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研究生:高健原
研究生(外文):J.Y. Gao
論文名稱:〈Co/AlOx/Ni80Fe20〉複膜之穿隧式磁阻特性
論文名稱(外文):Tunneling Magnetoresistance in 〈Co/AlOx/Ni80Fe20〉Films
指導教授:陳立翰
指導教授(外文):L.H. Chen
學位類別:碩士
校院名稱:義守大學
系所名稱:材料科學與工程學系
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:中文
論文頁數:79
中文關鍵詞:直流磁控穿隧式磁阻AlOx絕緣層氧化時間自旋
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本研究探討利用直流磁控濺鍍法濺鍍金屬層,並於高純度乾氧進行鋁層氧化反應,製作【Co(200 Å)/Al(10~30 Å)Ox/Ni80Fe20(200 Å)】複膜接合面,探討以自然氧化法製作AlOx層,氧化時間與鋁層厚度對複膜接合面穿隧式磁阻和磁化行為的影響。
我們發現【Co(200 Å)/Al(20 Å)Ox/Ni80Fe20(200 Å)】複膜接合面中,Al層厚度為20Å置於760torr乾氧中於室溫下氧化一小時三十分鐘時,於平行Co電極層及固定電流下量測,室溫磁阻比值為1.4﹪,溫度降至15K時,磁阻比值增為2.5﹪。繼續增長氧化時間時,其磁阻比值下降,氧化時間為6小時下,磁阻比值只有0.2%。複膜接合面之電流與電壓呈現非線性之關係,但磁阻行為仍隨量測方位改變而出現明顯變化,且複膜接合面之電阻只有12.3Ω,可能與絕緣層之氧化程度不足或存在其內之缺陷有關。
當鋁層厚度變為10 Å時,絕緣層完整性變差,使部分的金屬原子形成短路的通道,降低了穿隧磁阻效應。另鋁層厚度增為30 Å時,使絕緣層的厚度變大,界面平整性變差,局部區域兩鐵磁性層的鐵磁性耦合效應增強,且界面缺陷增加,而引起自旋遷移散射作用,皆會使得磁阻比值下降。

The tunneling magnetoresistance and magnetization behavior of 【Co(200 Å)/Al(10 Å ~30 Å)OX/Ni80Fe20(200 Å)】 films with an insulator layer of AlOX has been studied in this work. The films were prepared by d.c. magnetron sputtering and the AlOX oxide layer was obtained by natural oxidation of Al in O2 atmosphere. The influence of the oxidation time and the Al layer thickness on the MR behavior of the junction has been studied.
The maximum MR ratio is 1.4﹪and 2.5﹪at room temperature and 15K, respectively, for 【Co(200 Å)/Al(20 Å)OX/Ni80Fe20(200 Å)】 films in which the 20 Å thick Al layer is oxided in O2 for 1.5 hr at room temperature. The films was measured along the easy axis of Co layer using a four probe method with a constant current. There exist a nonlinear relationship between the I and V for these junction and the MR behavior of the junction show a strong dependence of the orientation of applied current. It is thus believed that the oxide layer is not perfect, in which exist the defects, such as pin hole, as well as the remained Al metal phase. This is supported by the low resistance of ~12.3Ω of the junction.
Decreasing the Al layer thickness to 10 Å induces the formation of pin-hole or other defects in films. This again affects the MR behavior. Similarly, for the film with Al layer thickness of 30 Å, the co-existence of remained Al phase as well as the higher mean surface roughness causes the MR ratio to be lower than that for film with Al layer thickness of 20 Å.

中文摘要Ⅰ
英文摘要Ⅱ
誌 謝Ⅲ
總 目 錄Ⅳ
圖 目 錄Ⅵ
表 目 錄Ⅸ
第一章 緒論01
1.1 前言01
1.2 研究動機與目的02
第二章 理論基礎03
2.1 磁阻效應03
2.1.1 磁阻效應與材料03
2.1.2 磁阻材料的分類與演進05
2.1.3 磁阻材料之應用16
2.2 穿隧式磁阻複膜21
2.2.1 穿隧效應21
2.2.2 穿隧式磁阻複膜結構與磁阻特性22
2.3 濺鍍理論26
2.3.1物理氣相沈積26
2.3.2薄膜沈積原理28
2.3.3直流濺鍍原理29
2.3.4直流(D.C.)濺鍍33
2.3.5磁控濺射34
第三章 實驗步驟36
3.1 實驗流程36
3.2 基板之前處理37
3.3 穿隧式磁阻複膜製備38
第四章 結果與討論53
4.1 【Co(200Å)/Al(20Å)Ox/Ni80Fe20(200Å)】之磁阻特性與磁化行為53
4.2 氧化時間對磁阻特性之影響65
4.3 鋁層厚度對磁阻特性之影響73
第五章 結論74
參考文獻75

1.J. L. Simonds, “Magnetic evaluation of HTS magnetic shielding cylinders using an HTS dc-SQUID,”Physics Today , vol.4, no.2, p.26-27, April 1995.
2.S. Curtis, “Localized distribution of two-dimensional magnetic properties and magnetic domain observation,”Vacuum Solutions, vol.1, p.22-23, February 1998.
3.A.V. Pohm, J.S.T. Huang, J.M. Daughton, D.R. Krahn and V. Mehra, “Analysis of stray magnetic field at the substrate and effect of applying external magnetic field in facing targets sputtering,” IEEE Trans. Magn., vol.3, p.3117-3118, May 1988.
4.A.V. Pohm,C.C. Comstock and J.M. Daughton, “Analysis of particle alignment of magnetic powder by magneto-Cosserat theory during compaction,” IEEE Trans. Magn., vol45, no.9, p.856-859, Sep 1989.
5.J. L. Simonds, “Magnetic frustration and order in gadolinium gallium garnet,” Physics Today, vol.266, no.1, p41-48, April 1995.
6.K. M. Ranmuthu et al., “Electromechanical properties of radial active magnetic bearing,” IEEE Trans.Magn., vol.45, no.9, p.859-865. Sep 1993.
7.D. D. Tang et al., “Magnetic field effects on photosynthesis and growth of the cyanobacterium spirulina platensis,” IEEE Trans.Magn., vol.31, no.2, p.3206-3209, Sep1995.
8.Y. Zheng et al., “Solar cycle evolution of the structure of magnetic clouds in the inner heliosphere, ” IEEE Trans.Magn., vol.32, no.3, p.4237-4240, Apr 1996.
9.M. Julliere, “Tunneling between ferromagnetic films,” Phys. Lett., vol.22, no.3, p.225-p.226, Sep 1975.
10.J. Eretts ed ,“Concise Encyclopedia of Magnetic and superconducting Materials,” Pergamon Press New York 1992, vol.3, no.2, p.287-289, July 1996.
11.T. L. Hylton, K. R. Coffey, M. A. Parker, J. K. Howard, “ Design of magnetic shielding for a superconducting magnetically levitated train,”Science 261,vol.124, no.1 p.1021-1024, Sep1993.
12.N. W. Ashcroft, N. D. Mermin, Solid State Physics , New York, 1976.
13.P. L. Rossiter, The Electrical Resisivity of Metals and Alloys, Cambridge, 1987.
14.T. R. McGuire and R. I. Potter, “Aging of an Fe-Ni-Al alloy in magnetic field,” IEEE Trans. Mag., vol.61, no.12, p.1333-1336, Dec 1975.
15.T. R. McGuire and R. I. Potter, “Influence of static magnetic field on infection of Escherichia coli to HeLa cells,” IEEE Trans. Mag. MAG-11, vol.9, no.4, p242-246, Aug 1975.
16.P. Grunberg, R. Schreiber, Y. Pang, V. Walz, M. B. Brodsky and H. Sower, J., “Separation of minerals by selective magnetic fluidization,” Appl. Phys. vol.61, no.3, p.3750-3756, Oct 1987.
17.G. Binash, P. Gurngerg, F. Saurenbanch and W. Zinn, “Magnetic analysis of an overlapped cantilever beam magnetic microactuator using finite elements”, Phys. Rev. B, vol.39, no.4, p.4828-4831, Sep 1989.
18.J. J. Kerbs, P. Lubitz, A. Chaiken and G. A. Prinz, “Inductive sensor for slow varying magnetic fields”, Phys. Rev. Lett, vol.63, no.1, p.1645-1646, Jan 1989.
19.S. S. P. Parkin, N. More, K. P. Roche, “Studies of magnetic garnet using magnetic force microscope,” Phys. Rev. Lett. vol.66, no.1, p.2304-2306, Oct 1990.
20.J. Q. Xiao, J. S. Jiang and C. L. Chien, “ Magnetic configurations of rhodium,” Phys. Rev. Lett., vol.68, no.5, p.3749-3753, Sep 1992.
21.B. Dieny et. al, “Numerical analysis of bubble behavior in magnetic fluid under nonuniform magnetic field,” J. Mag. Materials, vol.136, no.25, p.335-339, Jan 1994.
22.R. M. Kuster, J. singlrton, D. A. Keen, R. McGreevy and W. Hayes, “Evaluation of polyurethane having SO3Na group as magnetic binder,” Phys. B, vol.2, no.155, p.362-364, May 1989.
23.A. Urushibara et al., “Inexpensive BH curve tester characterizes power supply magnetic materials,” Phys. Rev. B, vol.22, no.7, p14105-14109, Sep 1995.
24.R. Von Helmolt, J. Wecker, T. Lorenz and K. Samwer, “Magnetic properties of Fe-Ta-(B)-N films,” Appl. Phys. Lett, vol.28, no.5, p2093-2098, Sep 1995.
25.C. L. Canedy, K. B. Ibsen, G. Xiao, J. Z. Sun, A. Gupta and W. J. Gallagher, “Transport of carriers in magnetic brush development process of electrophotography, ”J. Appl. Phys., vol.79, no.33, p.4546-4550, May 1996.
26.Y. Tokura, Y. Tomioka, H. Kuwahawa, A. Asamitsu, Y. Moritomo and M. Kasai, “Operational envelope for magnetic refrigerators,” J. Appl. Phys., vol.35, no.23, p.5288-5292, Apr 1996.
27.P. G. Radarlli, G. Iannone, M. Marezio, H. Y. Hwang, S-W. Cheong, J. D. Jorgensen and D. N. Argyriou, “Experimental studies of MPW effect,” Phys. Rev. B, vol.7, no.7, p.8265-8270, Sep 1997.
28.M. Rubinstein, D. J. Gillespie and J. E. Snyder, “Bubble behavior in magnetic fluid under a nonuniform magnetic field,” Phys. Rev. B, vol.56, no.3, p.5412-5415, Sep 1997.
29.P. M. Tedrow and R. Meservey, “Recent research activities on magnetic separation,” Phys. Rev. Lett., vol.55, no.5, p.192-195, Oct 1971.
30.P. M. Tedrow and R. Meservey, “Principles of power frequency magnetic field management,” Phys. Rev. B, vol.7, no.5, p.318-320, Oct 1973.
31.P. Fulde, “Dynamic behavior of fusion structural components under strong magnetic fields,” Adv. Phys., vol.22, no.12, p.667-670, Sep 1973.
32.J. C. Slonezewski, “Electro-chemical magnetic field sensor,” Phys. Rev. B, v.39 no.22, p.6995-6999, Sep 1995.
33.戚貴發, “磁阻元件之應用, ” 材料與社會, 第27期, p58-56, 1989.
34.范文亮, “淺介GMR,” 工業材料, Vol.87, p94-98, 1994.
35.D. D. Tang et. al., “Introduction to magnetic helicity,” IEEE. Trans. Mag., v.31, no.23, p.2603-2607, Oct 1995.
36.A. V. Pohm, J. S. T. Hung, J. M.. Daughton, D. R. Krahn and V. Mehra, “External magnetic characterization of marine vehicles,” IEEE Trans. Magn., vol.24, no.3 ,p.3117-3120, Sep 1988.
37.A. V. Pohm, C. C. Comstock and J. M. Daughton, “Some biomedical applications of ferrofluids,” IEEE Trans. Magn., vol.25, no.14, p.4266-4270, May 1989.
38.J. L. Simonds, “ Multipole imaging of an elongated magnetic source,” Physics Today, vol.26, no.3, April 1995.
39.D. D. Tang, P. D. Wang, V. S. Speriosu, S. Le and K. K. Kung, “Study of Magneto-Cosserat theory to simulate powder behaviour during compaction,” IEEE Trans. Magn., vol.31, no.3, Sep 1995.
40.D.Mugnai,A, Ranfagni, and L.S. Schulman, World Scientific, New York,1997.
41.張嘉升,“掃瞄穿隧顯微鏡,” 儀器總覽─表面分析儀器, p26, 1998
42.E.L. Wolf, Principle of Electron Tunneling Spectroscopy, Oxford University Press, New York, 1985
43.陳啟東, 單電子電晶體, 自然科學簡訊,1997
44.M. Julliere, “Approach to saturation and magnetic properties of melt-spun Fe-Cu granular systemsm,” Phys. Lett., vol.54, no.21, p.225-230, Apr 1975.
45.J. C. Slonezewski, “Chopping of a weak magnetic field by a saturable magnetic shield,” Phys. Rev. B, vol.39, no.3, p.6995-6999, Sep 1989.
46.P. K. Wang, J. E. Events, M. G. Blamire, “Characteristics of soft magnetic thin films for magnetic head core application,” Apl. phys. Lett., vol.73, no.33, p384-389, Apr 1998.
47.X. Zhang, B. Li, W. Zhang and F. Pu, “Application of magnetic signature processing to magnetic center pinpointing in marine vehicles,” Phys. Rev. B, vol.57, no.13, p1090-1095, Oct 1998.
48.J. S. Moodera and L. R. Kinder., “E&S hysteresis model for two-dimensional magnetic properties,” J. Appl. Phys., vol.79, p.4724-4729, May 1996.
49.J. Nowak and J. Rauluszkiewicz, “Magnetization reversal in ultrashort magnetic field pulses,” J. Magn. Magn. Mater., vol.109, p.799-803, Jan 1992.
50.C. L. platt, B. Dieny, and A. E. Berkowitz, “Magnetic fractionation of magnetic fluids,” J. Appl. Phys., vol.81, no.6, p.5523-5527, Sep 1997.
51.A. M. Bratkovsky, “Geomagnetic response to magnetic clouds of different polarity,” Phys. Rev. B, vol.56, no.33, p2344-2349, Oct 1997
52.X. W. Li, A. Gupta, G. Xiao, W. Qian, and V. P. Rravis, “Itinerant-electron ferrimagnetism of transition-metal compounds,” Appl. Phys. Lett., vol.73, p3282-3286, May 1998.
53.Y. Lu et al., “Magnetic flocculation of hematite minerals,” Phys. Rev. B, vol.54, no.21, p.8349-8352, Sep 1996.
54.J. Nassar et al., “Fully integrated micromachined magnetic particle separator,” Mater. Res. Soc. Sym. Proc., vol.494, p.231-236, Oct 1997.
55.55.C. Kwon et al., “Niobium tunnel junctions with multi-layered electrodes,” Appl. Phys. Lett., vol.72, p.486-490, Sep 1998.
56.S. Zhang et al., Bullettin of the 7th Joint MMM-Intermag Conf., CE-03, 1998.
57.J. H. Hsu et al., Bullettin of the 7th Joint MMM-Intermag Conf., CP-09, 1998.
58.Y. H. Huang, J.H. Huang, J. W. Chen, and C. R. Chang, “Conductance behavior of tunneling junctions with fractal structures,” Appl. Phys. Lett., vol.72, p.2171-2175, May 1998.
59.J. G. Simmons, “Conductance behavior of tunneling junctions with fractal structures,” J. Appl. Phys., 54A, vol.225, no.31, Sep 1964.
60.B. Abeles, P. Sheng, M. D. Couts, and Y. Arie, “Double barrier spin dependent tunnel junctions with an intermediate ferromagnetic layer,” Adv. Phys., vol.24, p.407-410, Jan 1975.
61.何家驊博士,“MR多層膜的製作與測量及一些結果分析,”中華民國磁性技術協會會訊, 第十九期, p39-40, 1999.
62.S. F. Lee et. al., “ proceedings of The Croucher Advanced Study Institute:Physics and Chemistry of Nano-structured Materials,” Physica B, vol.33, no.25, p2015-2019, Jan 1999.
63.李尚凡博士, 中央研究院物理研究所, “漫談穿隧磁電阻”, 中華民國磁性技術協會會訊第十九期, 1999.
64.莊達人,VLSI 製造技術, 高立圖書有限公司, 2000.
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