(3.230.154.160) 您好!臺灣時間:2021/05/07 18:51
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

我願授權國圖
: 
twitterline
研究生:黃旭漢
研究生(外文):Hsu-Han Huang
論文名稱:集束型製程設備中真空機械手臂之分析與控制
論文名稱(外文):The Analysis and Control of Vacuum Robot of Cluster Tools
指導教授:鍾文仁鍾文仁引用關係游欽宏
指導教授(外文):Wen-Ren JongChin-Horng Yau
學位類別:碩士
校院名稱:中原大學
系所名稱:機械工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:英文
論文頁數:90
中文關鍵詞:真空機械手臂力矩回授控制彈性
外文關鍵詞:Vacuum RobotElasticityForce Control Method
相關次數:
  • 被引用被引用:0
  • 點閱點閱:300
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:0

由於可整合多項製程模組以提高產率,集束型半導體設備(Cluster Tools)在半導體製程中逐漸成為未來主流。而真空機械手臂在集束型半導體設備中負責輸送晶圓於各個製程腔體間,因此真空機械手臂設計及控制的良窳也就越顯重要。在半導體製程高潔淨環境的需求下,真空機械手臂的傳動機構不再使用傳統方式,改為透過皮帶與皮帶輪來傳遞力矩,並配合固定的角度比例,使真空機械手臂完成傳送晶圓的動作,而又因半導體製程精度與速度的要求,如何控制真空機械手臂既正確又迅速的完成傳送動作,為本文討論的重心。
藉由Lagrange Equation,首先建立真空機械手臂的動態方程式,並於MATLAB分析軟體中建立SIMULINK模型以提供模擬。由於皮帶及諧和減速機皆對系統產生彈性的影響,並成為機械手臂振動源,本文亦針對上述振動源分別及同時存在的情況下,探討其對系統的影響。
在控制真空機械手臂方面,配合使用PID控制器及力矩回授控制法,並採用不同回授訊號的情況下,來降低振動情形及改善暫態反應。另外,利用等效彈簧擬合諧和減速機及皮帶的彈性影響,並提供合理的輸出結果,以期節省時間及人力在建構複雜的模型,及作為預測系統行為的參考。


Because Cluster Tools can integrate many process modules to increase the yields, it has become the main equipment gradually in semiconductor fields. In Cluster Tools, the vacuum robot is responsible for transferring the wafer between different process modules. Therefore, the design and control of the vacuum robot is very important. As a result of the need of high-degree clean environment, the transmission mechanism of vacuum robot needs to use the belt and idle wheel to replace the traditional actuators. With the specific angle proportion, the vacuum robot can still correctly complete the motion of transferring the wafer without any pollution to the environment.
For studying the characteristics of vacuum robot, the dynamic equations of decomposed modules of vacuum robot such as SCARA robot module, friction module, servomotor module, harmonic drive module and belt module are formulated by Lagrange Equation respectively. Then, the dynamic equations are all built and simulated with MATLAB software. In addition, the elasticity characteristics of belt and harmonic drive are further discussed in this paper.
In the aspect of control, the PID controller and force control method are both used to suppress the vibration and improve the transient response. Besides, the equivalent spring model is used to replace the harmonic drive and belts of arm for economizing the time to build the model, and predicting the behavior of robot.


CHINESE ABSTRACT...........................I
ABSTRACT...................................II
ACKNOWLEDGEMENT............................III
TABLE OF CONTENTS..........................IV
LIST OF TABLES.............................VII
LIST OF FIGURES............................IX
CHINESE ABSTRACT OF EACH CHAPTER...........XIV
1. INTRODUCTION...........................1
1-1 Research Background....................1
1-2 Literature Review......................1
1-3 Objective and Method...................1
1-4 Structure of Thesis....................2
2. INTRODUCTIONS OF CLUSTER TOOLS AND
VACUUM ROBOT...........................3
2-1 Cluster Tools with Active Loas Lock....3
2-2 Cluster Tools with Front End Module....4
2-3 Vacuum Robot for Transferring Wafer....6
3. DYNAMIC ANALYSIS OF VACUUM ROBOT.......9
3-1 SCARA Robot Structure..................9
3-2 Robot without Belts....................10
3-3 Robot with Belts.......................14
3-4 Robot including Friction...............17
3-5 Robot including Servomotor.............20
3-6 Robot including Harmonic Drive.........23
3-7 Complete Dynamic Equation of Robot.....31
4. SIMULATION AND CONTROL OF VACUUM ROBOT.33
4-1 Simulation and Control of Robot without
Belts..................................33
4-1-1 Robot without Belts..................33
4-1-2 Robot without Belts + Friction
+ Servomotor.........................35
4-1-3 Robot without Belts + Friction
+ Servomotor + Harmonic Drive........40
4-2 Simulation and Control of Robot with
Belts................................46
4-2-1 Robot with Belts.....................46
4-2-2 Robot with Belts + Friction
+ Servomotor.........................48
4-2-3 Robot with Belts + Friction
+ Servomotor + Harmonic Drive........52
4-2-4 Summary..............................54
4-3 Force Control Method.................58
4-3-1 Force Control Method.................58
4-3-2 Disturbance..........................62
4-3-3 Summary..............................67
5. SIMPLIFICATION OF HARMONIC DRIVE AND
BELT.................................69
5-1 Simplification of Harmonic Drive.....69
5-1-1 Theorem and Equation.................69
5-1-2 Type of Designated Disturbance.......71
5-1-3 Adding an External PID Compensator...76
5-2 Simplification of the Belt...........79
5-3 Summary..............................82
6. CONCLUSIONS AND FUTURE WORK..........83
6-1 Conclusions..........................83
6-2 Future Work..........................83
REFERENCES.................................85
APPENDIX A.................................88
VITA.......................................90


1.Y. J. Huang, “Mechanism Analysis and Motion Control of Wafer Transfer Robot”, Master Thesis, Chung Yuan Christian University, Taiwan, 1999.2.C. Y. Liu, “Dynamic Analysis, Motion Control and Trajectory Planning of Wafer Transfer Robot”, Master Thesis, Chung Yuan Christian University, Taiwan, 2000.3.S. Komada, K. Ohnishi, “Control of Robotic Manipulators by Joint Acceleration Controller”, 15th Annual Conference of IEEE on Industrial Electronics Society, Vol. 3, pp. 623-628, 1989.4.S. Komada, K. Ohnishi, “Force Feedback Control of Robot Manipulator by the Acceleration Tracing Orientation Method”, IEEE Transactions on Industrial Electronics, Vol. 37, No. 1, February 1990.5.M. Hashimoto, Y. Kiyosawa, “Experimental Study On Torque Control Using Harmonic Drive Built-in Torque sensors”, Journal of Robotic Systems, Vol. 15, pp.435-445, August. 1998.6.C. H. Yau, “The Research of Assembled Robot”, Master Thesis, National Tsing Hua University, Taiwan, 19847.S. J. Huang, J. Y. Yen, S. S. Lu, “Dual Mode Control of a System With Friction”, IEEE Transaction on Control Systems Technology, Vol. 7, No. 3, pp. 306-314, May 1999.8.K. Kiguchi, T. Fukuda, “Robot Manipulator Control with Soft Computing-Application of Adaptive Friction Models”, International Fuzzy Systems Conference Proceedings, August 1999.9.K. T. Tu, “Introduction of Servo Technology”, Chien-Hong Publishing Company, Taiwan, 1997.10.K. T. Tu, “The Selection and Use of Control System and Servomotor”, Chien-Hong Publishing Company, Taiwan, 1995.11.M. M. Moghaddam, A. A. Goldenberg, “Nonlinear Modeling and Robust -Based Control of Flexible Joint Robots with Harmonic Drives”, IEEE International Conference on Robotics and Automation, pp. 3130-3135, April 1997. 12.N. M. Kircanski, A. A. Goldenberg, “An Experimental Study of Nonlinear Stiffness, Hysteresis, and Friction Effects in Robot Joints with Harmonic Drivers and Torque Sensors”, The International Journal of Robotics Research, Vol. 16, No. 2 pp. 214-239, April. 1997.13.T. D Tuttle, W. Seering, “Modeling a Harmonic Drive Gear Transmission”, IEEE International Conference on Robotics and Automation, pp. 624-629, 1993.14.G. Zhang, J. Furusho, “Control of Robot Arms Using Joint Torque Sensors”, IEEE International Conference on Robotics and Automation, Vol. 4, pp. 3148-3153, 1997.15.H. D. Taghirad, P. R. Belanger, “Torque Ripple and Misalignment Torque Compensation for the Built-In Torque Sensor of Harmonic Drive Systems”, IEEE, 1998.16.J. Schilling, “Fundamentals of Robotics Analysis and Control”, Prentice- Hall, 1998.17.K. Kaneko, et al., “A Motion Control of Flexible Joint Based on Velocity Estimation”, 16th Annual Conference of IEEE on Industrial Electronics Society, Vol. 1, pp. 279-284, 1990.18.M. Hashimoto, “Robot Motion Control Based on Joint Torque Sensing”, IEEE International Conference on Robotics and Automation, Vol. 1, pp. 256-261, May 1989.19.O. Fumio, “Evaluation of a Rigid Model for a SCARA-type Robot with Harmonic Drive Transmissions”, IEEE International Conference on Intelligent Robotics and Systems, pp. 26-30, July 1993. 20.P. E. Dupont, “Friction Modeling in Dynamic Robot Simulation”, IEEE International Conference on Robotics and Automation, Vol. 2, pp. 1370-1376, 1990.21.C. F. Chao, “Advanced Design of Control-Using MATLAB Language”, Chwa Publishing Company, Taiwan, 2000.22.C. H. Chang, “The Design and Application of MATLAB”, CWEB Technology Inc, Taiwan, 2000.

QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
無相關論文
 
1. 蔡增家,〈美日安保條約的政經意涵與制度的調適〉,《問題與研究》,第37卷第9期,民國87年9月,頁1~18。
2. 劉復國,〈綜合性安全與國家安全:亞太安全概念適用性之檢討〉,《問題與研究》,第38卷第2期,民國88年2月,頁21~36。
3. 楊永明.唐欣偉,〈信心建立措施與亞太安全〉,《問題與研究》,第39卷第6期,民國88年6月,頁1~21。
4. 葉國興,《從亞洲金融危機看後冷戰時代美國的對日戰略》,《戰略與國際研究》,第2卷第3期,2000年7月,頁67~92。
5. 葉國興,〈日本邁向日美同盟下的普通國家-評日美防衛合作指針相關法案的通過〉,《戰略與國際研究》,第1卷第3期,1997年7月,頁43~73。
6. 彭慧鸞,〈資訊時代國際關係理論與實務之研究〉,《問題與研究》,第39卷第5期,民國89年5月,頁1~15。
7. 莫大華,〈中共對建立「軍事互信機制」之立場:分析與檢視〉,《中國大陸研究》,第42卷第47期,民國88年7月,頁27~37。
8. 莫大華,〈「安全研究」論戰之評析〉,《問題與研究》,第37卷第8期,民國87年8月,頁19~33。
9. 丁永康,〈中俄戰略協作夥伙關係-建構國際新秩序分析〉,《問題與研究》,第38卷第6期,民國88年6月,頁49~61。
10. 陳永康.翟文中,〈中共海軍現代化對亞太安全之影響〉,《中國大陸研究》,第42卷第7期,民國88年7月,頁1~25。
11. 李瓊莉,〈經濟安全概念在亞太地區的發展〉,《問題與研究》,第38卷第2期,民國88年2月,頁39~53。
12. 李大中,〈後冷戰時期美國飛彈防禦政策-爭辯與邏輯〉,《問題與研究》,第39卷第5期,民國89年5月,頁17~45。
13. 宋鎮照,〈美國霸權在亞太地區之挑戰〉,《美歐月刊》,第11卷第3期,民國85年3月,頁25。
14. 石之瑜,〈現實主義國際政治學的知識脈絡〉,《問題與研究》,第39卷第7期,民國89年7月,頁37~52。
15. 丁樹範,〈中共對美國「戰區飛彈防衛計畫」的態度〉,《問題與研究》,第38卷第11期,民國88年11月,頁1~17。
 
系統版面圖檔 系統版面圖檔