78
6-4 線上檢測CNC綜合加工機 82
6-4-1使用HP5528A檢測工具機的結果 88
6-4-2 球桿空間運動位置補償前與補償後之比較 89
6-5 線上檢測機器人手臂 91
6-6 球桿之誤差分析 93
6-6-1 量測系統誤差 93
6-6-2系統誤差對量測結果的影響 94
6-6-3 系統誤差的發現 95
6-6-4 系統誤差消除方法 96
6-7 不確定度 96
6-8 三維雷射追蹤球桿精度改善構想及其不確定度
模擬分析 99
第七章 結論與討論 102
7-1 結論 102
7-2 討論 103
參考文獻 105

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