摘要

現實產業中，不論是高科技產業或是石化工業，製程系統多由多重的因素影響並決定製程輸出的型態與製程控制的方式，針對多重輸入、多重輸出的製程型態，在多重因子相互影響的情形，控制方式益加困難且往往無法在多重因子的控制條件下求解獲得最佳的控制參數，作為製程輸入的設定值。
本研究利用統計製程管制（SPC）、工程製程管制（EPC）、適應控制、回饋控制與品質工程的概念與方法，建構一套簡單的多重輸入、多重輸出之製程控制系統，其中涵蓋了多重輸入、多重輸出（Multiple-Input Multiple-Output）製程子系統、量測子系統、製程輸出分析子系統、參數整合控制子系統與調整子系統五個部分。利用結合多個多重輸入、單一輸出（Multiple-Input Single-Output）之製程系統，簡化多重輸入、多重輸出系統，並依此製程系統模式，詳細探討其流程與執行步驟與相互連結之關係，期望以統計製程管制與工程製程管制之功能，達到有效控制多重輸入、多重輸出之製程系統。

Abstract

In the practice production environment, such as high tech industry or chemical process industry, the character of the most of the system are multiple-input and multiple-output. Due to the disturbance and dependent effect of multiple input control factors, the output values may shift from the target, and it is hard to obtain the optimal input parameters of the manufacturing system.

This study is applying the concepts of statistic process control (SPC), engineering process control (EPC) and process adjustment to construct a simplified multiple-input multiple-output (MIMO) process control system. It includes five sub-systems: MIMO process sub-system, measuring sub-system, process-output analyzing sub-system, parameters-integrated controlling sub-system, adjusting sub-system. In order to simplify the complexity of multiple-Input and multiple-output manufacturing system, we simplify the MIMO system by combining more than one multiple-input and single-output (MISO) manufacturing system. Expected to integrate the functions of SPC and EPC to control and adjust the multiple-input multiple-output manufacturing system effectively.

目錄
中文摘要………………………………………………………………………i
英文摘要………………………………………………………………………ii
誌謝……………………………………………………………………………iii
目錄……………………………………………………………………………iv
圖目錄…………………………………………………………………………vii
表目錄…………………………………………………………………………viii
第一章 緒論……………………………………………………………………1
1.1 研究背景與動機……………………………………………………….1
1.2 研究目的……………………………………………………………….2
1.3 研究範疇與假設……………………………………………………….3
1.4 研究方法與架構……………………………………………………….4
1.5章節概要………………………………………………………….…….7
第二章 文獻探討………………………………………………………………8
2.1 品質系統之相關文獻………………………………………………….8
2.2管制圖應用之相關文獻…………………………………………………9
2.2.1 三種常用之管制圖………………………………………………10
2.2.2 管制圖之功能與應用……………………………………………12
2.3 製程管制之相關文獻…………………………………………………15
2.3.1統計製程管制…………………………………………………….17
2.3.2工程製程管制…………………………………………………….18
2.3.3 整合統計製程管制與工程製程管制……………………………19
2.4 管制與調整之相關文獻………………………………………………23
2.4.1 演算法統計製程管制之文獻探討………………………………23
2.4.2 適應控制與回饋控制之文獻探討………………………………24
2.4.3 EWMA控制…………………………………………………………26
第三章 模式建構…………………………………………………………….28
3.1 多重輸入、多重輸出之製程管制系統架構…………………………28
3.2 多重輸入、多重輸出製程子系統……………………………………32
3.3 量測子系統……………………………………………………………34
3.4 製程輸出分析子系統…………………………………………………36
3.5 參數調整控制子系統…………………………………………………41
3.6 調整子系統……………………………………………………………52
第四章 模式驗證…………………………………………………………….56
4.1模式驗證方法與目的………………………………………………….56
4.2系統架構之驗證、評估與分析……………………………………….56
4.2.1 多重輸入、多重輸出製程子系統之驗證……………………………56
4.2.2 量測子系統之驗證……………………………………………………57
4.2.3 製程輸出分析子系統之驗證…………………………………………58
4.2.4 參數調整控制子系統之驗證…………………………………………61
4.2.5 調整子系統之驗證……………………………………………………63
4.3 模式驗證之績效評量…………………………………………………64
附錄 一 ………………………………………………………………………66
附錄 二 ……………………………………………………………………68
附錄 三 ………………………………………………………………………73
附錄 四 ………………………………………………………………………82
附錄 五 ………………………………………………………………………92
附錄 六 ………………………………………………………………………93
第五章 結論與展望………………………………………………………….95
5.1 研究結論………………………………………………………………95
5.2 未來展望………………………………………………………………96
參考文獻 …………………………………………………………………….97

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