臺灣博碩士論文加值系統

在製造設備中，為了能夠預期任何機台即將發生的故障並能夠歸納其原因，預知性維護的策略就顯得格外重要；以半導體設備為例，其目標即在於預測機台設備的狀態特性，避免錯誤製程的發生，並能夠即時提供診斷及諮詢的功能，作為維修與預防維護之依據，以維持設備整體效能。
為了實現這個策略，本研究利用多體機械系統動態模擬軟體ADAMS，以虛擬原型的方式來建構一個能夠產生故障預知模式的虛擬設備平台，透過這些虛擬設備產生可預期的故障徵兆。其主要目的即在於對真實的機台設備建立一個預知的故障模式，並且對於這些故障進行診斷推理，找出問題的所在。建構虛擬設備的好處即在於預先產生參數型的故障，而不必刻意在實際的機台上製造破壞性故障，並將故障的特徵與原因的關係明確化，使故障容易被辨識，以期能夠減少設備在運轉期間所產生的問題。本研究並且以轉子系統、齒輪對與晶片置放對準機為載具，驗證所建構虛擬設備診斷平台的可行性，以及建立故障重建模擬器來重現故障發生時的狀況。

In order to predict a potential fault that might be about to occur, and to understand what causes the fault of manufacturing equipment, the strategy of predictive maintenance is very important. Taking semi-conductor equipment as an example, for the purpose of sustaining the overall performance, the strategy should be aimed to instantly provide the conditions of equipment in order to prevent any errors during the manufacturing process, and to immediately provide the related information and diagnosis as the guidelines for regular maintenance as well as preventive maintenance.
To realize the strategy as mentioned, this paper applies the well-known dynamic simulation software-ADAMS to develop a virtual equipment platform to generate fault warning-mode through virtual prototyping instruments. This virtual equipment platform can generate predictable fault symptoms. Therefore, the main purpose of this virtual equipment is to develop a predictable fault mode for the real machine, and then to proceed diagnosis reasoning in order to determine what causes failure. The advantage of developing virtual equipment is to generate parametric faults instead of intentionally making destructive faults in the real machines. It leads to clearly relate the causes and the characteristics of faults. Therefore, it becomes very easy to identify the faults. In other words, the main purpose of this study is to apply CAE to assist the fault diagnosis in order to reduce the maintenance problems for the equipments in operating. This study has also taken a rotor system, spur gear pair and a die-attaching machine as examples to verify the feasibility of this virtual-equipment diagnosis platform, and establish a fault reconstruction simulator to simulate the condition when a fault occurs.

中文摘要....................iii
英文摘要.................... iv
誌謝..........................v
目次.........................vi
表目錄.....................viii
圖目錄.......................ix
第一章 緒論.......................1
1.1 研究動機與目的.............1
1.2 文獻探討...................2
1.3 研究方向與目標.............3
1.4 論文架構...................6
第二章 診斷設計與故障模式.........7
2.1 以診斷為基礎的設計原則.....7
2.1.1 機構................7
2.1.2 控制元件............8
2.1.3 動力源..............9
2.2 故障模式與發展過程.........9
2.2.1 故障模式............9
2.2.2 故障的發展過程......10
2.3 故障預知模式...............11
2.3.1 定義................11
2.3.2 內容................12
第三章 虛擬原型與診斷原理........15
3.1 虛擬原型技術...............15
3.1.1 簡介................15
3.1.2 多體動力學的分析理論16
3.2 動態系統的診斷.............17
3.3 診斷程序的建立.............21
3.4 故障樹分析方法簡介.........23
第四章 徵兆模式設計..............27
4.1 旋轉機械...................27
4.1.1 旋轉機械的故障原理..27
4.1.2 徵兆的設計方法......29
4.1.3 模擬設定與分析結果..31
4.1.4 故障的評定標準......35
4.2 齒輪對.....................33
4.2.1 振動原理.............39
4.2.2 齒輪對的建構與嚙合剛性設計..41
4.2.3 振動訊號的調變.......44
4.3 晶片置放對準機.............46
4.3.1 動作原理.............46
4.3.2 模型建構.............47
4.3.3 徵兆模式.............49
4.3.4 元件剛性的徵兆模式...54
4.4徵兆模式的設計與應用........60
第五章 故障重現的建立............63
5.1 故障重現...................63
5.2 故障重建模擬器的建立.......65
第六章 結論......................71
6.1 研究結論...................71
6.2 後續研究建議...............72
參考文獻 ......................73
作者簡介.......................75

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