臺灣博碩士論文加值系統

在壓電致動器驅動的微定位平台研究中，磁滯效應降低控制系統的性能，若能加以補償可提升性能，本文採用Chen[12]的連續磁滯模式建立壓電致動平台的模式，並提出離散化的方法，但模式之磁滯效應不可直接量測，必須設計觀測器來觀測磁滯效應，本文設計連續與離散之〝類Luenberger〞觀測器，並以LMI方法驗證其在操作範圍內的穩定性，在模擬與實驗中分別以三角波訊號及不連續（有突然變化）的訊號輸入連續模式、離散模式和實際平台系統，藉以測試觀測器的性能，結果顯示實現的觀測器的性能符合需求。

In studying the control of a piezo-electric actuator driven micro-positioning stage system, the control performances are degraded by hysteresis effects. Aiming at improving the performances, many hysteresis models have been proposed in literatures for hysteresis compensation. In this study, the continuous hysteresis model in Chen[12] is adopted for the system and is discretized. However the hysteresis effect can not be directly measured in our case, an observer is necessary for estimating the hysteresis. A〝Luenberger-like〞 observer is designed for the model, the stability of the observer within a specific operating range can be tested with the LMI method. The performances of the observers for continuous model, discrete model and practical system are tested through applying a triangular input signal and a discontinuous input signal. The simulation and experimental results indicate the designed observers have the expected performances.

誌謝ii
中文摘要iii
英文摘要iv
目錄v
圖目錄vii
表目錄ix
第一章 緒論1
1.1 前言1
1.2 文獻回顧2
1.3 研究動機4
第二章 壓電致動平台模式建立5
2.1 壓電致動平台模式5
2.2 壓電致動平台狀態空間描述7
2.3 數學模式之參數決定8
2.4 模式的不確定性12
第三章 實驗設備與系統架構16
3.1 實驗設備16
3.2 系統架構19
第四章 連續模式狀態觀測器設計20
4.1狀態觀測器的設計20
4.1.1線性狀態方程式觀測器20
4.1.2非線性類Luenberger觀測器21
4.2觀測器設計方法一：極點配置法22
4.3設計方法一之觀測器模擬結果25
4.4觀測器設計方法二：30
4.5設計方法二之觀測器模擬結果32
第五章 離散狀態觀測器設計35
5.1 模式之離散化35
5.2磁滯模式之離散化36
5.3離散化磁滯模式模擬結果38
5.4 離散觀測器之設計41
5.5 離散觀測器之模擬45
第六章 實驗結果49
6.1 實驗架構49
6.2 實驗結果比較49
第七章 結論54
參考文獻56
附錄159
附錄263
附錄367

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