臺灣博碩士論文加值系統

氣壓致動器具有清潔、質輕、易於維護及較低成本等優點，廣泛地被應用在自動化系統、半導體及光電製程設備等。由於氣體具高可壓縮性，使得氣壓伺服系統之參數會因溫度、壓力、摩擦力、洩漏、外界干擾或工作點等因素而變化，為非線性時變系統，且存在數學模型之不確定性，使得若採用傳統控制器之氣壓伺服定位系統控制精度受限。
本文以PC-based控制器發展「氣壓－壓電混合精密定位系統」，由於壓電致動器具有質輕、體積小、響應快及高解析度等優點，故以氣壓缸進行大衝程之粗定位，且同時以壓電致動器進行小衝程之精密定位，形成一二輸入單輸出（dual-input single-output, DISO）之控制系統，以壓電致動器補償傳統氣壓伺服定位系統控制精度不足之缺點。
在本文中，控制策略採用適應性滑動模式控制理論，發展氣壓伺服位置控制器，使控制器具有自調式適應控制良好之參數變動適應性，能線上（on-line）即時調整參數，得到滑動模式控制之最佳切換平面，減緩滑動模式控制所造成之振顫（chattering）現象。而壓電致動器具有高響應之特性，因此在採用PID控制即可得令人滿意之結果。
實驗證實，適應性滑動模式控制確能減緩滑動模式控制振顫現象，使氣壓伺服定位系統同時具高強健性及適應性，提高控制精度。而結合壓電致動器，確能補償氣壓伺服定位精度不足之缺點，達到更精確之定位效果。

Pneumatic systems are extensively applied in automatic systems, semiconducting or opto-electrical equipments because of the advantages such as cleanliness, lightness and easy maintainance. The system parameters of pneumatic servo system can be changed by temperature, pressure, friction, leakage, disturbance and operation point. Therefore, pneumatic servo systems are non-linear time-varying systems with uncertainties. So that they can’t achieve precision positioning control.
In this thesis, a pneumatic-PZT hybrid positioning system is developed based on a PC-based controller. The pneumatic cylinder serves to position in coarse stroke and the PZT actuator to accurate position into fine stroke. The PZT actuator is used in this paper to compensate the pneumatic servo system’s disadvantages to achieve a high precision dual-input single-output positioning system.
The controller of the pneumatic positioning system is designed by adaptive variable structure control theorem. This control strategy combines self-tuning control with variable structure control. Hence, the system’s parameters can be adjusted on-line to get an optimal switching surface, which can reduce the chattering phenomenon of the traditional variable structure control system. The PZT actuator has the ability of high-response, so a PID position controller is used.
The developed control strategies are implemented in the pneumatic-PZT hybrid positioning system experimentally. The test results show that the positioning accuracy can be improved to which is impossible to be achieve with the traditional pneumatic servo system.

第一章緒論1
1.1 研究動機1
1.2 文獻回顧3
1.2.1 氣壓系統之回顧3
1.2.2 壓電致動器之回顧4
1.2.3 控制理論之回顧4
1.3 本文架構6
第二章氣壓－壓電精密定位實驗模組之架構與建立8
2.1 氣壓伺服系統8
2.2PZT壓電致動器9
2.2.1PZT壓電材料之簡介9
2.2.2PZT壓電致動器之優缺點12
2.2.3PZT壓電致動器之磁滯與蠕動現象13
2.3 氣壓－壓電精密定位系統15
2.4 實驗設備16
2.5 伺服氣壓缸系統之數學模式19
2.5.1 氣壓伺服閥19
2.5.2 流經閥之質量流率計算19
2.5.3 氣壓缸充氣及排氣程序21
2.5.4 負載動態23
2.5.5 氣壓系統之線性化分析24
2.5.6 氣壓伺服系統之開迴路轉移函數26
第三章控制理論28
3.1 可變結構控制理論28
3.1.1 切換函數的設計31
3.1.2 可變結構控制器的設計33
3.2 適應控制理論35
3.2.1 系統數學模式表示法36
3.2.2 最小平方參數估測法37
3.2.3 遞迴最小平方參數估測法38
3.3 適應性滑動模式控制理論41
第四章控制器設計44
4.1 系統鑑定44
4.2 控制器之設計與分析50
4.2.1 可變結構控制器之設計50
4.2.2 適應律之設計52
第五章氣壓－壓電精密定位系統實驗54
5-1 氣壓伺服定位54
5.1.1 可變結構控制實驗結果54
5.1.2 適應性可變結構控制實驗結果62
5.2 壓電精密定位67
5.3 氣壓－壓電精密定位68
5.4 綜合比較72
第六章結論與建議76
參考文獻78

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