針對傳統雷射干涉儀之光學上缺失，本研究將設計一真直度干涉儀及角度量測干涉儀。
真直度干涉儀其設計包含一真直度干涉器及一真直度反射器。真直度干涉器為一Wollaston菱鏡及一角柱菱鏡(Corner Cube Prism)之組合，而真直度反射器為兩個直角菱鏡(Right-angle Prism)之組合。本真直度干涉儀之優點為:靈敏度為傳統干涉儀之兩倍，真直度干涉器與反射器搭配不嚴苛，且安裝調校容易。
角度量測干涉儀可用以量測傳統干涉儀無法量測之Roll角偏移量，它包含一角度干涉器及一角度反射器，角度干涉器其設計為一Wollaston菱鏡及一角柱菱鏡(Corner Cube Prism)之組合，而角度反射器設計為一角柱菱鏡(Corner Cube Prism)及一楔形菱鏡(Wedge Prism)之組合。
我們分別對此兩種設計進行一理論推演，並分別以實驗驗證理論推算之正確性。最後並將此二干涉儀架在位移平台上量測，證實它們確實可被用以量測真直度及Roll角偏移量。

A newly designed straightness interferometer and a novel angular interferometer are proposed to overcome the disadvantages of the traditional interferometers in this thesis.
The straightness interferometer is composed of a straightness interferometric assembly and straightness reflection assembly. The previous one comprises a Wollaston prism and corner cube prism, and the later one comprises two right-angle prisms. The advantages of this interferometer are : higher sensitivity, the compatibility between the two assemblies is not critical, and the alignment for setting the interferometer is easier.
The angular interferometer is capable of roll measurements that a traditional one can not do. It is composed of an angular interferometric assembly and angular reflection assembly. The previous one comprises a Wollaston prism and corner cube prism, and the later one comprises a corner cube prism and wedge prism.
We perform the theoretical derivations individually in accordance with the improvement designs and verify the theoretical derivations are correct through experiments. These interferometers were also adopted for the measurements of straightness and roll displacement of a translation stage. The results degree the applicability of these two interferometers.

摘要 iii
Abstract iv
誌謝 v
目次 vi
圖目錄 viii
第一章 緒論 1
1-1 研究背景及目的 1
1-2文獻顧 2
1-2-1 角度量測方法 2
1-2-2 真直度量測方法 4
1-2-3 目前量測方法的缺失 6
1-2-4 本論文方向 6
第二章 真直度雷射干涉儀設計及原理 25
2-1 光學設計 25
2-2 原理說明 26
第三章 角度雷射干涉儀設計及原理 30
3-1 光學設計 30
3-2 原理說明 31
第四章 實驗與結果 35
4-1 真直度干涉儀實驗與結果 35
4-2 角度干涉儀實驗與結果 38
第五章 討論與結論 49
5-1 真直度干涉儀討論與結論 49
5-2 角度干涉儀討論與結論 50
參考文獻 51
作者簡介 54

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