|
[1] M. Madou, Fundamantals of Microfabrication, CRC Press, (1997). [2] R.M. Langdon, “Resonator sensors — a review,” J. Phys. E: Sci. Instrum., vol.18 pp.103-115, (1985). [3] X. Zhang and W.C. Tang, “Viscous Air Damping in Laterally Driven Microresonators,” Proc. IEEE Workshop on Microelectromechanical Systems, pp.199-204, (1994). [4] W.S. Griffin, et al., “A study of fluid squeeze-film damping”, Journal of Basic Engeering, Transaction of ASME, June,, pp.452-456, (1966). [5] Y.H. Cho, B.M. Kwak, A.P. Pisano and R.T. Howe, ”Viscous Energy Dissipation in Laterally Oscillating Planar Microstructures: A Theoretical and Experimental Study,” Proc. IEEE Workshop on Microelectromechanical Systems, pp.93-98, (1993). [6] 楊龍杰,李其源,張培仁, “半導體微型加速度計梳狀結構之流場阻尼分析”, 國科會研究報告,計畫編號NSC87-2218-E-002-015. [7] 楊龍杰, 半導體微型加速度計及其相關技術之研究, 國立台灣大學應用力學研究所博士論文, 中華民國八十六年元月. [8] H. S. Carslaw and J. C. Jaeger, Conduction of heat in solids, Clarendon Press, Oxford, (1959). [9] M.Necati Ozisik, Heat conduction, Wiley, New York, (1980). [10] E.A. James, Gas Dynamics, 2nd Edition, Allyn and Bacon, Boston, (1933). [11] Robert W. Fox and Alan T. McDonald, Introduction to Fluid Mechanics, 4th Edition, John Wiley & Sons, Inc., New York, pp.306-310, (1994).
|