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研究生:鄭維揚
研究生(外文):Wei-yang Cheng
論文名稱:系統工程於半導體製程問題之改善與應用
論文名稱(外文):The application of system engineering to process improvement in the semiconductor
指導教授:李穎李穎引用關係
指導教授(外文):Ying Li
學位類別:碩士
校院名稱:元智大學
系所名稱:電機工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2001
畢業學年度:89
語文別:中文
論文頁數:37
中文關鍵詞:系統工程半導體網路管理系統倫理
外文關鍵詞:System EngineeringSemiconductorK.T. analysisS.P.C
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系統工程目的在整合系統中的不同單位和個人,以達成系統的共同目標。系統工程可應用在各種領域,其專業和知識技術固然重要,但觀念才是系統工程成功的基礎。就目前的各大企業來說,對於解決問題仍多注重在「技術手法」上,而系統工程中的要素,也是解決問題的關鍵-「介面溝通」,則往往是各企業內部發展的一個重大的阻礙。本論文就「介面溝通」的重要,對傳統「完全責任劃分法」所引發的部門與部門間之問題,以結合簡單的網路架構與K.T.分析法,提出新的介面溝通模式,打開部門間的隔閡,得到各種解決問題的資源,並就實際上得到的成果加以探討。
The goal of systems engineering is to integrate the different individuals and departments in a system so that the system''s mission can be successfully accomplished. Systems engineering can be applied to systems in many areas, it has five basic procedures : ?feasibility study, standard, interface, design, evaluation, action?. Although the theory and techniques are very important, ?concept? is the key to the success of systems engineering. However, concept can only be built with sufficient communications and mutual respect between all members of the system. Most companies today focus on specialized step-by-step techniques in problem solving. The important task of establishing a good ?interface?, which allow the system?s members to communicate effectively, is often neglected. This leads to obstacles especially for growing companies. Understanding the importance of ?interface?, this thesis proposes to modify the daily K. T. Analysis charts for solving light resist thickness problem in TSMC, Tainan to invite comments and suggestions, and put the charts on the company?s computer networks to allow for open discussions. This flexible interface allows company members to access information any time, anywhere, and has proved to be very effective in speeding up the problem solving process.
第一章 緒論1
1.1 研究動機:1
1.2 研究成果:2
1.3 各章摘要2
第二章 系統工程與系統倫理:4
2.1 基本架構4
2.2 五大步驟4
2.3 系統倫理觀念的建立7
2.4 人本管理7
2.5 魚骨圖8
2.6 K.T. analysis rule9
2.7 SPC(Statistical Process Control)11
2.8 Cp&Cpk12
第三章. 半導體製程簡介16
3.1 IC 製程簡介16
3.2 PHOTO 製程簡介16
3.3 機台流程簡介18
第四章.系統工程與系統倫理在半導體製程的實際應用
-光阻厚度的改善計劃19
4.1 問題的發現19
4.2 問題的解決21
4.3 成果與討論27
第五章. 結論31
5.1 從系統工程來看31
5.2 從系統倫理來看33
5.3 總結33
參考文獻34
參考文獻
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[8] Hall,A,D, A Methodology for System Engineering,D.Van Nostrand,1962
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[10] 曹統域, SPC基本概念及應用,台積電訓練教材,2000
[11] 張延熙,廖坤輿, System Engineering Management,新新季刊,1987
[12] 張延熙,廖坤輿,計畫經營規範探索之一:工程經營,新新季刊,1987
[13] 陳建雄, APQP先期產品品質規劃,台積電訓練教材,1998
[14] 彭昌裕,基本品管七大工具,台積電訓練教材,2001/5/13
[15] 韓光渭,系統工程與倫理,元智大學,2000
[16] 交通部,系統工程統一觀念,交通部交通研究所,1969
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