臺灣博碩士論文加值系統

隨著半導體工業的蓬勃發展，無振動高精密定位勢必成為工業製程上重要的一環。本論文中，作者基於磁浮乾淨無磨擦之特性設計並建造了一套由四個控制懸浮力之軌道與一個懸浮平台組成之斥力型磁浮控制系統，軌道係由永久磁鐵與電磁鐵所構成，其中永久磁鐵主要用來產生所需之斥力；電磁鐵用於控制整個磁浮系統之穩定。
控制系統方面，我們提出一以PID控制器為主軸架構，結合灰色預測與模糊系統之整合性控制系統。由模擬結果中證明了本控制系統設計之效能與可行性。
於實驗結果中，提出之控制架構可穩定控制在本磁浮系統上，其確實優於其他傳統控制方式。

In the recent year, to keep on advance of the industrial technologies, high-precision positioning without any vibration becomes the most important technology in the manufacturing process, especially semiconductor industry. In this thesis, to achieve these objectives, we have designed and implemented a magnetically levitated system that has the properties of cleanness and frictionless. It is a repulsive maglev system with four active tracks and a passive carrier. In active tracks, the major levitation forces are exerted by permanent magnets, whereas the minor stabilizing forces are exerted by electromagnets.
In control system, we have proposed a grey PID with universal fuzzy step-size control algorithm composed of PID, grey prediction, and fuzzy system for the control processes. From several simulation results, the performance exhibited to demonstrate the feasibility and effectiveness of our proposed.
From experimental results, our proposed approach can stabilize the magnetic levitation system with better response than any other conventional controllers.

ABSTRACT IN CHINESEiii
ABSTRACT IN ENGLISHiv
ACKNOWLEDGMENTSv
TABLE OF CONTENTSvi
LIST OF TABLESix
LIST OF FIGURESx
Chapter 1 INTRODUCTION1
1.1 Motivation1
1.2 Survey of Maglev System3
1.2.1 Type 1: Repulsive maglev with DC electromagnet4
1.2.2 Type 2: Repulsive maglev with permanent magnet5
1.2.3 Type 3: Attractive maglev with DC electromagnet6
1.2.4 Type 4: Attractive maglev with hybrid magnet7
1.2.5 Type 5: Attractive maglev with AC electromagnet8
1.3 Survey of Control Technology9
1.4 Thesis Overview10
Chapter 2 FUNDAMENTAL ISSUES11
2.1 Basic Knowledge of Magnetism11
2.1.1 Magnetic field from a current-carrying conductor11
2.1.2 Fundamental properties of permanent magnets12
2.1.3 Torque and force from a current-carrying conductor15
2.2 Congenital Unstableness of Maglev16
Chapter 3 IMPLEMENTATION OF MAGLEV SYSTEM19
3.1 Design Concepts19
3.1.1 Repulsive or attractive levitation19
3.1.2 Active track and passive carrier20
3.1.3 Four-track concept21
3.1.4 Oblong Coil Concept22
3.2 Mechanical System Design25
3.2.1 Platform Design25
3.2.2 Levitation Track Design26
3.2.3 Stabilization Track Design28
3.2.4 Mechanical System Overview30
3.3 Electrical System Design31
3.3.1 Sensor System32
3.3.2 A/D Converter33
3.3.3 Driver34
3.3.4 Controller35
3.4 Overview of The Maglev System36
Chapter 4 CONTROL SYSTEM DESIGN38
4.1 The Dynamics of Platform38
4.2 PID Controller45
4.2.1 Ziegler-Nichols Tuning Algorithm45
4.3 Grey Prediction49
4.4 Fuzzy Step-Size52
4.4.1 Fuzzifier52
4.4.2 Inference System54
4.4.3 Defuzzifier56
4.5 Universal Fuzzy Step-Size57
4.6 Grey Prediction Controller Design58
Chapter 5 SIMULATION AND EXPERIMENTAL RESULTS60
5.1 Simulation Results60
5.2 Experimental Results77
Chapter 6 CONCLUSIONS AND FUTURE RESEARCH81
6.1 Conclusions81
6.2 Future Researches82
REFERENCES84
VITA90

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