臺灣博碩士論文加值系統

本論文主要為研究以聚碳矽烷作為原料來製造奈米碳管的過程，有別於一般的氣相反應生成奈米碳管所選用的材料，本實驗所選用的材料為半有機高分子；聚碳矽烷在熱分解的過程中大部分會形成碳化矽（SiC）且會形成碳的析出，同時會產生甲烷（CH4）及氫氣（H2）；並且此材料可在常溫下溶於有機溶劑內，使製程簡化。本實驗即是利用在熱反應中析出的碳及甲烷（CH4）當作碳源，在經由觸媒的作用而形成奈米碳管。
根據實驗結果在700℃∼1100℃的熱分解反應區間內可以形成奈米碳管，同時針對所形成的奈米碳管作分析，發現以此方式所形成的碳管為多層管壁的結構（Multi- Walled Nanotubes）並且具有良好的場發射性質。
綜合本實驗結果可以提供未來製造奈米碳管的另一種研究基礎，以提供製程簡單、低溫、低成本的製造奈米碳管的方式，也可作為往後改進奈米碳管製程參考。

中文摘要………………………………….……………………………Ⅰ
英文摘要………………………………….……………………………Ⅱ
誌謝……………………………………….……………………………Ⅲ
目錄……………………………………….…………………………….Ⅳ
表索引………………………………….….……………………………Ⅷ
圖索引…………………………………………………………………..Ⅸ
第一章前言……………………………………..……………………. 1
第二章文獻回顧………………………………….………………….. 4
2-1 奈米碳管的結構……………………….………………. 4
2-2奈米碳管的機械性質及導電性質……………………. 5
2-3奈米碳管的製造方法…………………………………. 5
2-3-1 電弧放電法…………………………..………… 9
2-3-2 雷射氣化法…………………………………….. 9
2-3-3 化學氣相沉積法……………………………… 10
2-3-4 電將輔助化學氣相沉積法…..……………….. 10
2-3-5 固相反應製程奈米碳管…………...…………. 13
2-4 奈米碳管的成長模型………………..…………….. 15
Ⅳ
2-5 聚碳矽烷熱分解形成碳化矽過程………………...19
2-5-1 真空氣氛下熱分解反應………………………..19
2-5-2 聚碳矽烷於氫氣氣氛下熱分解反應..……….. 25
2-6 冷陰極場發射基本原理………………………….27第三章 實驗步驟及方法……………………………………………..36
3-1 實驗流程圖………………………………………….. 36
3-2 實驗儀器原理及基本構造 ………………………….37
3-2-1 旋轉塗佈機 …………………………………... 37
3-2-2 高溫真空熱反應爐……………………..…….. 37
3-2-3 場發射量測…………………………………….37
3-2-4 真空濺鍍機 ………………………………….. 40
3-2-5 穿透式電子掃描顯微鏡……………………… 40
3-2-6 掃描式電子顯微鏡…………………………… 40
3-2-7 實驗步驟……………………………………… 40
第四章 實驗結果與討論
4-1 奈米碳管影像及其電子繞射圖形分析……………. 46
4-1-1純L-Type PCS在1000℃下熱分解反應之影像及繞射圖譜分析………………………………….46
Ⅴ
4-1-2 1100℃反應溫度下影像及繞射圖譜分析…… 46
4-1-3 1000℃反應溫度下影像及繞射圖譜分析…… 51
4-1-4 900℃反應溫度下影像及繞射圖譜分析………54
4-1-5 800℃反應溫度下影像及繞射圖譜分析………59
4-1-6 700℃反應溫度下影像及繞射圖譜分析………62
4-1-7 800℃反應溫度下表面濺鍍觸媒之效應………67
4-1-8奈米碳管的微結構分析……………………… 70
4-2 掃描式電子顯微鏡（SEM）表面型態分析……… 70
4-2-1 L-Type PCS與Fe觸媒混合熱分解後的表面型分析……………………………………………..70
4-2-2 A-Type PCS與Fe觸媒混合熱分解後的表面型分析……………………………………………..73
4-2-3觸媒位於PCS薄膜表面熱分解後的表面分析.56
4-3 場發射性質之量測….………………………………..76
4-3-1場發射電流及電壓的相對應關係……………...80
4-3-2場發射電場加強因子β的分析 ……………… 83
4-3-1 Turn On 電壓的分析…………………………88
4-4 討論…………………………………………………...92
Ⅵ
4-4-1氣相成長的奈米碳管…………………………92
4-4-2固相成長的奈米碳管…………………………94
4-4-3 奈米碳管的結構……………………………….96
4-4-4觸媒粒徑對奈米碳管管徑之影響………………… 96
4-4-5觸媒粒徑對場發射電場加強因子β之影響……… 96
4-4-6溫度對對場發射電場加強因子β之影響………… 96
第五章 結論………………………………………………………..98
第七章 參考文獻…………………………………………………..99

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