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研究生:蔡奇陵
研究生(外文):ChiLing Tsai
論文名稱:六自由度超精密奈米定位平台研製
論文名稱(外文):Design and Performance of a Six Degree-of-freedom Nanometer Resolution Micro-Positioning Stage
指導教授:張所鋐
指導教授(外文):ShuoHung Chang
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:機械工程學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:中文
中文關鍵詞:精密定位平台六自由度奈米級解析度壓電致動器
外文關鍵詞:precision positioning stagesix degree-of-freedomnanometer resolutionpiezoelectric actuator
相關次數:
  • 被引用被引用:23
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:1
在精密工程的發展上,微小化與精密化已經成為時勢所趨,在這發展方向的要求下,微米級甚至次微米級的定位系統的需求量與日遽增。而可發展方向有:更高精度、單層結構實現更多自由度等。本文針對前述發展方向進行研究,以多自由度且達到高精度為研究目標。
壓電材料由於具有體積小、反應快、機電轉換效率高與生熱少的優點,所以被大量應用在微定位系統的致動器上。現階段在壓電驅動的定位平台的研究上主要有三個方向,一是利用摩擦滯滑的現象,另一是尺蠖蟲形式的致動方式,最後一種則是採行材料變形的方式。前兩種方式的優點在於可以達到長行程的目的,第三種的方式則是有高定位精度的優點。
本文研製出一單層六自由度微動平台,此平台之最大行程為7 μm、解析度8 nm,旋轉量為180 μrad、旋轉解析度為0.7μrad,採用撓性鉸鍊、平板彈簧及彎曲彈簧等為機構設計主體,使用壓電致動器驅動。平台之設計亦經有限元素分析,並以模擬結果決定各細部設計參數,達到行程,旋轉量最大,各旋轉軸軸心重合,以及整體之體積最小,並同時考慮加工可行性等要求之最佳設計。
完成之平台以雷射干涉儀,及個人電腦加以整合,測試其性能,包括靜態與動態性能,運動精度及共振頻率等。
Precision positioning stages were widely used in many systems. This paper focuses on the development of precision positioning stages with high accuracy and achieving multiple degrees of freedom.
Piezoelectric actuators(PZT)are popularly implied in actuators in micro-positioning systems due to it’s advantages of infinitely small, high speed, high electrical mechanical coupling efficiency and little heat generation. In general, three methods are used in development of micro-positioning systems. One is to the use of the stick-slip phenomenon, another is the inchworm type, and the third is the application of material elastic deformation. The first two can achieve long travel range, and the third one can realize high precision.
A 6-dof micro-positioning stage were designed, fabricated, and tested. The stage has 7 μm travel and 8 nm resolution, and 180 mrad rotary range and 0.7mrad resolution. Using flexure hinges, leaf springs and bending springs to design the mechanism. Taking the PZT to drive the stage. Finite element analysis method was chosen to design the 6-dof micro-positioning stage. Taking the analysis results to design the dimensions of the flexibility structures and optimizing the characteristics.
Laser interferometer and PC were combined to measure the performance of the system including the static and dynamic characteristics, resonance frequency .
中文摘要 I
英文摘要 II
目錄 III
圖例目錄 V
表格目錄 Ⅹ
第一章 前言 1-1
第二章 研究目標 2-1
第三章 系統的設計與分析3-1
3.1 基本之機構形式 3-1
3.1.1 可用機構搜 3-1
3.1.2 機構設計 3-4
3.2 機構之微型化轉換3-10
3.3 有限元素分析 3-13
3.3.1 基本結構分析 3-13
3.3.2 內機構設計與分析3-46
3.3.3 中機構設計與分析3-54
3.3.4 外機構設計與分析3-63
3.3.5 機構組合與後續加工 3-72
第四章 實驗量測與數據分析4-1
4.1 實驗設計 4-1
4.2 實驗量測 4-2
4.2.1 感測器選用以及量測系統組裝4-2
4.2.2 實驗量測結果整理 4-4
4.2.3 內構實驗結果4-4
4.2.4 中機構實驗結果4-14
4.2.5 外機構實驗結果4-21
4.2.6 三機構性能整理 4-27
4.3 實驗數據討論 4-28
第五章 結論與未來展望5-1
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