臺灣博碩士論文加值系統

人類日常生活和產業環境都與濕度變化有著密切關係，因此，精密穩定的濕度感測器相關研究和量測應用相當的重要。而濕度感測器會受溫度影響，產生嚴重的量測誤差，必須依賴補償技術修正；一般濕度感測器之溫度補償，大多採用外接處理電路或資料處理等方式，以期改善誤差，因而增加了系統複雜性及功率消耗。本文旨在設計以PVA為感濕薄膜之半導體電容式濕度微感測器，以相容製程設計製作溫度補償結構，微感測與補償元件連接CMOS震盪電路，以輸出感測信號，完成一智慧型電容式濕度微感測器。結果顯示具自我補償之濕度微感測器之溫度相依誤差可成功的降低約40-50%，此微元件溫度補償方式簡單，不需增加額外處理電路和功率，使其具廣泛應用於電容式微感測器之潛力。

The change of humidity plays an important role in daily life, so the researches and the applications of the accurate and stable humidity sensors are important. The disturbance of temperature will cause serious errors during humidity sensor’s measurement. The developed signal processing circuits and data processing units are the ways to reduce the errors in general, but it always increases the system complexity and power dissipation.The purpose of this paper is to design the semiconductor capacitive humidity microsensors with PVA humidity sensing thin films and to develop the compatible temperature compensation structures. The sensor and compensation structures are connected in shunt and their signal are read out by a CMOS oscillator circuit to form a smart capacitive humidity microsensor. The results display that the errors of humidity measurements caused by temperature disturbance can be reduced about 40% to 50% effectively. The method of temperature compensation is simple and effective without additional power dissipation. The designed techniques can be used to compensate the capacitive microsensors extensively.

目錄
中文摘要i
Abstractii
目錄iii
圖目錄vi
表目錄xi
第一章 序論1
1.1 研究動機1
1.2 文獻探討2
1.2.1 MOS型濕度感測器2
1.2.2 電解質型濕度感測器3
1.2.3 陶瓷式濕度感測器4
1.2.4 高分子濕度感測器4
1.2.5 電容感測信號處理電路5
1.3 研究方法6
1.4 研究流程與論文架構7
第二章 智慧型電容式濕度感測原理與微製程技術9
2.1智慧型感測系統9
2.2聚乙烯醇感濕特性11
2.3電容式感測器原理12
2.4電容式感測器溫度補償技術13
2.5半導體與微機電製程技術14
2.5.1 真空蒸鍍法15
2.5.2 光微影技術15
2.5.3 濕式蝕刻技術17
2.5.4表面微機械加工技術18
2.6遲滯震盪器原理19
2.6.1遲滯震盪原理19
2.6.2 SOI原理21
第三章 智慧型濕度微感測體設計22
3.1電容式高分子濕度微感測器設計22
3.1.1平行板濕度微感測器設計與製程規劃22
3.1.2指插式濕度微感測器設計與製程規劃24
3.2電容式微感測器溫度補償結構設計26
3.2.1電容式微感測器溫度補償結構設計26
3.2.2電容式微感測器溫度補償結構製程規劃27
3.3加熱電阻設計29
3.4信號輸出電路設計30
3.4.1震盪電路30
3.4.2電路佈局設計31
3.5智慧型濕度微感測器封裝與量測33
第四章 微感測器製程測試與微結構模擬分析34
4.1微感測器製程測試與感濕層特性分析34
4.1.1微感測器各疊層製程測試34
4.1.2聚乙烯醇薄膜之製作與測試36
4.2溫度補償結構模擬分析38
4.3震盪電路模擬分析43
第五章 微感測器製作與分析46
5.1平行板式濕度微感測器46
5.1.1微感測器製程分析46
5.1.2量測分析54
5.2指插式濕度微感測器與溫度補償結構55
5.2.1微感測器製程分析55
5.2.2量測分析62
第六章 結論64
6.1 結論64
6.2 未來發展及工作64
參考文獻66
附錄A 實驗儀器設備69
附錄B 震盪器電容頻率模擬關係曲線73
誌謝76
作者簡介77

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