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研究生:簡士哲
研究生(外文):Shih-Che Chien
論文名稱:硼碳氮薄膜之成長及機械特性之研究
論文名稱(外文):Growth and mechanical properties of BCN thin films
指導教授:林舜天林舜天引用關係陳貴賢陳貴賢引用關係林麗瓊林麗瓊引用關係
學位類別:碩士
校院名稱:國立臺灣科技大學
系所名稱:機械工程系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:英文
論文頁數:57
中文關鍵詞:硼碳氮濺鍍微硬度壓痕儀非晶質薄膜
外文關鍵詞:BCNsputteringnanoindentationamorphousthin film
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本論文主要研究硼碳氮薄膜(BCN thin film)之成長機制及其機械特性。我們使用雙槍磁控濺鍍系統(dual-gun magnetron sputtering);氮化硼靶(h-BN target)及石墨靶(graphite target)分別使用射頻(radio frequency)濺鍍及直流濺鍍,通入氬氣(Argon),成長硼碳氮薄膜於矽基板上。
利用掃瞄式電子顯微鏡(SEM)及原子力顯微鏡(AFM)來觀察硼碳氮薄膜之表面形貌及測量表面粗糙度。從SEM的影像可發現,氮化硼薄膜(BN film)因碳(carbon)的加入,可明顯改善與矽基板之間的附著問題。硼碳氮薄膜之成分則使用X光光電子能譜儀(XPS)and歐傑電子能譜儀(AES)來做定性與定量分析。我們可藉由調整RF及DC的功率而得到不同成分比的硼碳氮薄膜。
傅立葉轉換紅外線光譜儀(FT-IR)及X光光電子能譜儀(XPS)則用來分析硼碳氮薄膜之鍵結情況,我們可發現B-N、B-C、B-O、C-C及C≣N等鍵混和鍵結於硼碳氮薄膜之中,且在低溫時易形成B-C鍵。穿透式電子顯微鏡(TEM)則用來觀察硼碳氮薄膜之微觀結構,顯示所成長出之硼碳氮薄膜為非晶相(amorphous),且無相分離(phase separation)成氮化硼或石墨之現象。另外,在碳含量較高時,硼碳氮薄膜為均勻之非晶相;而在碳含量較低時,則發現有短程有序、fullerene-like之結構。
硼碳氮薄膜機械性質之測量則使用微硬度壓痕儀(nanoindentation)。本研究中,我們預測硼碳氮薄膜之硬度值介於5-13 GPa,彈性係數則介於72-155 GPa。而當碳含量為25-35 at. %時,硼碳氮薄膜具有最佳之機械性質。藉由XPS的分析,可發現B-C鍵的形成有助於提昇硼碳氮薄膜之機械性質。
Boron carbon nitride (BCN) thin films were deposited on Si (100) substrates by dual-gun magnetron sputtering from graphite and h-BN targets in Ar ambient gas of a constant of 3.5 mTorr. Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) were used to determine the morphology of the films and calculate the surface roughness. It was found that the incorporation of carbon atoms in boron nitride films is effective to improve the adhesion between BCN films and Si substrates.
X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES) analysis were performed to determine the composition of the films. The films with different carbon contents were obtained by varying RF (radio frequency, 13.65 MHz) power from the h-BN target and DC power from the graphite target.
Fourier Transform Infrared Spectroscopy (FTIR) and X-ray Photoelectron Spectroscopy (XPS) studies were used to investigate the bonding states of BCN films. It was observed that B-N, B-C ,B-O ,C-C and C≣N bonds were hybrid in BCN films, and B-C bond is easy formed at low temperatures.
Microstructure of BCN films was characterized by Transmission Electron Microscopy (TEM). The ternary compound films within the B-C-N composition triangle possessed a less ordered structure, and no phase separation of graphite and h-BN occurred. At high carbon content, BCN film was of uniform amorphous structure; but at low carbon content, the film has short-range order (fullerene-like) structure.
Nanoindentation was employed for mechanical properties of BCN films. Hardness and elastic modulus of the BCN films were estimated 5-13 GPa and 72-155 GPa, respectively, and optimized condition in this study is at carbon content range from 25-35 at. %. The formation of B-C bond may make a contribution to the higher hardness and elastic modulus.
Chapter 1. Introduction………………………………………………………………..1
1.1.Superhard materials……………………………………………………1
1.2.Limitation of diamond and cubic boron nitride ……………………….3
1.3.BCN compounds and BC2N …………………………………………..4
1.4.Synthesis approach………………………………………………….…5
1.5.Motivation of this thesis……………………………………………….7
Chapter 2. Experimental……………………………………………………………….9
2.1.Film deposition………………………………………………………...9
2.1.1.Dual-gun magnetron sputtering system…………………………..9
2.1.2.Experimental processes and design …………………………….11
2.2.Film characteristic analysis …………………………………………12
2.2.1.Scanning Electron Microscopy (SEM)………………………….12
2.2.2.Atomic Force Microscopy (AFM)………………………...……12
2.2.3.Auger Electron Spectroscopy (AES)……………………………13
2.2.4.X-ray Photoelectron Spectroscopy (XPS)………………………13
2.2.5.Fourier-Transform Infra-Red (FTIR) spectrometer……………..13
2.2.6.High-Resolution Transmission Electron Microscopy (HR-TEM).
2.2.6.1.CM 200…………………………………………………….14
2.2.6.2.JEOL-4000EX……………………………………………14
2.2.7.Nano-Indentation Spectroscopy (NIS)………………………….15
2.2.7.1.Correlation between the tip shape and the mechanical properties……………………………………………..17
2.2.8.X-ray Reflection (XRR) ………………………………………18
2.2.9.Ellipsometry…………………………………………………….19
Chapter 3. Results and Discussion…………………………………………………..20
3.1.Surface morphology…………………………………………………20
3.1.1.SEM (Scanning Electron Microscopy)…………………………20
3.1.2.AFM (Atomic Force Microscopy)……………………………...22
3.2.Composition and bonding……………………………………………25
3.2.1.AES (Auger Electron Spectra)………………………………….25
3.2.2.XPS……………………………………………………………..29
3.2.3.FT-IR spectroscopy……………………………………………..34
3.3.Microstructure….…………………………………………………….36
3.3.1.TEM…………………………………………………………….36
3.4.Mechanical properties of the BCN films…………………………….38
3.4.1.Deposition temperature effect…………………………………..38
3.4.2.Composition effect……………………………………………...40
Chapter4. Conclusions……………………………………………………………….44
Reference…………………………………………………………………………….47
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