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研究生:陳耀宗
研究生(外文):Yao-Zong Chen
論文名稱:鐠鋇銅氧和釔鋇銅氧雙層膜的鄰近效應
論文名稱(外文):Proximity Effect in bilayer films of PrBa2Cu3O7-δ and YBa2Cu3O7-δ
指導教授:賴再興
指導教授(外文):Tzay-Shing Lai 
學位類別:碩士
校院名稱:中原大學
系所名稱:應用物理研究所
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:中文
論文頁數:48
中文關鍵詞:離軸磁控濺鍍感應超導性正常金屬/超導體雙層結構鄰近效應
外文關鍵詞:N/S bilayered structureoff-axis rf magnetron sputteringinduced superconductivityproximity effect
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為了要瞭解以YBa2Cu3O7-χ(YBCO) (S)為穿隧電極,以摻雜的YBCO衍生物(N)為穿隧位障所形成的接面的行為,我們必須針對N、S材料個別的物性以及它們彼此間的鄰近效應去做研究。本論文中,我們使用離軸射頻磁控濺鍍法,在(100)SrTiO3(STO)基板成長出c軸取向的YBCO薄膜,以相同鍍膜條件原位(in situ)製備PrBa2Cu3O7-χ(PBCO),藉由PBCO及YBCO所形成的正常金屬(N)/超導體(S)雙層結構來探討鄰近效應。而對此PBCO/YBCO雙層結構的傳輸性質的探討,主要包括:
(1)利用原子力顯微術(AFM)對N/S界面的形態(平整度)做 分析。
(2)感應超導性與PBCO薄膜厚度(dN)及current levels (I)的依變關係,這個依變關係可經由電阻-溫度(R-T)關係曲線顯露出來。
(3)雙層結構的Ic、Tc與YBCO薄膜厚度(dS)及PBCO薄膜厚度(dN) 的依變行為。
我們發現雙層結構的臨界電流IC隨PBCO厚度(dN)增加而成指數衰減,IC隨YBCO厚度(dS)的增加呈線性的增加;臨界溫度下降之幅度ΔTC則隨YBCO厚度(dS)的減少而變大。另外,由電阻-溫度量測曲線,感應超導性並未如文獻報導,在某溫區有消失再增強的趨勢。最後,對我們的實驗結果加以討論。


To understand the behavior of YBa2Cu3O7-χ(YBCO) (S) based junctions having doped YBCO derivatives (N) as a barrier, one has to study both the properties of the individual materials and the proximity effect between them. In the present study we investigated the proximity effect of the N/S bilayers of PrBa2Cu3O7-χ(PBCO) and YBCO that are prepared in-situ in a single deposition run by the 90°off-axis rf magnetron sputtering method. The transport properties of the PBCO/YBCO bilayered structure being explored mainly are :
(1)A analysis of the morphology of the N/S interface is to be performed by the atomic force microscopy (AFM).
(2)The dependence of the induced superconductivity on the PBCO thickness (dN) and current levels (I) as reveal from the R-T curves.
(3)The dependence of IC and TC of the bilayer on the thickness (dS) of YBCO and the thickness (dN) of PBCO.
We found an exponential decay of the critical current (IC) with increasing thickness (dN) of the normal metal in the N/S bilayers, IC increases linearly with the increasing thickness dS. A depression of the critical temperature (TC) in N/S bilayers which became larger with decreasing thickness (dS) of the superconductor. From our R-T curves, the induced superconductivity does not exhibit the disappearance- reappearance behavior as the existing data reported. Finally, comments and explanations of our results are presented.


中文摘要.................................................................I
ABSTRACT................................................................III
目錄.....................................................................V
圖表索引................................................................VII
第一章 緒論..............................................................1
第二章 鄰近效應理論......................................................4
第三章 實驗裝置與過程....................................................7
3-1 實驗裝置.............................................................7
3-1-1 離軸射頻磁控濺鍍系統...............................................7
3-1-2 氬離子束蝕刻系統...................................................8
3-2 實驗過程.............................................................12
3-2-1 靶塊的製作.........................................................12
3-2-2 薄膜的製備.........................................................12
3-2-3 雙層結構的製作.....................................................18
3-3 量測系統.............................................................22
3-3-1 X-ray繞射儀........................................................22
3-3-2 原子力顯微鏡.......................................................22
3-3-3 電性量測...........................................................23
第四章 實驗結果與討論....................................................28
4-1 薄膜品質分析.........................................................28
4-1-1 電阻與溫度的關係...................................................28
4-1-2 X-ray繞射圖形......................................................29
4-1-2 原子力顯微術圖形...................................................29
4-2 PBCO/YBCO雙層膜的特性探討............................................38
4-2-1 感應超導性.........................................................38
4-2-2 ΔTC、IC與dS、dN之間的依變關係.....................................41
第五章 結論..............................................................44
參考文獻.................................................................45


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