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研究生:江昌達
研究生(外文):Chang D. Kiang
論文名稱:高濃度半導體廢水之處理與回收
論文名稱(外文):Treatment of High Strength Wastewater from Semiconductor Fabrication for Reuse
指導教授:林勝雄林勝雄引用關係
指導教授(外文):Shang H. Lin
學位類別:碩士
校院名稱:元智大學
系所名稱:化學工程研究所
學門:工程學門
學類:化學工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:中文
中文關鍵詞:異丙醇揮發性氣體氣提法芬頓法回分法臭氧
外文關鍵詞:isopropyl alcoholVOCAir strippingFentonSequencing Batch Reactorozonation
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本研究就是針對高濃度半導體廢水探討以結合氣提法(Air stripping)、modified Fenton法、化學混凝法、回分法(Sequencing Batch Reactor, SBR)及臭氧氧化等處理程序進行廢水回收異丙醇再利用及後續處理。
在氣提法部分是以批次填充塔對氣提時間、氣提溫度、空氣流量等變因進行實驗。在加入拉西環後氣提效果增加。在同溫下,空氣流速愈高,氣提效果愈好,但如果空氣流速太高其後續氣體回收處理上較為困難。
Fenton法主要是以水樣之起始pH值、過氧化氫加藥量、亞鐵加藥量、過氧化氫/亞鐵比例、溫度、及稀釋倍數來探討Fenton法對半導體異丙醇廢水中難分解有機物之氧化破壞及脫色的效果。
化學混凝處理階段以瓶杯實驗進行,探討混凝pH值、PAC藥量及Polymer藥量的影響,實驗結果以濁度及ADMI為判斷處理效果的主要指標。
在臭氧氧化處理方面是將經Fenton處理後的水樣(包括化學混凝)導入臭氧氧化反應器,在此一處理程序中活性碳纖維與臭氧共同處理廢水時,活性碳纖維並未發揮其功用,所以只有改變不同臭氧通量、空氣流速、pH值等變因,探討臭氧氧化對水中難分解有機物破壞之效果;在理論方面,指數、通式反應動力學模式皆可適切模擬水中難分解有機物之去除速率。
回分法實驗是將經過Fenton法的水樣混合統一食品廠廢水(比例1:4),以回分法處理,其排放水呈現透明無色(ADMI值<15);COD可降至現行排放標準以下(<100ppm)。在理論方面,藉由Eckenfelder所提出的完全混和動力學模式(Completely Mixed Kinetics Model),可得知廢水生化反應速率常數K與不可生物降解物質濃度之間的關係。本研究針對難以處理之高濃度半導體廢水提供了一可行的途徑。
The present study is to investigate treatment of semiconductor wastewater by combination of various physical, chemical and biological methods, including air stripping, Fenton oxidation, chemical coagulation, ozonation and sequencing batch reactor (SBR) method .Treatment by the combined methods was found to be very effective. The recovered isopropyl alcohol (IPA) from the air stripping step could be readily recycled to the process for reuse. The water quality of the final treated wastewater was of sufficient high standard for reuse for general purpose.
Treatment experiment using air stripping were conducted in batch packed bed column to investigate the effects of operating variables, like the temperature, airflow rate, and stripping time on the IPA removal efficiency. The IPA stripping efficiency was found to significantly improved by the Raschig ring packing .An operating temperature at 70oC and air flow rate at 1 l/min were highly beneficial to the IPA removal and were recommended.
In the Fenton oxidation, emphases were placed on determining the initial pH, amounts of H2O2 and FeSO4, FeSO4/H2O2 ratio, temperature and mixing ratio for better system performances. Experimental tests were conducted to identify the optimum operating conditions in terms of removal of chemical oxygen demand (COD) and color. Chemical coagulation was found to be necessary to complement the Fenton oxidation. With chemical coagulation, the sludge settlement after Fenton oxidation could be drastically reduced to much less than 30 min. The operating conditions for chemical coagulation including the pH and amounts of polyaluminum chloride (PAC) and polymer were experimentally obtained for best results of ADMI and NTU reduction.
After Fenton oxidation, the wastewater was treated by gas-induced ozonation to further lower the residual COD concentration with an aim to elevating the water quality to the reuse standard. Data of catalytic ozonation test runs were used to determine the kinetic model of the oxidation process. Models considered in the present study included first-order and generalized kinetic models. The models parameters were established by best fit of these models to the observed data.
Finally, sequencing batch reactor (SBR) method was considered as an alternative for polishing the wastewater. Various SBR test runs showed that the SBR method was able to lower the final wastewater COD to below 100 mg/l and ADMI below 15. The Eckenfelder kinetics of completely mixed type was adopted to model the biological reaction of the SBR process and the parameters of the model were empirically identified.
目錄
中文摘要.……………………………………………...I
ABSTRACT..…………………………………………...II
目錄.……………………..IV
表目錄.……………………………………………... VII
圖目錄.……………………………………………...VIII
第一章 緒論.………………………………………...1
1.1前言1
1.2半導體製程簡介1
1.2.1乾燥技術之介紹3
1.3 高濃度半導體廢水回收處理及流程簡介8
1.4 一般常見含VOC廢氣之處理方法10
1.5 文獻回顧14
第二章 基本理論.………………………………………...16
2.1氣提法16
2.1.1氣提塔之介紹16
2.2.2填充塔之填充物之主要條件及特性16
2.2 Fenton 法氧化之化學反應理論19
2.2.1 Fenton處理法原理19
2.3 Fenton法氧化動力學20
2.3.1指數動力學模式20
2.3.2通式動力學模式22
2.4化學混凝法之介紹24
2.5回分法介紹25
2.5.1回分活性污泥法25
2.5.2回分法之操作26
2.5.3完全混合動力學模式29
2.6 臭氧介紹32
2.6.1 臭氧對有機物的氧化反應32
2.6.2 活性碳簡介34
第三章 實驗裝置及分析方法.…………………………...35
3.1實驗裝置35
3.1.1氣提填充塔35
3.1.2Fenton氧化反應器35
3.1.3杯瓶試驗部分38
3.1.3臭氧氧化反應器38
3.1.4 回分法反應器43
3.2實驗流程及步驟44
3.2.1氣提法44
3.2.2 Fenton法45
3.2.3 臭氧氧化反應47
3.2.4 回分法處理48
3.3分析方法及設備50
3.3.1異丙醇之濃度分析50
3.3.2過氧化氫的氧化特性及濃度分析51
3.3.3臭氧濃度分析53
3.3.4水質分析53
3.3.5分析設備54
3.4藥品55
第四章 結果與討論.……………………….60
4.1氣提脫附實驗60
4.2Fenton法氧化實驗結果64
4.3Fenton氧化動力學討論81
4.3.1 一階指數反應動力學81
4.3.2 通式反應動力學98
4.4 化學混凝法之處理效果108
4.5 回分法之最佳操作條件測試…………………………………..……...110
4.5.1 pH對處理效果之影響110
4.5.2 處理時間對效果之影響………………………………………..111
4.5.3 混合比對處理效果之影響……………………………………..114
4.5.4回分式活性污泥之多批次處理測試.…………………………..116
4.6 生物動力學模式…………………………………….…………………118
第五章 臭氧氧化處理結果與討論………...…………...120
5.1.1活性碳纖維…………………………………………………….120
5.1.2臭氧進料濃度………………………………………………….120
5.1.3不同值之廢水………………………………………………….123
5.1.4臭氧進料流速………………………………………………… 126
5.2動力學討論……………...……………………………………..……...128
5.2.1 一階指數反應動力學………………………………………….128
5.2.2 通式反應動力學……………………………………………….134
第六章結論與建議…………………………………..…..141
參考文獻……………………………………………..…..142
附錄……………………………………………..……….146
作者簡歷……………………………………..………….150
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