(44.192.70.216) 您好!臺灣時間:2021/05/09 18:58
字體大小: 字級放大   字級縮小   預設字形  
回查詢結果

詳目顯示:::

: 
twitterline
研究生:饒國譯
研究生(外文):Jao kuo-yi
論文名稱:Fe-Co-B-Al非晶薄膜的磁性研究
論文名稱(外文):Magnetic Properties of Fe-Co-B-Al Amorphous Films
指導教授:陳立翰
指導教授(外文):L. H. Chen
學位類別:碩士
校院名稱:義守大學
系所名稱:材料科學與工程學系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:中文
論文頁數:53
中文關鍵詞:非晶質軟磁磁控濺鍍磁阻
相關次數:
  • 被引用被引用:0
  • 點閱點閱:417
  • 評分評分:系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔系統版面圖檔
  • 下載下載:20
  • 收藏至我的研究室書目清單書目收藏:0
本研究利用三極直流磁控濺鍍法,共同濺鍍Fe-Co-B及Al靶製作Fe-Co-B-Al非晶薄膜,並探討其結構及磁化、磁阻行為。
經由XRD分析,我們發現無論是初鍍膜或是熱處理後的Fe-Co-B-Al薄膜,其結構均屬非晶結構,並未發現明顯之結晶相存在。Al含量小於8.4%之Fe-Co-B-Al薄膜,表現出明顯異向性磁化行為,易磁化軸平行濺鍍時外加磁場方向。薄膜之抗磁力隨鋁含量增加而下降。200℃/2hr熱處理對薄膜之磁化行為並未有太大影響。當Al含量超過8.4%以後,不論是初鍍膜或是經過熱處理的薄膜,其難磁化軸與易磁化軸方向互易。Al含量改變對薄膜磁化行為之影響可能與鋁的添加造成薄膜組織改變,且導致組織內的應力狀態改變有關。
薄膜之磁阻效應為正效應,其電阻隨外加磁場施加而上升。隨Al含量增加,磁阻比值上升,於0.6%Al含量時,得到最大磁阻比值0.74%。當Al含量大於8.4%以後,薄膜之磁阻效應就不明顯。熱處理後薄膜之磁阻行為也是相似。

We have deposited the Fe-Co-B-Al amorphous films by co-sputtering of Fe-Co-B and Al targets and studied their structure and magnetization and magnetoresistive behavior. The structure of as-deposited Co-Fe-B-Al films are shown to be amorphous by XRD. The annealing at 200 C for 2 hr does not change the amorphous nature of films. The Fe-Co-B films with Al less than 8.4 % exhibit an anisotropic magnetization behavior, in which the easy axis is parallel to the direction of applied field during sputtering and the hard axis perpendicular to the easy axis. The coercivity of these films decreases as the Al content increases. The easy axis is observed to rotate for 90 degree for the films with Al of 8.5 % and more. Such Al content dependence of magnetization behavior of Fe-Co-B-Al films is believed to be correlated to the change of microstructure and residual stress. It is also found that all films show a small positive magnetoresistive behavior.

中文摘要
英文摘要
誌 謝
總 目 錄
圖 目 錄
第一章 緒論 1
1-1前言 1
1-2 研究動機與目的 2
第二章 理論基礎 3
2-1非晶質合金 3
2-1-1非晶質合金的發展 3
2-1-2 非晶質合金的形成原理 3
2-1-3 非晶態合金的製造方法 4
2-2 磁性理論 5
2-2-1 物質磁性起源與分類 5
2-2-2 非晶質磁性材料之結構 8
2-2-3 非晶質磁性金屬的分類 10
2-2-4 磁異向性 11
2-3 磁光科爾效應 13
2-3-1 磁光效應 13
2-3-2 磁光科爾效應的分類 14
2-4 濺鍍理論 16
2-4-1 濺鍍 16
2-4-2 直流濺鍍原理 16
2-4-3 直流濺鍍【51】 19
2-4-4 磁控濺鍍【52】 19
第三章 實驗步驟 23
3-1實驗流程 23
3-2 基板之前處理 24
3-3 非晶態金屬合金薄膜製備 25
3-3-1 濺鍍系統 25
3-4 熱處理 26
3-5 薄膜之特性量測與分析 27
3-5-1 磁性量測 27
3-5-2 磁阻量測 28
3-6 成分與結構分析 32
3-6-1 X-Ray繞射分析 32
3-6-2 EDS成分分析 32
第四章 結果與討論 33
4-1 成分與結構分析 33
4-1-1 成分 33
4-1-2 結構分析 34
4-2 磁性分析 36
4-2-1 初鍍膜之磁性 36
4-2-2 熱處理對磁性的影響 40
4-3 磁阻分析 44
4-3-1 初鍍膜的磁阻 44
4-3-2 熱處理對磁阻的影響 47
第五章 結論 49
第六章 參考文獻 50

第六章 參 考 文 獻
1.Y.H.kim et al,“Ultrahigh Tensile Strengths of Al88Y2Ni9M1 (M=Mn or Fe) Amorphous Alloys Containing Finely Dispersed fcc-Al Particles”, Mater.Trans.JIM, vol.31, pp.747,1990.
2.A.Inoue et al,“The effect of Cu addtion on the structure and mechanical properties of Al-Ni-M (M=Ce or Nd) amorphous alloys containing nanoscale f.c.c-Al particles”, Mater.Sci.Eng, A179/A180, pp.654,1994.
3.Y.Toshizawa et al,“New Fe-based soft magnetic alloys composed of ultrafine grain structure”, J.Appl.Phys, vol.64, pp.6044,1988.
4.K.Suzuki et al,“High Saturation Magnetization and Soft Magnetic properties of b.c.c Fe-Zr-B and Fe-Zr-B-M (M=Transition Metal) Alloys with Nanoscale Grain Size”, Master.Trans.JIM, vol.32, pp.93,1991.
5.J.J.Croat et al,“preparation and coercive force of melt-span Pr-Fe alloys”, Appl.Phys.Lett,vol.37, pp.1096,1980.
6.E.F.Kneller et al,“The Exchange-spring Magmet:A New Material Principle for Permanent Magnets”, IEEE Trans.Magn, vol.27, pp.3588,1991.
7.S.Wang and M. H. Kryder,“rf-diode-sputtered iron nitride films for thin-film recording head materials”, J.Apply.Phys, vol.67,no.9, pp.5134,1990.
8.J. Hong, K. Sin, L. Nguyentran, and S. Wang,“Soft Magnetic Properties and Microstructures of FeRhN High Moment thin Films”, IEEE Trans. Magn, vol.33,pp.2845,1997.
9.L. H. Chen, T.J. Klemmer, K.A. Ellis, R.B. van Dover, and S. Jin,“soft-magnetic properties of Fe-Co-B thin film for ultra-high-frequency applications”. J. Apply. Phys,vol.87, pp.5858,2000.
10.T. Takahashi, N. Iketa, and M. Naoe,“Annealing dependence of coercivity ,anisotropy field , and resistivity for amorphous CoZrNb films deposited by dc planar magnetron sputtering”, J. Appl. Phys, vol.69,no.8, pp.5011,1991.
11.Y. Hayakawa and A. Makino, US Pattern No. 5,725,685.
12.Y.J. Chen, S Hossain, C, Qian, M. Miller, and H.C. Tong, J. Appl. Phy, vol.86,pp.4562
,1999
13.Y. Chen, C. Qian, C. Hung, and M. Miller,“High resistivity nanocrystalline FeRhN films”, J. Appl. Phys, vol.87, pp5864, 2000.
14.Klement et al, Nature,187,169,1960.
15.P.Pond and R.Maddin, Metall.Soc.AIME, vol.245, pp.2475,1969.
16.H.S. Chen and C.E.Miller, “A New Flange Design for O-Ring Seals A Rapid Quenching Technique for the Preparation of Thin Uniform Films of Amorphous Solids ” ,Rev.Sci.Instrum, vol.41, pp.1237,1970.
17.D. Turnbull,Contemp. Phys, vol.10, pp.472,1969.
18.F. Spaepen et al, Rapidly Quenched Metals ,Sec.1,eds N.J. Grant st al,MIT Press
,Cambridge,1976.
19.A. Inoue,“High Strength Bulk Amorphous Alloys with Low Critical Cooling Rates”, Mater.Trans.JIM, vol.36, pp.866,1995.
20.A. Inone and H. Koshiba, T. Itoi, A. Makino.“Ferromagnetic Co-Fe-Zr-B amorphous alloys with glass transition and good hight-frequency permeability ”,Appl. Phys. Vol 73. pp774 1998.
21.A. Inone and J. S. Gook,“Fe-Based Ferromagnetic Glassy Alloys with Wide Supe- rcooled Liquid Region”, Mater Trans, JIM ,Vol 36, No.9, pp.1180 to 1183 1995.
22.A. Inone. Y. Shinohara, and J. S. Gook,“Thermal and Magnetic Properties of Bulk Fe-Based Glassy Alloys Prepared by Copper Mold Casting” ,Mater Trans.JIM, Vol 36, No.12 , pp 1427 to 1433 1995.
23.A. Inone. A. Takeuchi, T. Zhang, A. Murakami, and A. Makino.“Soft Magnetic Properties of Bulks Fe-Based Amorphous Alloys Prepared by Copper Mold Casting ”, IEEE Trans. Magn. vol.32, No.5 , pp.4866 1996.
24.A. Inone. A. Murakami. T. Zhang, and A.Takeuchi. “Thermal Stability and Magnetic Properties of Bulk Amorphous Fe-Al-Ga-P-C-B-Si”, Mater. Trans. JIM 38. pp.189 to 196 1997.
25.A. Inone. T. Zhang. T. Itoi, and A.Takeuchi. “New Fe-Co-Ni-Zr-B Amorphous Alloys with Wide Supercooled Liquid Regions and Good Soft Magnetic Properties”, Mater. Trans. JIM vol38. pp.359 to 362 1997.
26.A. Inone. H. Koshiba. T. Zhang, and A. Makino.“Thermal and Magnetic Properties of Fe56Co7Ni7Zr10-xNbxB20 Amorphous Alloys with Wide Supercooled Liquid Range”, Mater. Trans. JIM vol.38. pp.577 to 582 1997.
27.A. Inone and J. S. Gook,“Effect of Additional Elements (M) on the Thermal Stability of Supercooled Liquid in Fe72-xAl5Ga2P11C6B4MX Glassy Alloys ”, Mater Trans.JIM ,vol 37, No.32 pp, 32 to 38 1996.
28.A. Inone. A. Makino, and T. Mizushima, “Soft magnetic properties of Fe based amorphous thick sheets with large glass forming ability”J. Appl. Phys.vol.81(8), 15 April, pp. 4029 to 4031 1997.
29.A. Inone. H. Koshiba. T. Zhang, and A. Makino, “High-frenquency permeability of soft-magnetic Fe-Hf-O films with high resistivity”, J. Appl. Phys.vol 83(3), pp 1569 to 1574 ,1 February 1998
30.A. Inone, “High Strengh Bulk Amorphous Alloys with Low Critical Cooling Rates” ,Mater Trans, JIM Vol 36, No.7 , pp.866 to 875 1995.
31.H.S. Chen,“Thermodynamic considerration on the formation and stability of metallic glasses”, Acta Met, vol.22, pp.1505,1974.
32.Soshin Chikazumi 著,張煦、李學養譯,磁性物理學,聯經出版社,1982.
33.戴道生、韓汝琪 等編著, “非晶態物理”,高等學校教學用書
34.Brenner, A, Couch, D. E. and Williams, E. K, J.Res, natn. Bur. Stand,44,109,1950
35.陳立俊等著, “材料電子顯微鏡學”, 國科會精儀中心
36.A.I. Gubanov, “Quasi-classical Theory of Amorphous Ferromagnetics”, Sov. Phys.-Solid St, vol.2, pp.468,1960.
37.S. Mader et al,“Metastable Co-Au Alloys: Example of an Amorphous Ferromagnet”, Appl. Phys. Lett, vol.7, pp.57,1965.
38.W. Felsch, Z. Phys, vol.219, pp.280,1969.
39.P. Duwez, Trans. Am. Soc. Metals, vol60, pp.607,1967.
40.C.C. Tsuei et al “Metastable Amorphous Ferromagnetic Phaes in Palladium-Base Alloys”, J.Appl.Phys, vol.37, pp.435,1966.
41.B.G. Bagley et al, Bull. Am. Phys. Soc., vol.10, pp.110,1965.
42.陳嘉元,Fe1-xPtx合金薄膜及Fe/Pt多層膜磁光性質之研究,國立成功大學碩士論文,1999.
43.B.D. Cullity,Introducton to Magnetic Material,Addison-Wesley,1972.
44.G Herzer, Nanocrystalline Soft Magnetic Alloy, Handbook of Magnetic Material, vol.10,ed.by K.H.J.Buschow,1997.
45.J.P. Qian, G.C. Wang,“A simple ultrahigh vacuum surface magneto-optic kerr effect setup for the study of surface magnetic anisotropy”, J. Vac. Sci. Technol. A. vol.8, pp.4117,1990
46.M.J. Freiser,“A Survey of Magnetooptic Effects”, IEEE Trans. Magn.,vol.4, PP.152,1968.
47.J. A. Fernandez-Baca, Wai-Yim Ching, “The magnetism amorphous metals and alloys”, World Scientific Publishing Co. Pte. Ltd.
48.Chih-Wen Chen, Magnetism and Metallurgy of Soft Magntic Materials , Dover Publications, Inc. New York.
49.周麗新, “薄膜工程學”, 中國材料學會
50.賴耿陽 編譯, “薄膜製作工藝學” , 復漢出版社, 1987, P32
51.K. Sato, Y. Tosaka,Magnetic polarizaton of interfacial Pt in FePt/Pt mulitilayers witnessed by magneto-optacal spectra,J.Mag.Mag.Mat , vol.148, pp.206,1995.
52.賴耿陽,IC製成之濺射技術,復漢出版社,1997.
53.王力衡, 鄭海濤譯, “薄膜”, 電子工業出版社, 1984, P17
54.鍾文耀, 電子發展月刊, “金屬濺鍍技術簡介”
55.陳寶清, “真空表面處理工學”, 傳勝出版社, 1982
56.B.D. Cullity,Elements of X-Ray Diffraction, 2nd ed, chap.1、2, Addison-Wesley.

QRCODE
 
 
 
 
 
                                                                                                                                                                                                                                                                                                                                                                                                               
第一頁 上一頁 下一頁 最後一頁 top
系統版面圖檔 系統版面圖檔