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研究生:張智豪
研究生(外文):Chih-Hao Chang
論文名稱:顯微結構對奈米複層DLC磨耗性質之影響
論文名稱(外文):Influence of Microstructure on Wear Properties of Nano-composite DLC films
指導教授:汪大永汪大永引用關係薛富盛薛富盛引用關係
指導教授(外文):D.Y. WangF. S. Shieu
學位類別:碩士
校院名稱:國立中興大學
系所名稱:材料工程學研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:英文
論文頁數:126
中文關鍵詞:類鑽薄膜DLC非平衡磁控濺射UBMmultilayerwear properity
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Diamond-like carbon (DLC) films possess significant advantages in cutting and forming of non-ferrous materials. Diamond-like carbon film is characterized by its extreme hardness (1000-3000kg.mm2) and low friction coefficient (0.01-0.28 against various metals). However, further improvement in fracture toughness and interface adhesion is required for certain high demanding applications such as deep drawing and semiconductor molding. In this study, metal-doped DLC films were synthesized using unbalanced magnetron sputtering (UBMS) process with a combination of graphite and metal targets. The result is a nano-composite DLC film with interlaced metal interlayers. The cathode currents and rotation speed of substrate holder control the thickness of each interlayer. A pulsed d.c. power supply, with 20-100 kHz variable-frequency was applied to the substrates to control the substrate arcing and radical excitation during the DLC formation. The influences of deposition parameters on film qualities were investigated. Microstructure of the nano-composite DLC film was investigated by using cross-section TEM/SAD, x-ray spectroscopy, Raman and XPS. The correlation between the microstructure and the tribological properties of DLC will be analyzed.

ABSTRACT
TABLE OF CONTENTS
LIST OF FIGURES
LIST OF TABLES
Chapter 1 Introduction
Chapter 2 Literature Review
2.1 Structure of Carbon
2.2 Superlattices and multilayers
2.3 Multilayer coatings for improved performance
2.4 Sputter Deposition
2.4.1 magnetrons sputtering
2.4.2 Unbalance magnetrons sputtering
2.5. Metal-doped DLC
2.6. Design concepts for DLC-based multilayer
2.7. The development of a structure zone model for the CFUBMS system
Chapter 3 Experimental Details
3.1 Closed Field Unbalanced Magnetron Sputtering
3.2. Pre-treatment of sample
3.3. Deposition Conditions
Chapter 4 Results and discussions
4.1 Influence of titanium target current on DLC/Ti multilayer films
4.1.1. Surface morphology
4.1.2. Chemical composition and bonding
4.1.3 Mechanical Properties
4.1.3.1 Microhardness
4.1.3.2 Tribological performance
4.2 Influence of nano-composite microstructure on DLC/Ti multilayer films
4.2.1. Strengthening mechanism of nano-composition of DLC
4.2.2. Surface morphology
4.2.3. Microstructure and phase Analysis
4.2.4 Chemical composition and bonding
4.2.5. Mechanical Properties
4.2.5.1 Microhardness
4.2.5.2 Tribology properties
4.3. Influence of different substrates on sp3 bonding contents
4.3.1. Catalysis effect of metallic interlayer
4.3.2. Carbon bonding
4.3.3. How to pucker graphite into diamond
Chapter 5 Conclusions
References

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